Towards the Optimization of AMT Barrel Reactors for Silicon Epitaxy

1997 ◽  
Vol 490 ◽  
Author(s):  
M. Masi ◽  
G. Radaelli ◽  
N. Roda ◽  
P. Raimondi ◽  
S. Carra ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Epitaxial Silicon ◽  
Three Dimensional Flow ◽  
Detailed Model ◽  
Silicon Epitaxy ◽  
Reactor Geometry ◽  
Hydrogen Mixtures ◽  
Deposition Uniformity ◽  
Barrel Reactor

ABSTRACTIn this work, the epitaxial silicon deposition by SiHCl3-hydrogen mixtures in a AMT 7700 barrel reactor was analyzed through a detailed model where a three dimensional flow dynamic was solved by reduction to a two dimensional geometry under cylindrical coordinates. The model was used to investigate the role of the reactor geometry and of the process parameters on the axial deposition uniformity. A comparison with industrial experimental data was also performed.

scholarly journals Experimental study of the three-dimensional flow structure in matrix channels

2021 ◽  
Vol 2057 (1) ◽  
pp. 012027
Author(s):  
M V Philippov ◽  
I A Chokhar ◽  
A V Zolotukhin ◽  
A V Barsukov ◽  
V V Terekhov ◽  
...  
Keyword(s):  
Experimental Study ◽  
Three Dimensional ◽  
Decisive Role ◽  
Three Dimensional Flow ◽  
Matrix Channel ◽  
Dimensional Flow ◽  
The Matrix ◽  
Role Based ◽  
High Degree

Abstract The article presents an experimental study of the turbulent flow in matrix channels. Using the modern optical contactless laser Doppler anemometer (LDA) method, an idea of the turbulent three-dimensional flow inside the cells of matrix channels is developed. The results of the study of the matrix channel show that the so-called vortex matrix effect is not formed. The most important factor that causes a high degree of heat transfer from the walls is the intense spiral motion between the matrix cells. The measurements also show that the effects associated with the lateral boundaries of the channel play a significant role. Based on the assumption of the decisive role of the spiral flow between the cells of the matrix channel, a formula for the integral pressure loss is proposed.

Approximate Three-Dimensional Flow Theory for Axial Turbo-Machines

1963 ◽  
Vol 14 (2) ◽  
pp. 125-142 ◽  
Author(s):  
W. T. Howell
Keyword(s):  
Velocity Profile ◽  
Temperature Rise ◽  
Three Dimensional ◽  
Axial Compressor ◽  
Three Dimensional Flow ◽  
Axial Compressors ◽  
Dimensional Flow ◽  
The Subject ◽  
Work Done

SummaryThe subject of three-dimensional flow in axial compressors and turbomachines has been extensively studied since 1945. This paper gives a means of calculating the approximate three-dimensional flow in an axial compressor by giving expressions for the slope of the velocity profile as a function of the axial co-ordinate. These expressions bring out the rôle of the ratio of stage inlet annulus height to stage length in the three-dimensional flow in these machines. The effect of the three-dimensional flow on the stage temperature rise at mean radius is discussed by introducing a work done factor.

Effect of Viscous Dissipation on Three Dimensional Flow of a Nanofluid by Considering a Gyrotactic Microorganism in the Presence of Convective Condition

2018 ◽  
Vol 388 ◽  
pp. 114-123 ◽  
Author(s):  
Bijjanal Jayanna Gireesha ◽  
K. Ganesh Kumar ◽  
N.G. Rudraswamy ◽  
S. Manjunatha
Keyword(s):  
Viscous Dissipation ◽  
Schmidt Number ◽  
Stretching Sheet ◽  
Three Dimensional ◽  
Convective Condition ◽  
3D Flow ◽  
Three Dimensional Flow ◽  
Flow Heat ◽  
Gyrotactic Microorganism

This article deals with the combined effects of viscous dissipation and convective condition on 3D flow, heat and mass transfer of a nanofluid over a stretching sheet by considering gyrotactic microorganism. Appropriate transformations yield the nonlinear ordinary differential systems. The resulting nonlinear system has been solved. Role of substantial parameters on flow fields as well as on heat, mass and microorganism transportation rates are determined and conferred in depth through graphs. It is found that, the larger values of bio-convection Schmidt number decreases the microorganisms profile.

scholarly journals Experimental and Numerical Investigation of Gaseous Detonation in a Narrow Channel with Obstacles

Fluids ◽  
2021 ◽  
Vol 6 (6) ◽  
pp. 224
Author(s):  
Pavel N. Krivosheyev ◽  
Alexey O. Novitski ◽  
Kirill L. Sevrouk ◽  
Oleg G. Penyazkov ◽  
Ivan I. But ◽  
...  
Keyword(s):  
Wave Propagation ◽  
Three Dimensional ◽  
Narrow Channel ◽  
Gaseous Detonation ◽  
Propagation Mechanism ◽  
Three Dimensional Flow ◽  
Thin Channel ◽  
Velocity Deficits ◽  
Reaction Wave

Gaseous detonation propagation in a thin channel with regularly spaced cylindrical obstacles was investigated experimentally and numerically. The wave propagation with substantial velocity deficits is observed and the details of its propagation mechanism are described based on experimental measurements of the luminosity and pressure and on three-dimensional flow fields obtained by numerical simulations. Both experiments and simulations indicate a significant role of shock–shock and shock–obstacle interactions in providing high-temperature conditions necessary to sustain the reaction wave propagation.

scholarly journals Modulation of outer bank erosion by slump blocks: Disentangling the protective and destructive role of failed material on the three-dimensional flow structure

2015 ◽  
Vol 42 (24) ◽  
pp. 10,663-10,670 ◽  
Author(s):  
Christopher Hackney ◽  
Jim Best ◽  
Julian Leyland ◽  
Stephen E. Darby ◽  
Daniel Parsons ◽  
...  
Keyword(s):  
Flow Structure ◽  
Three Dimensional ◽  
Bank Erosion ◽  
Three Dimensional Flow ◽  
Dimensional Flow ◽  
Outer Bank

The Role of Three-Dimensional Imaging in Evaluation of the Sinonasal Mass

1996 ◽  
Vol 34 (1) ◽  
pp. 27
Author(s):  
Sue Yon Shim ◽  
Ki Joon Sung ◽  
Young Ju Kim ◽  
In Soo Hong ◽  
Myung Soon Kim ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Three Dimensional Imaging ◽  
Sinonasal Mass
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