The Use of a Cold Gas Plasma for the Final Processing of Contamination-Free Tem Specimens

1997 ◽  
Vol 480 ◽  
Author(s):  
P. E. Fischione ◽  
J. Ringnada ◽  
Y. Feng ◽  
T. Krekels ◽  
M Hayies ◽  
...  

AbstractThe issue of specimen contamination becomes more important at a rate proportional to the use of high-brightness electron source Transmission Electron Microscopes (TMM). The trend in the transmission electron microscopy of materials science specimens is to use higher-voltage microscopes incorporating field emission gun technology [1]. These FEG TEMs combine smaller electron probes with increased beam current, allowing high resolution specimen imaging and enhanced analytical data collection. This is of particular importance for semiconductor specimens which demand fine-probe microanalyis.

1997 ◽  
Vol 3 (S2) ◽  
pp. 985-986
Author(s):  
P.E. Fischione ◽  
J. Ringnalda ◽  
Y. Feng ◽  
T. Krekels ◽  
H.O. Colijn ◽  
...  

The issue of specimen contamination becomes more important at a rate proportional to the use of high-brightness electron source Transmission Electron Microscopes (TEM). These TEMs combine smaller electron probes with increased current, allowing high resolution specimen imaging and enhanced analytical data collection. Small, high current electron probes tend to increase the detrimental effect of hydrocarbon presence on the specimen's surface. The subsequent formation of carbon deposits caused by the focused probe often times obstructs imaging and precludes acceptable analytical results. by plasma cleaning the specimen, contamination is removed and the results obtained by high resolution electron microscopy (HREM), scanning transmission electron microscopy (STEM) and analytical electron microscopy (AEM) using EDS or electron energy loss spectroscopy (EELS) are greatly enhanced. Recent instrumentation developments have resulted in the application of a high frequency, low energy, reactive gas plasma generated in an oil-free vacuum that chemically removes hydrocarbon contamination from both the TEM specimen holder and the specimen without altering its properties.


Author(s):  
Nakazo Watari ◽  
Yasuaki Hotta ◽  
Yoshio Mabuchi

It is very useful if we can observe the identical cell elements within the same sections by light microscopy (LM), transmission electron microscopy (TEM) and/or scanning electron microscopy (SEM) sequentially, because, the cell fine structure can not be indicated by LM, while the color is; on the other hand, the cell fine structure can be very easily observed by EM, although its color properties may not. However, there is one problem in that LM requires thick sections of over 1 μm, while EM needs very thin sections of under 100 nm. Recently, we have developed a new method to observe the same cell elements within the same plastic sections using both light and transmission (conventional or high-voltage) electron microscopes.In this paper, we have developed two new observation methods for the identical cell elements within the same sections, both plastic-embedded and paraffin-embedded, using light microscopy, transmission electron microscopy and/or scanning electron microscopy (Fig. 1).


Author(s):  
R. Gronsky

The phenomenon of clustering in Al-Ag alloys has been extensively studied since the early work of Guinierl, wherein the pre-precipitation state was characterized as an assembly of spherical, ordered, silver-rich G.P. zones. Subsequent x-ray and TEM investigations yielded results in general agreement with this model. However, serious discrepancies were later revealed by the detailed x-ray diffraction - based computer simulations of Gragg and Cohen, i.e., the silver-rich clusters were instead octahedral in shape and fully disordered, atleast below 170°C. The object of the present investigation is to examine directly the structural characteristics of G.P. zones in Al-Ag by high resolution transmission electron microscopy.


Author(s):  
Hannes Lichte ◽  
Edgar Voelkl

The object wave o(x,y) = a(x,y)exp(iφ(x,y)) at the exit face of the specimen is described by two real functions, i.e. amplitude a(x,y) and phase φ(x,y). In stead of o(x,y), however, in conventional transmission electron microscopy one records only the real intensity I(x,y) of the image wave b(x,y) loosing the image phase. In addition, referred to the object wave, b(x,y) is heavily distorted by the aberrations of the microscope giving rise to loss of resolution. Dealing with strong objects, a unique interpretation of the micrograph in terms of amplitude and phase of the object is not possible. According to Gabor, holography helps in that it records the image wave completely by both amplitude and phase. Subsequently, by means of a numerical reconstruction procedure, b(x,y) is deconvoluted from aberrations to retrieve o(x,y). Likewise, the Fourier spectrum of the object wave is at hand. Without the restrictions sketched above, the investigation of the object can be performed by different reconstruction procedures on one hologram. The holograms were taken by means of a Philips EM420-FEG with an electron biprism at 100 kV.


Author(s):  
M.A. O’Keefe ◽  
J. Taylor ◽  
D. Owen ◽  
B. Crowley ◽  
K.H. Westmacott ◽  
...  

Remote on-line electron microscopy is rapidly becoming more available as improvements continue to be developed in the software and hardware of interfaces and networks. Scanning electron microscopes have been driven remotely across both wide and local area networks. Initial implementations with transmission electron microscopes have targeted unique facilities like an advanced analytical electron microscope, a biological 3-D IVEM and a HVEM capable of in situ materials science applications. As implementations of on-line transmission electron microscopy become more widespread, it is essential that suitable standards be developed and followed. Two such standards have been proposed for a high-level protocol language for on-line access, and we have proposed a rational graphical user interface. The user interface we present here is based on experience gained with a full-function materials science application providing users of the National Center for Electron Microscopy with remote on-line access to a 1.5MeV Kratos EM-1500 in situ high-voltage transmission electron microscope via existing wide area networks. We have developed and implemented, and are continuing to refine, a set of tools, protocols, and interfaces to run the Kratos EM-1500 on-line for collaborative research. Computer tools for capturing and manipulating real-time video signals are integrated into a standardized user interface that may be used for remote access to any transmission electron microscope equipped with a suitable control computer.


Carbon ◽  
2017 ◽  
Vol 117 ◽  
pp. 174-181 ◽  
Author(s):  
Chang’an Wang ◽  
Thomas Huddle ◽  
Chung-Hsuan Huang ◽  
Wenbo Zhu ◽  
Randy L. Vander Wal ◽  
...  

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