In Situ Reflection High-Energy Electron Diffraction Study of Structure and Morphology Evolution of AlN Thin Films During Growth
Keyword(s):
X Ray
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ABSTRACTAIN films were grown on Si (111) substrates using a PSMBE deposition system. Two types of growth methods were used: (i) a continuous growth at one temperature and (ii) a two stage growth where a buffer layer at low temperature is followed by deposition at higher temperature. The structure and morphology of the films grown at different temperatures are compared. The evolution of surface structure and morphology of the film during the growth were studied using in-situ RHEED, X-ray diffraction, and AFM.