Fracture of Thin Tantalum Nitride Films on Ain Substrates

1996 ◽  
Vol 436 ◽  
Author(s):  
N. R. Moody ◽  
D. Medlin ◽  
D. P. Norwood

AbstractNanoindentation, continuous nanoscratch testing, and transmission electron microscopy were used in this study to determine the structure-property relationships of thin tantalum nitride resistor films on aluminum nitride substrates. The films were sputter-deposited to a nominal thickness of 200 nm during one production run and then tested at room temperature. Most films were uniform in structure and thickness, consisting of fine equiaxed crystallites along the film-substrate interfaces and long columnar grains further away from the interface. However, one film varied greatly in thickness across the substrate. It had large crystallites along the film-substrate interface and clusters of columnar grains. Most importantly, it contained a far greater amount of porosity than the other films. The high porosity content led to significantly lower elastic moduli and hardness values than the low porosity films and a much greater susceptibility to fracture.

1994 ◽  
Vol 343 ◽  
Author(s):  
G. A. Bertero ◽  
R. Sinclair

ABSTRACTA series of Pt/Co multilayers were sputter-deposited under various deposition conditions to promote structural changes resulting in marked differences in both the perpendicular anisotropy and magnetic coercivity. High resolution transmission electron microscopy was used in combination with other analytical techniques to study the structure of these films. It was found that the most important feature controlling the magnitude of the anisotropy is the interface sharpness. Conversely properties such as the quality of the (111) texture, grain shape or the defect structure, were found to be of secondary importance. The magnetic coercivity ranged from 0.6 to 7 kOe depending on the sputtering conditions and was found to depend strongly on the grain boundary structure rather than on the grain size.


2000 ◽  
Vol 15 (5) ◽  
pp. 1062-1068 ◽  
Author(s):  
W. Brückner ◽  
V. Weihnacht ◽  
W. Pitschke ◽  
J. Thomas ◽  
S. Baunack

The evolution in both stress and microstructure was investigated on sputtered Cu0.57Ni0.42Mn0.01thin films of 400 nm thickness during the first temperature cycle up to 550 °C. Samples from stress–temperature measurements up to various maximum temperatures were analyzed by x-ray diffraction, scanning and transmission electron microscopy, and Auger electron spectroscopy. The columnar grains with lateral diameters of about 20 nm in the as-deposited state coarsen to about 400 nm above 300 °C. Probably due to the impurity (Mn) drag effect, the coarsening occurs by abnormal grain growth rather than by normal grain growth, starting near the film–substrate interface. The stress development results from a combination of densification due to grain growth and plastic stress relaxation.


2003 ◽  
Vol 426-432 ◽  
pp. 3403-3408 ◽  
Author(s):  
N.R. Moody ◽  
D.P. Adams ◽  
D.L. Medlin ◽  
T. Headley ◽  
N. Yang

2013 ◽  
Vol 1550 ◽  
Author(s):  
Anuja Datta ◽  
Pritish Mukherjee

ABSTRACTWe report on the fabrication of various high quality GaS nanostructures (angular nanobelts, nanowedges and nanotubes) and In2S3 nanostructures (tapered nanorods, nanobelts and nanowires) by catalyst assisted thermal evaporation process. The morphology and structures of the products were controlled by temperature and position of the substrates with respect to the source material. The morphologies of GaS and In2S3 nanostructures were examined by X-ray diffraction (XRD), scanning electron microscope (SEM), high-resolution transmission electron microscope (HRTEM), and energy dispersive spectroscopy (EDS). The optical and electronic properties of the synthesized materials were investigated in order to obtain a better fundamental understanding of the structure-property relationships in these materials which can be extended to other layered sulfide materials systems.


Author(s):  
Richard J. Spontak ◽  
Alan H. Windle

Electron-diffraction analysis and dark-field (DF) imaging of crystalline structure in highly-oriented polymers have been used effectively to discern structure-property relationships in these materials. Diffraction patterns of some thermotropic copolyesters, such as those composed of 4-hydroxybenzoic acid (B) and 2,6-hydroxynaphthoic acid (N) or those from N and terephthalic acid/hydroxyaniline (TA), exhibit sharp equatorial reflections, suggestive of finite intermolecular ordering, and aperiodic meridional maxima, indicative of random intramolecular sequencing (see inset of Fig. 1). However, diffraction analysis of a related thermotropic copolymer, composed of B and isophthalic acid/hydroquinone (IQ), reveals periodic meridional maxima and ill-defined equatorial reflections. DF imaging in conventional transmission electron microscopy is utilized here to permit accurate assessment of the crystallite morphologies in these two chemically-related families.Samples of the B-N and N-TA materials were provided by the Hoechst-Celanese Corporation, and the B-IQ copolymer was supplied by ICI Advanced Materials. Electron-transparent films were produced by first heating a small chunk of each material on freshly-cleaved rocksalt to a predesignated temperature. The samples were then quickly sheared with a razor blade, and the resultant films were quenched on an aluminum block.


1994 ◽  
Vol 356 ◽  
Author(s):  
Karen E. Harris ◽  
Alexander H. King

AbstractWe have studied the microscopic effects of tensile stress on film thickness and grain growth in gold thin films of 25nm nominal thickness using transmission electron microscopy. Free-standing films were annealed at 150°C resulting in films with columnar grains and 〈111〉 fiber texture. After repeated anneals, tensile stresses caused by grain growth became large enough to cause cracks to form and propagate diffusively. While tensile stress must eventually result in an overall decrease in film thickness, local specimen thickening in front of crack tips is observed. The tensile stress also profoundly affected grain growth in these films. Grains near crack tips are larger than grains 400nm away from the tips, and elongated grains with axial ratios greater than 15 have been observed in cracked regions of the films.


2015 ◽  
Vol 11 (5) ◽  
pp. 3597-3608 ◽  
Author(s):  
Alaa Fahmy

The synthesis of silver nanoparticles with different sizes and concentrations was carried out using NaBH4 as a reducing agent and polyethylene glycol (PEG) as a stabilizer. The thin films of PEG embedded with Ag nanoparticles (Ag NPs) were deposited by electrospray deposition technique (ESD) and the morphology of subsequent prepared films was studied by AFM. Structure-property relationships of the colloid and subsequent films were discussed in dependence on the concentration of NaBH4. The synthesized Ag/PEG nanocomposite solution was characterized by UV-visible spectroscopy and Transmission electron microscopy (TEM). Chemical composition in the whole and on the surface of films were investigated by Fourier transform infrared (ATR-IR) and X-ray photoelectron microscopy (XPS), respectively. The UV-visible results indicate to the formation of spherical Ag NPs where the absorption peak was observed at wavelengths around 395 nm. TEM images showed the well dispersion of Ag NPs in the PEG matrix with average particle size of 13 nm.  Furthermore, the antimicrobial activity of the nanocmposite was studied. The Ag NPs released from the polymer matrix proven to have a significant antimicrobial activity against S. Pneumonia, B. Subtilis, E. Coli, and A. Fumigates.


1998 ◽  
Vol 547 ◽  
Author(s):  
Ian E. Grey ◽  
Robert S. Roth ◽  
Gus Mumme ◽  
Leonid A. Bendersky ◽  
Dennis Minor

AbstractDoping of calcium tantalate, Ca2Ta2O7, with small amounts (<5 mole%) of Ca2Nb2O7 results in a 50% increase in the dielectric constant, K (from 23 to 35 at 1 MHz), and a zero temperature coefficient of K is achieved at about 18 mole% of Ca2Nb2O7. This opens up the possibility of applications in microwave communication devices. Crystallographic information needed to understand the structure/property relationships in this system is lacking. We have prepared samples of calcium tantalates doped with different elements including Nb, Sm, Ti, Nd and Zr, and have structurally characterised them using X-ray diffraction and transmission electron microscopy. The diffraction patterns of the tantalates all display strong subcell reflections characteristic of the trigonal weberite structure together with complex distributions of superlattice reflections that depend on the nature and concentration of the dopant and on the reaction temperature. The diffraction patterns were indexed using related trigonal or pseudo-trigonal unit cells with a ~7.3 Å, c ~ n × 6 Å. Polytypes with n = 3, 4, 5, 6 and 7 were prepared as single crystals by the flux method. Single crystal X-ray data was used in conjunction with high resolution electron microscope images to solve the structures. Details are given for a 6M polytype (M=monoclinic). A characteristic structural feature of the polytypes is a fluorite-type cation array which is periodically twinned on (111)f to give mixed cubic-hexagonal stacking of the cation layers. The structure relations with the pyrochlore and weberite structures are discussed.


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