Piezoelectric Properties of Sol-Gel Derived PZT Thin Films with Various Zr/Ti Ratios

1997 ◽  
Vol 493 ◽  
Author(s):  
G. Teqwee ◽  
K. C. McCarthy ◽  
F. S. McCarthy ◽  
D. G. Davis ◽  
J. T. Dawley ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Single Phase ◽  
Piezoelectric Properties ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Piezoelectric Thin Films ◽  
Microelectromechanical Devices ◽  
Acoustic Wave Devices ◽  
Optical Lever

ABSTRACTPiezoelectric thin films are useful for application in microelectromechanical devices. A series of sol-gel derived PZT (lead zirconate titanate) thin films with various Zr/Ti ratios were prepared on platinized substrates. These films were fired to 650C - 700C to crystallize them into single-phase perovskite films, and their piezoelectric properties were measured using optical lever-based instrumentation. Large d33 piezoelectric coefficients up to 400 pm/V were obtained at the morphotropic phase boundary (PZT 53/47), making such films attractive in applications such as thin film transducers, microcanti levers and surface acoustic wave devices.

Ferroelectric Thin Films for Microelectromechanical Device Applications

1992 ◽  
Vol 276 ◽  
Author(s):  
D. L. Polla ◽  
W. P. Robbins ◽  
T. Tamagawa ◽  
C. Ye
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Pyroelectric Coefficient ◽  
Ferroelectric Thin Films ◽  
Zirconate Titanate ◽  
Microelectromechanical Devices ◽  
Device Applications ◽  
Silicon Based

ABSTRACTFerroelectric thin films of the lead zirconate titanate family have been integrated with silicon-based micromachined structures in the fabrication of microelectromechanical devices. Sol-gel deposition techniques have been applied in the formation of ferroelectric thin films with high piezoelectric and pyroelectric coefficients for physical forces sensors and infrared detectors, respectively. Knowledge of both electrical and mechanical properties is important in realizing microelectromechanical devices with predictable performance. This pape reports piezoelectric coefficient, pyroelectric coefficient, dielectric constant, and Young's modulus for lead zirconate titanate and lead titanate thin films.

Microstructural development in sol-gel derived lead zirconate titanate thin films: The role of precursor stoichiometry and processing environment

1996 ◽  
Vol 11 (8) ◽  
pp. 2076-2084 ◽  
Author(s):  
M. J. Lefevre ◽  
J. S. Speck ◽  
R. W. Schwartz ◽  
D. Dimos ◽  
S. J. Lockwood
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Lead Zirconate Titanate ◽  
Single Phase ◽  
Perovskite Phase ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Microstructural Development ◽  
Zirconate Titanate

The role of precursor stoichiometry and local firing environment on the microstructural development of sol-gel derived lead zirconate titanate (PZT) thin films was investigated. Typically, excess Pb is added to films to compensate for PbO volatilization during heat treatment. Here, it is shown that the use of stoichiometric precursors with either a PbO atmosphere powder or a PbO overcoat during the crystallization heat treatment is an attractive and viable alternative method for control of film stoichiometry. Using these approaches, we have fabricated single phase perovskite thin films with microstructures and electrical properties (Pr ∼ 36 μC/cm2 and Ec ∼ 45 kV /cm) comparable to those of films using optimized solution chemistries and excess Pb additions. The potential advantage of increasing PbO partial pressure, or activity, during firing versus excess Pb additions is discussed from the standpoint of a proposed crystallization scenario based on the kinetic competition between Pb loss and the nucleation and growth rates of the perovskite phase.

Early Stages of Crystallization of Sol−Gel-Derived Lead Zirconate Titanate Thin Films

2003 ◽  
Vol 15 (5) ◽  
pp. 1147-1155 ◽  
Author(s):  
A. Wu ◽  
P. M. Vilarinho ◽  
I. Reaney ◽  
I. M. Miranda Salvado
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Early Stages ◽  
Zirconate Titanate

scholarly journals Interfacial mechanisms controlling phase formation in sol-gel derived lead zirconate titanate thin films

1994 ◽  
Vol 17 (6) ◽  
pp. 1005-1014 ◽  
Author(s):  
S B Majumder ◽  
V N Kulkarni ◽  
Y N Mohapatra ◽  
D C Agrawal
Keyword(s):  
Thin Films ◽  
Phase Formation ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate

Piezoelectric properties of a near strain-free lead zirconate titanate thin films deposited on a Si substrate

2019 ◽  
Vol 239 ◽  
pp. 71-74 ◽  
Author(s):  
Tomoya Ohno ◽  
Kentaroh Fukumitsu ◽  
Takamasa Honda ◽  
Akinori Sakamoto ◽  
Sadaaki Tanaka ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Si Substrate ◽  
Zirconate Titanate

Low temperature synthesis of ultrafine Pb(Zr, Ti)O3 powder by sol-gel combustion

1997 ◽  
Vol 12 (10) ◽  
pp. 2518-2521 ◽  
Author(s):  
J. Schäfer ◽  
W. Sigmund ◽  
S. Roy ◽  
F. Aldinger
Keyword(s):  
Lead Zirconate Titanate ◽  
Single Phase ◽  
Sol Gel ◽  
Combustion Process ◽  
Lead Zirconate ◽  
Homogeneous Distribution ◽  
Low Temperature Synthesis ◽  
Metal Nitrates ◽  
Gel Combustion ◽  
Diffusion Paths

Lead zirconate titanate powders are derived from a novel aqueous-based citrate-nitrate/oxynitrate sol-gel combustion process. Aqueous solutions of metal nitrates or oxynitrates are transformed into gels with citric acid under heating. The received gels undergo a self-propagating combustion reaction on heating to 180 °C and subsequently yield voluminous ashes. These ashes form single phase perovskite Pb(Zr0.53Ti0.47)O3 powder with a specific surface area of 8 m2/g upon calcination at 550 °C. The ashes show a homogeneous distribution of lead, zirconium, and titanium ions which guarantees short diffusion paths in solid state formation of PZT perovskite. The redox behavior of the gels was studied with the help of DTA experiments. Powders are characterized in terms of XRD, SEM, and EDX analysis.

Densification and enhanced polarisation in lead zirconate titanate sol–gel thin films

2009 ◽  
Vol 113 (1) ◽  
pp. 135-139 ◽  
Author(s):  
Anirban Chowdhury ◽  
Mikael A. Khan ◽  
Craig James ◽  
Steven J. Milne
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate
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