Depth of Penetration of the Plasma Fluorination Reaction into Various Polymers

1985 ◽  
Vol 48 ◽  
Author(s):  
Eve A. Wildi ◽  
Gerald J. Scilla ◽  
Alan DeLuca

ABSTRACTThe surfaces of a variety of polymers presenting either primary, secondary, tertiary, vinyl or aromatic protons to the reactive gas environment were fluorinated by glow discharge treatment. Depth profiles of the plasma surface reaction were obtained by SIMS with oxygen ion sputtering. Further information was obtained from the appearance of ESCA traces of these substrates before and after the reaction.

2009 ◽  
Vol 615-617 ◽  
pp. 565-568 ◽  
Author(s):  
Alexander A. Lebedev ◽  
A.E. Belyaev ◽  
N.S. Boltovets ◽  
V.N. Ivanov ◽  
Raisa V. Konakova ◽  
...  

We studied the heat resistance of AuTiBx (ZrBx) barrier contacts to n-SiC 6H and n-GaN. The Schottky barrier diode (SBD) parameters, the concentration depth profiles for contact structure components and the phase composition of contact metallization were measured both before and after rapid thermal annealing (RTA) at temperatures up to 900 °С (1000 °С) for contacts to GaN (SiC 6H). It is shown that the layered structure of metallization and electrophysical properties of Schottky barriers (SBs) remain stable after RTA, thus indicating their heat resistance. The ideality factor n of the I-V characteristic of SBDs after RTA was 1.2, while the SB height φВ was ~0.9 eV (~0.8 eV) for the gallium nitride (silicon carbide) barrier structures.


1992 ◽  
Vol 279 ◽  
Author(s):  
K. K. Bourdelle ◽  
D. O. Boerma

ABSTRACTNi foils and samples consisting of bilayers of Ni or Fe on Al, Ti or Si were implanted at room temperature with 15N+ ions to fluences of around 1×l017 N/cm2. The concentration depth profiles of 15N were determined with nuclear reaction analysis before and after vacuum annealing. It was found that the penetrability for N atoms of the surface and the solid/solid interface plays an important role in the N redistribution during implantation or annealing. The formation of a nitride layer or nitride clusters in Ni and Fe was deduced. Parameters for N migration determined for the metals under investigation are discussed in terms of models.


2009 ◽  
Vol 11 (7) ◽  
pp. 1817-1822 ◽  
Author(s):  
Leron Vandsburger ◽  
Edward J. Swanson ◽  
Jason Tavares ◽  
Jean-Luc Meunier ◽  
Sylvain Coulombe

1995 ◽  
Vol 29 (3) ◽  
pp. 349-357 ◽  
Author(s):  
M. Tanahashi ◽  
T. Yao ◽  
T. Kokubo ◽  
M. Minoda ◽  
T. Miyamoto ◽  
...  

2015 ◽  
Vol 1094 ◽  
pp. 181-187
Author(s):  
Yi Liu ◽  
Wei Xuan Lin ◽  
Wei Bing Ye ◽  
Huan Sheng Li ◽  
Jiong Li ◽  
...  

The depth profiles of Ni-coated copper substrates polished by different mesh size sandpapers were measured by the glow discharge optical emission spectroscopy (GDOES) depth profiling technique. The measured depth profiles were well fitted by the MRI-CRAS model developed recently on the basis of the Mixing-Roughness-Information depth (MRI) model and the CRAter-Simulation (CRAS) model, taking into account the pronounced crater effect upon GDOES depth profiling. The crater effect upon depth profiling was characterized quantitatively and the interface roughness values between the coated Ni layer and the Cu substrates were determined and compared with the ones measured by AFM.


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