Cleaning Technologies using Electrolytic Ionized Water and Analysis Technology of Fine Structures for Next Generation Device Manufacturing

1997 ◽  
Vol 477 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Shinya Yamasaki ◽  
Masaharu Nakamori ◽  
Nahomi Aoto ◽  
Koji Yamanaka ◽  
...  
Keyword(s):  
Pure Water ◽  
Thermal Desorption Spectroscopy ◽  
Absorption Spectrometry ◽  
Deep Submicron ◽  
Oxidation Potential ◽  
Aspect Ratios ◽  
Oxidation Reduction ◽  
Oxidation Reduction Potential ◽  
Fine Structures ◽  
Metallic Contamination

ABSTRACTTo reduce the consumption of chemicals and ultra pure water (UPW) in cleaning processes used in device manufacturing, we have developed wet processes that use electrolytic ionized water (EIW), which is generated by the electrolysis of a diluted electrolyte solution or UPW. EIW can be controlled for wide ranges of pH and oxidation-reduction potential. Anode EIW with diluted electrolyte, which has high oxidation potential, can remove metallic contamination such as Cu and Fe on Si surfaces. EIW contains less than 1/100 of the amount of chemicals contained in conventional cleaning solutions, thus drastically reduces chemical consumption in wet processes. Moreover, electrolyzed UPW can be used as a substitute for conventional UPW to achieve better rinsing characteristics. Electrolyzed UPW reduces the level of residual SO42− ions after SPM cleaning more efficiently than conventional UPW. Thus the amount of rinse water needed is reduce to 1/6 that of the conventional UPW rinse.We also developed a method for analyzing remaining metallic contamination and residual ions in deep-submicron-diameter holes with high aspect ratios. The method is based on conventional atomic absorption spectrometry (AAS), and uses device patterns with high density contact holes. With this method, metallic (Fe) contamination on the order of 1010 atoms/cm2 can be easily analyzed inside 0.1 μm-diameter holes with an aspect ratio of 10. The residual ions in the fine holes can also be detected by thermal desorption spectroscopy (TDS).

Environmentally-benign cleaning for giga DRAM using electrolyzed water

2001 ◽  
Vol 671 ◽  
Author(s):  
Kunkul Ryoo ◽  
Byeongdoo Kang
Keyword(s):  
Pure Water ◽  
Particle Removal ◽  
Electrolyzed Water ◽  
Particle Distributions ◽  
Oxidation Reduction ◽  
Oxidation Reduction Potential ◽  
Water Cleaning ◽  
Concentration Changes ◽  
The Many ◽  
Cleaning Technology

ABSTRACTA present semiconductor cleaning technology is based upon RCA cleaning technology which consumes vast amounts of chemicals and ultra pure water(UPW) and is the high temperature process. Therefore, this technology gives rise to the many environmental issues, and some alternatives such as functional water cleaning are being studied. The electrolyzed water was generated by an electrolysis system which consists of anode, cathode, and middle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case of NH4Clelectrolyte, the oxidation-reduction potential and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.8, and -750mV and 10.0, respectively. AW and CW were deteriorated after electrolyzed, but maintained their characteristics for more than 40 minutes sufficiently enough for cleaning. Their deterioration was correlated with CO2 concentration changes dissolved from air. It was known that AW was effective for Cu removal, while CW was more effective for Fe removal. The particle distributions after various particle removal processes maintained the same pattern. In this work, RCA consumed about 9 chemicals, while EW did only 400ml HCl electrolyte or 600ml NH4Cl electrolyte. It was hence concluded that EW cleaning technology would be very effective for eliminating environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.

scholarly journals Experimental investigation of water quality responses to inorganic pollutants for the establishment of a contamination warning system

2019 ◽  
Vol 19 (7) ◽  
pp. 1965-1977
Author(s):  
Sukmin Yoon ◽  
Seong-Su Kim ◽  
No-Suk Park
Keyword(s):  
Water Quality ◽  
Tap Water ◽  
Pure Water ◽  
Warning System ◽  
Quality Parameters ◽  
Water Quality Parameters ◽  
Residual Chlorine ◽  
Inorganic Pollutants ◽  
Oxidation Reduction ◽  
Oxidation Reduction Potential

Abstract In this study, batch and simulated pipeline experiments were conducted to investigate the response of water quality parameters (pH, conductivity, residual chlorine, turbidity, total organic carbon, UV 254, and oxidation reduction potential (ORP)) to various concentrations of four inorganic pollutants (Cd, Cr, Mn, and Pb). In addition, the possibility of detecting incidents of contamination in the actual water supply system was evaluated by deriving the response intensities of each factor to the concentrations of the pollutants. As a result, pH and ORP were identified as the major water quality parameters responsive to the four inorganic pollutants in this study. The responses were more intense (more sensitive) in pure water than in tap water. The results of the batch and simulated pipeline experiments for tap water showed almost identical tendencies, except for the second level of Mn injection (concentration 0.5 mg/L).

scholarly journals In situ measurements of oxidation–reduction potential and hydrogen peroxide concentration as tools for revealing LPMO inactivation during enzymatic saccharification of cellulose

2021 ◽  
Vol 14 (1) ◽  
Author(s):  
Adnan Kadić ◽  
Anikó Várnai ◽  
Vincent G. H. Eijsink ◽  
Svein Jarle Horn ◽  
Gunnar Lidén
Keyword(s):  
Reduction Potential ◽  
Enzymatic Saccharification ◽  
The State ◽  
Enzyme Inactivation ◽  
Ex Situ ◽  
Process Economics ◽  
Complete Inactivation ◽  
Oxidation Reduction ◽  
Oxidation Reduction Potential

Abstract Background Biochemical conversion of lignocellulosic biomass to simple sugars at commercial scale is hampered by the high cost of saccharifying enzymes. Lytic polysaccharide monooxygenases (LPMOs) may hold the key to overcome economic barriers. Recent studies have shown that controlled activation of LPMOs by a continuous H2O2 supply can boost saccharification yields, while overdosing H2O2 may lead to enzyme inactivation and reduce overall sugar yields. While following LPMO action by ex situ analysis of LPMO products confirms enzyme inactivation, currently no preventive measures are available to intervene before complete inactivation. Results Here, we carried out enzymatic saccharification of the model cellulose Avicel with an LPMO-containing enzyme preparation (Cellic CTec3) and H2O2 feed at 1 L bioreactor scale and followed the oxidation–reduction potential and H2O2 concentration in situ with corresponding electrode probes. The rate of oxidation of the reductant as well as the estimation of the amount of H2O2 consumed by LPMOs indicate that, in addition to oxidative depolymerization of cellulose, LPMOs consume H2O2 in a futile non-catalytic cycle, and that inactivation of LPMOs happens gradually and starts long before the accumulation of LPMO-generated oxidative products comes to a halt. Conclusion Our results indicate that, in this model system, the collapse of the LPMO-catalyzed reaction may be predicted by the rate of oxidation of the reductant, the accumulation of H2O2 in the reactor or, indirectly, by a clear increase in the oxidation–reduction potential. Being able to monitor the state of the LPMO activity in situ may help maximizing the benefit of LPMO action during saccharification. Overcoming enzyme inactivation could allow improving overall saccharification yields beyond the state of the art while lowering LPMO and, potentially, cellulase loads, both of which would have beneficial consequences on process economics.

scholarly journals The Negative Impact of Varicocele on Basic Semen Parameters, Sperm Nuclear DNA Dispersion and Oxidation-Reduction Potential in Semen

2021 ◽  
Vol 18 (11) ◽  
pp. 5977
Author(s):  
Kamil Gill ◽  
Michal Kups ◽  
Patryk Harasny ◽  
Tomasz Machalowski ◽  
Marta Grabowska ◽  
...  
Keyword(s):  
Reduction Potential ◽  
Nuclear Dna ◽  
Study Groups ◽  
Semen Parameters ◽  
Sperm Dna Fragmentation ◽  
Control Groups ◽  
Infertile Men ◽  
Oxidation Reduction ◽  
Oxidation Reduction Potential ◽  
Sperm Dna

Since varicocele is so common in infertile men, this study intends to analyse the relationships between varicocele and conventional semen characteristics, sperm nuclear DNA dispersion and oxidation-reduction potential (ORP) in semen. Varicocele-positive and varicocele-negative infertile men (study groups) showed significantly lower standard sperm parameters and higher sperm DNA fragmentation (SDF) and ORP in semen than healthy volunteers and subjects with proven fertility (control groups). A lower proportion of low SDF levels (0–15% SDF) and higher incidence of high SDF levels (>30% SDF), as well as a higher prevalence of high ORP values (>1.37 mV/106 sperm/mL), were found in the study groups vs. the control groups. Moreover, infertile men had significantly lower odds ratios (ORs) for low SDF levels and significantly higher ORs for high SDF levels and high ORP. SDF and ORP were negatively correlated with sperm number, morphology, motility and vitality. Furthermore, a significant positive correlation was found between SDF and ORP. The obtained results suggest that disorders of spermatogenesis may occur in varicocele-related infertility. These abnormalities are manifested not only by reduced standard semen parameters but also by decreased sperm DNA integrity and simultaneously increased oxidative stress in semen.

Derivation of Optimum Study Factors for Samples Contaminated with Cd Using Electric/Magnetic Field and ORP

2013 ◽  
Vol 813 ◽  
pp. 519-524
Author(s):  
Sang An Ha ◽  
Jei Pil Wang
Keyword(s):  
Magnetic Field ◽  
Heavy Metals ◽  
Removal Rate ◽  
Underground Water ◽  
Liquid Electrode ◽  
Oxidation Reduction ◽  
Oxidation Reduction Potential ◽  
Removal Of Heavy Metals ◽  
High Removal Rate ◽  
Membrane Treatment

A purpose of the present study is to derive optimum study factors for removal of heavy metals using combined alternating current electric/magnetic field and electric membranes for the area contaminated with heavy metals in soil or underground water. ORP (Oxidation Reduction Potential) analysis was conducted to determine an intensity of tendency for oxidation or reduction of the samples contaminated with heavy metals, and electrical membrane treatment was used with adjustment of concentrations and voltages of liquid electrode (Na2SO4) to derive a high removal rate. Removal constants were analyzed to be 0.0417, 0.119, 0.1594 when the voltages were 5V, 10V, 15V, respectively, and treatment efficiency was shown to increase as the liquid electrode concentration was increased. Keywords: heavy metals, electric/magnetic field, ORP, electrical membrane

scholarly journals The influence of oxidation-reduction state on the kinetic stability of pig kidney general acyl-CoA dehydrogenase and other flavoproteins

1984 ◽  
Vol 224 (2) ◽  
pp. 577-580 ◽  
Author(s):  
M Madden ◽  
S M Lau ◽  
C Thorpe
Keyword(s):  
Reduction Potential ◽  
Binding Protein ◽  
Sodium Dithionite ◽  
Egg White ◽  
Kinetic Stability ◽  
Pig Kidney ◽  
Data Support ◽  
Oxidation Reduction ◽  
Oxidation Reduction Potential ◽  
Electron Transferring Flavoprotein

Pig kidney general acyl-CoA dehydrogenase is markedly stabilized against loss of flavin and activity in 7.3 M-urea or at 60 degrees C upon reduction with sodium dithionite or octanoyl-CoA. Electron transferring flavoprotein is similarly stabilized, whereas egg white riboflavin-binding protein loses flavin more readily on reduction. These and other data support the anticipated correlation between the kinetic stability of the holoproteins and the oxidation-reduction potential of their bound flavins.

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