Sol-gel processing of oxide thin films offers the potential to generate different microstructures by varying process parameters such as water of hydrolysis, chemical precursor, or substrate. For this work, barium titanate (BaTiO3) thin films were prepared by the sol-gel method in order to try and generate different microstructures for dielectric measurements. However, for BaTiOs prepared using alkoxide precursors, the final microstructures of the films were found to be almost process independent. Films using different precursors, different substrates, and different amounts of water of hydrolysis all showed similar TEM microstructures. All the films after final heat treatment were polycrystalline, nanoporous, and randomly oriented BaTiO3; they were also fine-grained, with an average uniform grain size of 25-50 nm (Fig. 1). This fine-grained microstructure has also been observed in other studies of sol-gel derived BaTiO3 thin films. In addition to BaTiO3, electron diffraction patterns showed the presence of trace amounts of rutile TiO2 that were not observed by x-ray diffraction (XRD).