Improving the Thermal Stability of Photoresist Films by Ion Beam Irradiation

1997 ◽  
Vol 504 ◽  
Author(s):  
F. C. Zawislak ◽  
Irene T. S. Garcia ◽  
D. Samios ◽  
D. L. Baptista ◽  
P. F. P. Fichtner ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Energy Density ◽  
Structural Changes ◽  
Considerable Increase ◽  
Ion Beam ◽  
Cross Linking ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Large Loss ◽  
Thermal Stability Of

ABSTRACTThe thermal stability of ion irradiated 1.7 μm thick AZ-1350J photoresist films was investigated using the RBS and ERDA techniques to measure the composition of the irradiated and annealed films. The films have been irradiated with He, N and Ar ions at energies from 380 to 760 keV and fluences between 2 × 1015 and 1016 ions cm−2. A considerable increase in the thermal stability of the He irradiated film is observed from ≈200°C – when the non-irradiated film starts to decompose – to 400°C after the irradiation. The FTIR spectroscopy and the SEM observations were used to study the chemical structural changes and the surface morphology of the irradiated samples. The results are discussed in terms of the energy density deposited by the ions, the large loss of H during irradiation, and the resulting increase in cross-linking density.

Thermal Stability of Liquid Crystals on Blended Polyimide Layers Treated by Ion Beam Irradiation

2010 ◽  
Vol 49 (7) ◽  
pp. 071701 ◽  
Author(s):  
Dai-Hyun Kim ◽  
Hong-Gyu Park ◽  
Young-Hwan Kim ◽  
Byoung-Yong Kim ◽  
Chul-Ho Ok ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Liquid Crystals ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Thermal Stability Of

In-situ observation of structural changes in aluminum during He+ and H2+ dual-ion beam irradiation

1992 ◽  
Vol 191-194 ◽  
pp. 1219-1223 ◽  
Author(s):  
S. Furuno ◽  
K. Hojou ◽  
K. Izui ◽  
N. Kamigaki ◽  
K. Ono ◽  
...  
Keyword(s):  
Structural Changes ◽  
Ion Beam ◽  
In Situ Observation ◽  
Beam Irradiation ◽  
Ion Beam Irradiation

Ion Beam-Induced Amorphization of the Pyrochlore Structure-Type: A Review

2003 ◽  
Vol 792 ◽  
Author(s):  
R. C. Ewing ◽  
J. Lian ◽  
L. M. Wang
Keyword(s):  
Structural Changes ◽  
Dominant Role ◽  
Ion Beam ◽  
Pyrochlore Structure ◽  
Fluorite Structure ◽  
Radiation Response ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Wide Range ◽  
The Ideal

ABSTRACTThis paper reviews the recent developments in the understanding of the radiation-damage processes in A2B2O7 (Fd3m; Z=8) pyrochlore-structure compounds. Pyrochlore structure compounds display a wide range of behaviors in response to ion beam irradiation. Some compositions, such as Gd2Ti2O7, are amorphized at relatively low doses (∼0.2 dpa at room temperature) while other compositions, such as Gd2Zr2O7, do not amorphize (even at doses of 36 dpa at 25 K) and instead disorder to a defect fluorite structure. The response to ion beam irradiation is highly dependent on compositional changes that affect both the structural distortion from the ideal fluorite structure and the associated energetics of the disordering process. Generally, the ionic size of the cations plays a dominant role in determining the radiation response of different pyrochlore compositions. However, the cation ionic radius ratio criteria cannot be applied all-inclusively in predicting the radiation “tolerance” of a pyrochlore. Systematic irradiation studies of the radiation response of rare-earth (A-site) pyrochlores in which B = Ti, Zr, and Sn have shown that the behavior of the pyrochlore also depends on the cation electronic structure, i.e., the type of bonding, which is closely related to the polyhedral distortion and structural deviation from the ideal fluorite structure. These structural changes affect the dynamic defect recovery process directly linked to the material's response to and recovery from irradiation.

Pedigree Construction and SSR Analysis of Broomcorn Millet Mutant by 12C6+ Ion Beam Irradiation

2018 ◽  
Vol 44 (1) ◽  
pp. 144
Author(s):  
Tian-Peng LIU ◽  
Kong-Jun DONG ◽  
Xi-Cun DONG ◽  
Ji-Hong HE ◽  
Min-Xuan LIU ◽  
...  
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Ssr Analysis ◽  
Broomcorn Millet
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