Preparation and Electrical Conductivity Measurement of LiSbO3Thin Films
Keyword(s):
Sol Gel
◽
AbstractLiSbO3thin films have been prepared by the sol-gel process with metal alkoxides using a spin-coating method. The (Oll)-oriented and randomly oriented LiSbO3thin films are obtained by the precursor film crystallizing under an atmosphere of a flowing mixture of water vapor and oxygen, and an air atmosphere, respectively. The two different atmospheres also affect the crystallization temperature of the films. The electrical conductivity of the (Oll)-oriented LiSbO3thin film is approximately one order of magnitude larger than that of the randomly oriented LiSbO3thin film in the temperature range of 380 to 600°C.
2018 ◽
Vol 160
◽
pp. 252-257
◽
2020 ◽
Vol 11
(1)
◽
pp. 7614-7620