Role of Electron Microscopy in Semiconductor Electronic Defects Analysis
Keyword(s):
AbstractA review of the Transmission Electron Microscopy and Scanning Transmission Electron Microscopy techniques used for electronic defect identification is presented. The structural, chemical and STEM based spectroscopy methods for electronic defect analysis are discussed along with selected examples.
1970 ◽
Vol 28
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pp. 6-7
1982 ◽
Vol 40
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pp. 274-277
Transmission Electron Microscopy studies of texture of Cr underlayer of magnetic recording hard disk
1991 ◽
Vol 49
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pp. 580-581
1990 ◽
Vol 48
(2)
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pp. 336-337
1990 ◽
Vol 48
(3)
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pp. 68-69