Effect of Post Plasma Treatment on Reliability and Dielectric Properties of SiOF Films Deposited by ECRCVD With SiF4 and O2

1997 ◽  
Vol 476 ◽  
Author(s):  
Seoghyeong Lee ◽  
Jae-Yoon Yoo ◽  
Kyunghui Oh ◽  
Jong-Wan Park
Keyword(s):  
Dielectric Properties ◽  
Plasma Treatment ◽  
Silicon Oxide ◽  
Treatment Time ◽  
Relative Dielectric Constant ◽  
Breakdown Field ◽  
Plasma Treatment Time ◽  
Breakdown Field Strength ◽  
Thermal Stability Of

AbstractThe effect of post plasma treatment on dielectric properties and reliability of fluorine doped silicon oxide (SiOF) films were investigated by measuring their C-V and I-V characteristics, XPS, AFM, and AES. The post plasma treatment of SiOF films was carried out in-situ at 300 °C in the deposition chamber. In this research, when the post plasma treatment time increased, we obtained the following results: (1) The etch rate of SiOF films decreased from 80Å/sec to 10Å/sec. (2) Surface roughness of the plasma treated SiOF films was increased due to the ion bombardment effect of the plasma. (3) The refractive index and relative dielectric constant increased from 1.391 to 1.461 and 3.14 to 3.9, respectively, due to the changes of surface chemistry by the post plasma treatment. (4) The leakage current density of SiOF films prepared by ECRCVD using SiF4 and O2 was less than 1 × 10−9A/cm2. (5) The breakdown field strength increased from 3.5 MV/cm to 8 MV/cm. (6) The thermal stability of the Cu/TiN/SiOF/Si system remained stable up to 600 °C.

The Thermal Stability of Fluorine Doped Silicon Oxide Films Formed by Ecrcvd With SiF4 and O2 Gases

1996 ◽  
Vol 443 ◽  
Author(s):  
Seoghyeong Lee ◽  
Jae-Yoon Yoo ◽  
Jong-Wan Park
Keyword(s):  
Thermal Stability ◽  
Dielectric Properties ◽  
Plasma Treatment ◽  
Exposure Time ◽  
Moisture Absorption ◽  
Silicon Oxide ◽  
Reliability Test ◽  
Air Exposure ◽  
Doped Silicon ◽  
Thermal Stability Of

AbstractThe reliability of SiOF films for intermetal dielectrics in multilevel interconnections of ULSIs is investigated. SiOF films were deposited by ECRCVD using H-free source gases, i.e., SiF4 and O2. The effect of post plasma treatment on the moisture absorption and dielectric properties of SiOF films were carried out in terms of air exposure time. The reliability test of Cu / TiN / SiOF / Si specimen was carried out in terms of temperatures by RTA in N2 ambient. After O2 plasma treatment, no appreciable peak directly related to moisture absorption was detected. The C-V characteristics of the O2 plasma treated SiOF film showed that the film remained to hold the sound dielectric properties even after boiling treatment. The Cu / TiN / SiOF / Si system was found to be reliable up to 600 °C.

FABRICATION OF TWO-DIMENSIONAL PHOTONIC CRYSTALS WITH GE2SB2TE5 NANOHOLE ARRAYS BY NANOSPHERE LITHOGRAPHY

2009 ◽  
Vol 23 (06n07) ◽  
pp. 1300-1305
Author(s):  
KI-HO SONG ◽  
HYUN-YONG LEE ◽  
HOE-YOUNG YANG ◽  
SUNG-WON KIM ◽  
JAE-HEE SEO ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Plasma Treatment ◽  
Treatment Time ◽  
Reduction Rate ◽  
Nanosphere Lithography ◽  
Two Dimensional ◽  
Photonic Bandgaps ◽  
Nanohole Arrays ◽  
Plasma Treatment Time ◽  
Lift Off

Two-dimensional photonic crystals (2D-PCs) with Ge 2 Sb 2 Te 5 ( GST ) nanohole arrays were prepared by the nanosphere lithography (NSL) process. A primary factor of PCs is that the refractive index (n) and the n-modulation can be realized by using the GST films, which exhibit a reversible phase transformation between amorphous and crystalline states by laser illumination. The polystyrene (PS) spheres with a diameter of 500 nm were spin-coated on Si substrate and subsequently reduced by O 2-plasma treatment. The reduced spheres were utilized as a lift-off mask of the NSL process and their size and separation could be precisely controlled. Amorphous GST films were thermally evaporated and then the reduced PS spheres were removed. The fabricated GST nanohole arrays were observed by SEM and AFM. The nanohole diameters are nearly linearly reduced with increasing plasma-treatment time (t). The reduction rate (δ) for the conditions of this work was evaluated to be ~ 0.92 nm/s. The period (Λ) and filling factor (η) of PCs are structure parameters that determine their photonic bandgaps (PBGs). η-modulation can be easily achieved via a control of t and the Λ can be also modulated by the use of PS spheres with specific diameter. In addition, the PBGs for the fabricated GST 2 D PC were calculated by considering the amorphous and crystalline states of GST .

Surface Properties of UHMWPE Fiber after Low Temperature Argon-Plasma Treatment

2012 ◽  
Vol 499 ◽  
pp. 90-94 ◽  
Author(s):  
Jin Yun Xu ◽  
Wen Yu Wang ◽  
Xin Jin
Keyword(s):  
Molecular Weight ◽  
Low Temperature ◽  
Plasma Treatment ◽  
Treatment Time ◽  
Argon Plasma ◽  
Uhmwpe Fiber ◽  
Wetting Ability ◽  
Plasma Treatment Time ◽  
Uhmwpe Fibers ◽  
Ultra High Molecular Weight

To improve the adhesion between ultra-high-molecular-weight polyethylene (UHMWPE) fibers and matrix, the UHMWPE fibers were treated by low temperature argon-plasma. The effects of argon-plasma treatment on the properties of UHMWPE have been investigated. The roughness and wetting ability were all found to increase significantly after modifications. The tensile strength of UHMWE fibers were decreased with the plasma treatment time. The optimum plasma treatment is 2min.The increasing of roughness and wetting ability of UHMWPE fiber are beneficial to the improvement the adhesion between UHMWPE fiber and matrix.

scholarly journals Heterogeneous Bonding of PMMA and Double-Sided Polished Silicon Wafers through H2O Plasma Treatment for Microfluidic Devices

Coatings ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 580
Author(s):  
Chao-Ching Chiang ◽  
Philip Nathaniel Immanuel ◽  
Yi-Hsiung Chiu ◽  
Song-Jeng Huang
Keyword(s):  
Plasma Treatment ◽  
Flow Rate ◽  
Gas Flow ◽  
Treatment Time ◽  
Optical Emission ◽  
Microfluidic Devices ◽  
Oh Radicals ◽  
Gas Flow Rate ◽  
Oh Groups ◽  
Plasma Treatment Time

In this work we report on a rapid, easy-to-operate, lossless, room temperature heterogeneous H2O plasma treatment process for the bonding of poly(methyl methacrylate) (PMMA) and double-sided polished (DSP) silicon substrates by for utilization in sandwich structured microfluidic devices. The heterogeneous bonding of the sandwich structure produced by the H2O plasma is analyzed, and the effect of heterogeneous bonding of free radicals and high charge electrons (e−) in the formed plasma which causes a passivation phenomenon during the bonding process investigated. The PMMA and silicon surface treatments were performed at a constant radio frequency (RF) power and H2O flow rate. Changing plasma treatment time and powers for both processes were investigated during the experiments. The gas flow rate was controlled to cause ionization of plasma and the dissociation of water vapor from hydrogen (H) atoms and hydroxyl (OH) bonds, as confirmed by optical emission spectroscopy (OES). The OES results show the relative intensity peaks emitted by the OH radicals, H and oxygen (O). The free energy is proportional to the plasma treatment power and gas flow rate with H bonds forming between the adsorbed H2O and OH groups. The gas density generated saturated bonds at the interface, and the discharge energy that strengthened the OH-e− bonds. This method provides an ideal heterogeneous bonding technique which can be used to manufacture new types of microfluidic devices.

scholarly journals Study on the Structure and Dielectric Properties of Zeolite/LDPE Nanocomposite under Thermal Aging

Polymers ◽  
2020 ◽  
Vol 12 (9) ◽  
pp. 2108
Author(s):  
Bai Han ◽  
Chuqi Yin ◽  
Jiaxin Chang ◽  
Yu Pang ◽  
Penghao Lv ◽  
...  
Keyword(s):  
Dielectric Properties ◽  
Aging Time ◽  
Thermal Aging ◽  
Aging Treatment ◽  
Dielectric Strength ◽  
Breakdown Field ◽  
Scanning Calorimetry ◽  
Aging Resistance ◽  
The Stability ◽  
Breakdown Field Strength

Nanodoping is an effective way to improve the dielectric properties and the aging resistance of polyethylene. Nano-zeolite has a nano-level porous structure and larger specific surface area than ordinary nano-inorganic oxide, which can be used to improve dielectric properties of low-density polyethylene (LDPE) nanocomposite. The zeolite/LDPE nanocomposites were prepared and subjected to thermal aging treatment to obtain samples with different aging time. Using scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR) and the differential scanning calorimetry (DSC) test to study the microscopic and structure characteristics, it was found that nano-zeolite doping can effectively reduce the thermal aging damage to the internal structure of the nanocomposite; carbonyl and hydroxyl decreased significantly during the thermal aging time, and the crystallinity effectively improved. Nano-zeolite doping significantly improved the morphology and strengthened the aging resistance of the nanocomposite. In the dielectric strength test, it was found that nanodoping can effectively improve the direct current (DC) and alternating current (AC) breakdown field strength and the stability after the thermal aging. The dielectric constant of nanocomposite can be reduced, and the dielectric loss had no obvious change during the aging process. Moreover, the zeolite/LDPE nanocomposite with the doping concentration of 1 wt % had the best performance, for the nano-zeolite was better dispersed.

scholarly journals A Study on the Effect of Ambient Air Plasma Treatment on the Properties of Methylammonium Lead Halide Perovskite Films

Metals ◽  
2019 ◽  
Vol 9 (9) ◽  
pp. 991 ◽  
Author(s):  
Masoud Shekargoftar ◽  
Jana Jurmanová ◽  
Tomáš Homola
Keyword(s):  
Plasma Treatment ◽  
Band Gap ◽  
Treatment Time ◽  
Perovskite Solar Cells ◽  
Ambient Air ◽  
Surface Barrier ◽  
Air Plasma ◽  
Plasma Treatment Time ◽  
Halide Perovskite ◽  
Air Plasma Treatment

Organic-inorganic halide perovskite materials are considered excellent active layers in the fabrication of highly efficient and low-cost photovoltaic devices. This contribution demonstrates that rapid and low-temperature air-plasma treatment of mixed organic-inorganic halide perovskite film is a promising technique, controlling its opto-electrical surface properties by changing the ratio of organic-to-inorganic components. Plasma treatment of perovskite films was performed with high power-density (25 kW/m2 and 100 W/cm3) diffuse coplanar surface barrier discharge (DCSBD) at 70 °C in ambient air. The results show that short plasma treatment time (1 s, 2 s, and 5 s) led to a relatively enlargement of grain size, however, longer plasma treatment time (10 s and 20 s) led to an etching of the surface. The band-gap energy of the perovskite films was related to the duration of plasma treatment; short periods (≤5 s) led to a widening of the band gap from ~1.66 to 1.73 eV, while longer exposure (>5 s) led to a narrowing of the band gap to approx. 1.63 eV and fast degradation of the film due to etching. Surface analysis demonstrated that the film became homogeneous, with highly oriented crystals, after short plasma treatment; however, prolonging the plasma treatment led to morphological disorders and partial etching of the surface. The plasma treatment approach presented herein addresses important challenges in current perovskite solar cells: tuning the optoelectronic properties and manufacturing homogeneous perovskite films.

Reliability of Cu/WN thin Films Deposited on Low Dielectric Constant SiOF ILD

1998 ◽  
Vol 511 ◽  
Author(s):  
Seoghyeong Lee ◽  
Dong Joon Kim ◽  
Sung-Hoon Yang ◽  
Jeongwon Park ◽  
Seil Sohn ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Plasma Treatment ◽  
Silicon Oxide ◽  
Chemical Properties ◽  
Surface Oxidation ◽  
Relative Dielectric Constant ◽  
Low Dielectric ◽  
Sufficient Power ◽  
Metal Interconnects ◽  
Interconnect System

ABSTRACTThe effect of the post plasma treatment on the dielectric properties and reliability of fluorine doped silicon oxide (SiOF) films was studied. Also, the thermal stability of a Cu/WN interconnect system with SiOF intermetal dielectrics was examined by RTA. The surface roughness of SiOF films increased with the increasing plasma treatment power due to ion bombardment effect during the plasma treatment. As the plasma treatment power increased, the dielectric constant increased from 3.16 to 3.43, while the change in the relative dielectric constant of the plasma treated films by the boiling treatment was decreased in magnitude. Furthermore, the chemical properties of the plasma treated SiOF films near the top layer tend to resemble those of thermal oxides by the plasma treatment of sufficient power because of the reduction in the Si-F bonding in the films. In the case of Cu/WN/SiOF/Si multilayer structure, surface oxidation and densification due to the plasma treatment seemed to play an important role in protecting the interdiffusion between SiOF and metal interconnects.

scholarly journals ADHESION OF PET/PSMA INTERFACES REINFORCED WITH PLASMA TREATMENT

2006 ◽  
Vol 13 (02n03) ◽  
pp. 265-271
Author(s):  
CHI-AN DAI ◽  
TAI-AN TSUI ◽  
YAO-YI CHENG
Keyword(s):  
Fracture Toughness ◽  
Plasma Treatment ◽  
Fracture Energy ◽  
Functional Groups ◽  
Surface Composition ◽  
Treatment Time ◽  
Bulk Material ◽  
Plasma Treatment Time ◽  
Pet Film ◽  
Pet Films

The interface between biaxially oriented poly (ethylene terephthalate) (PET) films and poly (styrene-co-maleic anhydride) (PSMA) was reinforced by nitrogen plasma treatment of PET film and subsequent annealing treatment of the PET/PSMA bi-material. The fracture toughness, Gc, of the interface was quantitatively measured using an asymmetric double cantilever beam test (ADCB). X-ray photoelectron spectrometry (XPS) was used to measure the change in the surface composition of PET films upon plasma treatment and correlate the fracture toughness of the interface. The fracture energy of PET/PSMA interface is significantly enhanced by annealing the plasma treated PET with PSMA at a temperature greater than the glass transition temperature of PSMA (~ 120°C). At an annealing temperature of 150°C, Gc increases with increasing plasma treatment time and reaches a plateau value of ~ 100–120 J/m2, a two order of magnitude increase in Gc compared with that of samples annealed at 130°C. The enhancement of the adhesion is resulted from the in-situ formation of copolymers due to reaction between amine functional groups from the plasma treatment and anhydride groups from PSMA. For plasma treatment time < 10 s, scanning electron microscope (SEM) measurement show that the fracture surface is relatively smooth indicating an interfacial failure between PET/PSMA. With increasing plasma treatment time and therefore increasing the amount of nitrogen functional groups on PET surface, large plastic deformation takes place at the PET/PSMA interface. For treatment time ≥ 100–150 s, the PET/PSMA interface becomes stronger than PET bulk material and consequently crack deviates from the interface and the failure occurs within the PET film. The interlayer fracture energy of a biaxially oriented PET film can thus be quantitatively measured with a Gc value of roughly 120 J/m2.

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