Dark Current Spectroscopy Of Metals In Silicon
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AbstractDark current spectroscopy (DCS) is used to identify the signature of metals that generate dark or leakage current in silicon image sensors. Individual metal atoms or defects are detected by DCS on a pixel-by-pixel basis. DCS is applied here to show how the number of electrically active iron atoms in a pixel changes with light and with low-temperature anneals. The measurements explore the dissociation and association of iron-boron pairs and the diffusion of iron near room temperature.
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2003 ◽
Vol 50
(1)
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pp. 77-83
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2004 ◽
Vol 52
(4)
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pp. 479-487
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2019 ◽
Vol E102.A
(7)
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pp. 914-917
2015 ◽
Vol 1123
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pp. 73-77
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