The Scattering Distribution from Semiconductors as a Function of Angle and Energy Loss in the Electron Microscope

1996 ◽  
Vol 466 ◽  
Author(s):  
C. B. Boothroyd ◽  
R. E. Dunin-Borkowski ◽  
T. Walther
Keyword(s):  
Electron Microscope ◽  
Energy Loss ◽  
Dark Field ◽  
High Angle ◽  
Scattering Angle ◽  
Annular Dark Field ◽  
Insight Into

ABSTRACTWe examine the scattering distribution from thin C, Ge and thick Si specimens as a function of scattering angle and energy loss, in order to gain insight into the relative contributions to both low and high angle annular dark field images from elastically and inelastically scattered elections.

3d Reconstruction of Sub-Nm Beam Profiles in STEM

2001 ◽  
Vol 7 (S2) ◽  
pp. 344-345
Author(s):  
G. Möbus ◽  
R.E. Dunin-Borkowski ◽  
C.J.D. Hethėrington ◽  
J.L. Hutchison
Keyword(s):  
Electron Beam ◽  
Chemical Analysis ◽  
Energy Loss ◽  
Intensity Distribution ◽  
Dark Field ◽  
Beam Forming ◽  
Dark Field Imaging ◽  
Annular Dark Field ◽  
Electron Energy Loss ◽  
Field Imaging

Introduction:Atomically resolved chemical analysis using techniques such as electron energy loss spectroscopy and annular dark field imaging relies on the ability to form a well-characterised sub-nm electron beam in a FEGTEM/STEM [1-2]. to understand EELS+EDX-signal formation upon propagation of a sub-nm beam through materials we first have to assess precisely the beam intensity distribution in vacuum and find conditions for the best obtainable resolution.Experimental Details:Modern TEM/STEM instruments combine features of both imaging and scanning technology. The beam forming capability approaches closely that for dedicated STEMs, while CCD recording devices allow us to measure the beam profile by direct imaging at magnifications up to 1.5 M. The recording of a “z-section” series through the 3D intensity distribution of the cross-over can therefore be realised by recording of a “condenser focal series”.

Influence of spatial and temporal coherences on atomic resolution high angle annular dark field imaging

2016 ◽  
Vol 169 ◽  
pp. 1-10 ◽  
Author(s):  
Andreas Beyer ◽  
Jürgen Belz ◽  
Nikolai Knaub ◽  
Kakhaber Jandieri ◽  
Kerstin Volz
Keyword(s):  
Dark Field ◽  
Atomic Resolution ◽  
High Angle ◽  
Dark Field Imaging ◽  
Annular Dark Field ◽  
Field Imaging
Sign in / Sign up

Export Citation Format

Share Document