Microstructural Studies of Co Silicide Layers Formed on SiGe and SiGeC
Keyword(s):
AbstractTransmission electron microscopy is used to investigate the structural development as a function of the annealing temperature of Co-silicides prepared on SiGe and SiGeC. The transition temperature from Co(SiGe) into Co(SiGe)2 is higher for SiGeC than for SiGe.
1967 ◽
Vol 25
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pp. 312-313
1989 ◽
Vol 37
(2)
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pp. 203-216
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2009 ◽
pp. 189-189-10
2010 ◽
Vol 638-642
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pp. 2938-2943
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