Effect of Sheet Electron-Beam Irradiation (SEBI) on Water
Wettability of Mirror-Finished Si Wafer
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ABSTRACTThe influence of sheet electron beam irradiation ( SEBI ) on the water-wettability of the ( 100 ) plane on the Si wafer etched by hydrofluoric acid ( HF ) is investigated. The wettability energy is estimated from the contact angle of water. The SEBI treatment decreases the contact angle and increases the interfacial energy. Aging decreases the change in the interfacial energy. A rate process is inferred for the interfacial energy changes on the Si wafer.
1998 ◽
Vol 13
(12)
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pp. 3368-3371
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2001 ◽
Vol 16
(2)
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pp. 553-557
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2008 ◽
Vol 72
(1)
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pp. 35-38
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2006 ◽
Vol 47
(11)
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pp. 2846-2851
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