1.5 μm In0.53Al0.14Ga0.33As/In0.52Al0.48As Distributed Bragg Reflector and Single Cavity Active Layer Grown with In-Situ Double Beam Laser Reflectometry

1996 ◽  
Vol 450 ◽  
Author(s):  
Jong-Hyeob Baek ◽  
Bun Lee ◽  
Jin Hong Lee ◽  
Won Seok Han ◽  
El-Hang Lee
Keyword(s):  
Stop Band ◽  
Chemical Vapor ◽  
Bragg Reflector ◽  
Organic Chemical ◽  
Distributed Bragg Reflector ◽  
Beam Laser ◽  
Good Surface ◽  
Double Beam ◽  
Laser Reflectometry

ABSTRACTWe report the highly reflecting (>99.9%) In0.53Al0.14Ga0.33As/In0.52Al0.48As 30.5 pairs distributed Bragg reflector (DBR) and the In0.53Ga0.47As/ In0.52Al0.48As active cavity layer grown at high temperature by low pressure metal organic chemical vapor deposition with in-situ double beam laser reflectometry. One of the laser wavelengths selected for in-situ measurement was same as the DBR wavelength. The growth temperature was 750 °C. Good surface morphology of the multi-layer stacks was achieved by the temperature ramping of the InP buffer layer at the beginning of a multi-layer stacks. The width of stop band edge of the DBR reflectivity spectrum was found to be 1000Å.

Monolithic 1.55μm Surface Emitting Laser Structure With In0.53Al0.14Ga0.33As/In0.52Al0.48As Distributed Bragg Reflector and Single Cavity Active Layer Grown by Meatalorganic Chemical Vapor Deposition Method

1997 ◽  
Vol 484 ◽  
Author(s):  
J.-H. Baek ◽  
B. Lee ◽  
W. S. Han ◽  
J. M. Smith ◽  
B. S. Jeong ◽  
...  
Keyword(s):  
Active Layer ◽  
Reflectance Spectrum ◽  
Chemical Vapor ◽  
Bragg Reflector ◽  
Flat Band ◽  
Chemical Vapor Deposition Method ◽  
Distributed Bragg Reflector ◽  
Surface Emitting Laser ◽  
Single Cavity

AbstractVertical cavity surface emitting laser (VCSEL) structure designed at 1.55 μm was grown by low pressure metalorganic chemical vapor deposition method. The VCSEL structure contains top and bottom distributed Bragg reflector (DBR) and single cavity active layer. The DBR was grown with In0.53Al0.14Ga0.33As and In0.52Al0.48As quarter lambda wavelength layer, alternatively. The growth temperature was as high as 750°C to prevent ordering and phase separation of the In0 52Al0.48As layer. The In0.52Al0.48As buffer layer was subsequently grown on the InP buffer layer in order to make an abrupt uniform interface. Unity reflectance was achieved at the center of 1.55 μm with 35.5 pairs undoped DBR layer. The reflectance spectrum of undoped DBR showed a wide flat-band region (greater than 50 nm) where the reflectivity was more than 99.5 %. The center wavelength of DBR was previously determined by an in-situ laser reflectometry technique during the growth of the whole structure. An infrared laser operating at 1.53 μm, which was the design wavelength of DBR layer was used as an in-situ measuring tool. The In0.53Ga0.47As multiple quantum well was used as a cavity layer. The reflectance spectrum of VCSEL structure, which included a single cavity active layer, showed excellent square shaped stop band and also showed an absorption region at the center of the flat band.

Quality-enhanced GaN epitaxial films on Si(111) substrates by in situ deposition of SiN on a three-dimensional GaN template

RSC Advances ◽  
2016 ◽  
Vol 6 (88) ◽  
pp. 84794-84800 ◽  
Author(s):  
Yunhao Lin ◽  
Meijuan Yang ◽  
Wenliang Wang ◽  
Zhiting Lin ◽  
Guoqiang Li
Keyword(s):  
Vapor Deposition ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Epitaxial Films ◽  
Organic Chemical ◽  
3 Dimensional ◽  
In Situ Deposition ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

High-quality crack-free GaN epitaxial films were successfully grown on Si(111) substrates using metal–organic chemical vapor deposition by in situ depositing SiN on a 3-dimensional (3D) GaN template.

Migration-Enhanced Molecular Beam Epitaxial Growth and Characterization of GaAs on Si Substrates

1988 ◽  
Vol 144 ◽  
Author(s):  
J.H. Kim ◽  
S. Sakai ◽  
J.K. Liu ◽  
G. Raohakrishnan ◽  
S.S. Chang ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Molecular Beam ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Cross Sectional ◽  
Light Emitting ◽  
Si Substrates ◽  
Molecular Beam Epitaxial

ABSTRACTWe first report on migration-enhanced molecular beam epitaxial (MEMBE) growth and characterization of the GaAs layers on Si substrates (GaAs/Si). Excellent surface morphology GaAs layers were successfully grown on (100) Sisubstrates misoriented 4 toward [110] direction. The MEMBE growth method isdescribed and material properties are compared with those of normal two-step MBE-grown or in-situ annealed layers. Micrographs of cross-sectional view transmission electron microscopy (TEM) and scanning surface electron microscopy (SEM) of MEMBE-grown GaAs/Si showed dislocation densities of 107 cm-2 over ten times lower than those of two-step MBE-grown or in-situ annealedlayers. AlGaAs/GaAs double heterostructure lasers and light-emitting diodeshave been successfully grown on MEMBE GaAs/Si by both metal organic chemical vapor deposition and liquid phase epitaxy. MOCVD-grown lasers showed peak output power as high as 184 mW/facet, pulsed threshold currents as low as150 mA at 300 K, and differential quantum efficiencies of up to 30 %. The LPE-grown light-emitting diodes showed output powers of 1.5 mW and external quantum efficiencies of 3.3 mW/A per facet.

Improved Resistivity of GaN with Partially Mg-Doped Grown on Si(111) Substrates by MOCVD

2012 ◽  
Vol 442 ◽  
pp. 16-20
Author(s):  
Yong Wang ◽  
Nai Sen Yu ◽  
Ming Li ◽  
Kei May Lau
Keyword(s):  
Surface Morphology ◽  
Buffer Layer ◽  
Chemical Vapor ◽  
High Resistivity ◽  
Organic Chemical ◽  
Good Surface ◽  
Metal Organic ◽  
Dc Current ◽  
Gan Buffer Layer ◽  
Mg Doped

The continuous 1.0 µm GaN epilayers with and without partially Mg-doped were grown on Si (111) substrates by metal organic chemical vapor deposition (MOCVD). The DC current-voltage (I-V), time-of-flying secondary ion mass spectrometer (ToF-SIMS) and atomic force microscope (AFM) measurements were employed for comparison to characterize surface morphology and resistivity of GaN buffer layer with and without partially Mg-doped. The sample of 1.0 µm GaN epilayer with partially Mg-doped shows much higher resistivity than sample without Mg-doped, which indicates the partially Mg doping in 1.0 µm GaN epilayer can effectively increase the resistivity of GaN grown on Si (111) substrates. As a result, the high resistivity GaN buffer layer with good surface morphology is achieved in the partially Mg-doped GaN buffer layer.

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