In Situ Rapid Thermal Hydrogenation Pretreatment of Ti for Salicide RTA

1996 ◽  
Vol 429 ◽  
Author(s):  
K. Ando ◽  
T. Ishigami ◽  
Y. Matsubara ◽  
T. Horiuchi ◽  
S. Nishimoto
Keyword(s):  
Crystal Structure ◽  
Phase Transition ◽  
Diffraction Analysis ◽  
Sheet Resistance ◽  
Rapid Thermal Annealing ◽  
Titanium Silicide ◽  
Silicide Formation ◽  
X Ray Diffraction ◽  
X Ray

AbstractAn in situ rapid thermal hydrogenation (RTH) pretreatment of titanium prior to rapid thermal annealing (RTA), or RTH/RTA, is proposed as a silicide formation annealing in a CMOS self-aligned silicide (salicide) process. The in situ RTH is found to enhance silicidation, to reduce nitridation, and even to lower the resultant sheet resistance of titanium silicide.During in situ RTH (e.g., at 550°C), amorphous Ti silicide (e.g., 15-nm thick) grows selectively on Si. Furthermore, Ti nitridation during subsequent RTA (690°C, N2, 10 Torr, 30 s) is reduced depending on RTH (H2, 10 Torr, 30 s) temperature. Accordingly, for 550°C RTH and an initial Ti thickness of 15 nm, the sheet resistance obtained at the 0.27-μm-wide n+ poly-Si gate after a phase transition annealing (800°C, Ar, 10 s) was lower (11.7 Ω /□, st. dev. = 6%) than that of conventional Ti silicide (15.8 Ω/□, st. dev. = 10%). The silicidation enhancement and nitridation reduction are related to crystal structure metamorphosis or to hydrogen interstitial incorporation in the Ti layer during RTH as observed by x-ray diffraction analysis. It is concluded that in situ RTH pretreatment before RTA is very promising as a sub-quarter-micron CMOS salicide process.

scholarly journals Titanium Silicide Formation in Presence of Oxygen

1992 ◽  
Vol 15 (1) ◽  
pp. 9-26 ◽  
Author(s):  
C. Nobili ◽  
F. Nava ◽  
G. Ottaviani ◽  
M. Costato ◽  
G. De Santi ◽  
...  
Keyword(s):  
Electron Spectroscopy ◽  
Rutherford Backscattering Spectrometry ◽  
Titanium Silicide ◽  
Silicide Formation ◽  
Metal Oxidation ◽  
X Ray Diffraction ◽  
Amorphous Films ◽  
Titanium Disilicide ◽  
X Ray

In-situ resistivity vs. temperature, Rutherford backscattering spectrometry, Auger electron spectroscopy and X-ray diffraction measurements have been performed in order to study the effects arising from the presence of oxygen in the annealing ambient on the integrity of amorphous films of TiSix, with x ranging from 1.45 to 2.1. Crystalisation occurs around 400 C. The presence of oxygen produces the formation of silicon and titanium oxide around 500 C. Critical analysis of the experimental results have indicated that metal oxidation is inhibited when an excess of silicon is present, which suggests the use of a sputtered Si coating cap as a medium capable of effectively decoupling the silicide film from oxygen. This avoids unwanted Ti oxidation even in heavily oxygen contaminated ambients up to the highest temperatures used for the formation of low resistivity titanium disilicide.

In situ x‐ray diffraction analysis of the C49–C54 titanium silicide phase transformation in narrow lines

1995 ◽  
Vol 66 (14) ◽  
pp. 1732-1734 ◽  
Author(s):  
R. A. Roy ◽  
L. A. Clevenger ◽  
C. Cabral ◽  
K. L. Saenger ◽  
S. Brauer ◽  
...  
Keyword(s):  
Phase Transformation ◽  
Diffraction Analysis ◽  
Titanium Silicide ◽  
Silicide Phase ◽  
X Ray Diffraction ◽  
X Ray

In situ X-ray diffraction analysis of Pb(Zr0.52Ti0.48)O3 phase transition in CoFe2O4/Pb(Zr0.52Ti0.48)O3 2-2-type bilayer films

2010 ◽  
Vol 25 (S1) ◽  
pp. S45-S47
Author(s):  
Ji-Ning Wang ◽  
Wei-Li Li ◽  
Xiao-Liang Li ◽  
W. D. Fei
Keyword(s):  
Phase Transition ◽  
Diffraction Analysis ◽  
Magnetoelectric Effect ◽  
Bilayer Film ◽  
X Ray Diffraction ◽  
Si Substrate ◽  
X Ray ◽  
Bilayer Films ◽  
Tetragonal Phase Transition

A 2-2-type nanostructure bilayer film of CoFe2O4/Pb(Zr0.52Ti0.48)O3 was successfully prepared on the (111)Pt/Ti/SiO2/Si substrate. The Pb(Zr0.52Ti0.48)O3 layer in the bilayer film is (111) oriented and is a mixture of tetragonal and monoclinic phases. The results from an in situ X-ray diffraction analysis of the multiferroic bilayer film under statistic magnetic field indicate that the monoclinic-tetragonal phase transition was induced by magnetostriction of the CoFe2O4 layer. A large magnetoelectric effect was obtained probably because of the different polarization directions of the tetragonal and monoclinic phases.

In-Situ x-Ray Diffraction Analysis of TiSi2 Phase Formation from a Titanium-Molybdenum Bilayer

1996 ◽  
Vol 441 ◽  
Author(s):  
C. Cabral ◽  
L. A. Clevenger ◽  
J. M. E. Harper ◽  
R. A. Roy ◽  
K. L. Saenger ◽  
...  
Keyword(s):  
Diffraction Analysis ◽  
Thermal Annealing ◽  
Phase Formation ◽  
Rapid Thermal Annealing ◽  
Polycrystalline Silicon ◽  
Silicon Substrates ◽  
X Ray Diffraction ◽  
Si Substrate ◽  
X Ray

AbstractWe demonstrate that the addition of a molybdenum interlayer between titanium and silicon enhances the formation of C54 TiSi2, without bypassing the formation of the C49 TiSi2 phase. In situ x-ray diffraction analysis during rapid thermal annealing, at a rate of 3 °C/s, was used to study the phase formation sequence of TiSi2 starting from a blanket bilayer of Ti on Mo on a polycrystalline Si substrate. It was shown, as in the case without the Mo layer, that the C49 TiSi2 phase forms first, followed by the C54 TiSi2 phase. The results were similar for undoped or arsenic, boron, and phosphorous doped polycrystalline silicon substrates. The temperature range over which the C49 phase is stable is reduced, on average, by 80 °C. The lower end of the range (appearance of C49) is increased by approximately 60 °C and the upper end of the range (disappearance of C49) is decreased by about 20 0C. The orientation of the C49 phase differs in that both the C49(131) and C49(060) orientations are observed, compared to the case without the Mo layer where only the C49(131) orientation is observed.

scholarly journals Pressure-induced Jahn-Teller Switch in the Homoleptic Hybrid Perovskite [(CH3)2NH2]Cu(HCOO)3: Orbital Reordering by Unconventional Degrees of Freedom

2021 ◽  
Author(s):  
Rebecca Scatena ◽  
Michał Andrzejewski ◽  
Roger D Johnson ◽  
Piero Macchi
Keyword(s):  
Phase Transition ◽  
High Pressure ◽  
Coordination Polymer ◽  
Degrees Of Freedom ◽  
X Ray Diffraction ◽  
X Ray ◽  
Hybrid Perovskite ◽  
Jahn Teller

Through in-situ, high-pressure x-ray diffraction experiments we have shown that the homoleptic perovskite-like coordination polymer [(CH3)2NH2]Cu(HCOO)3 undergoes a pressure-induced orbital reordering phase transition above 5.20 GPa. This transition is distinct...

PHASE TRANSITION IN LAYERED PEROVSKITE LIKE MANGANATE Ca3Mn2O7 UNDER HIGH PRESSURE

2001 ◽  
Vol 15 (18) ◽  
pp. 2491-2497 ◽  
Author(s):  
J. L. ZHU ◽  
L. C. CHEN ◽  
R. C. YU ◽  
F. Y. LI ◽  
J. LIU ◽  
...  
Keyword(s):  
Crystal Structure ◽  
High Pressure ◽  
Diamond Anvil Cell ◽  
The Other ◽  
Layered Perovskite ◽  
X Ray Diffraction ◽  
Two Phase ◽  
X Ray ◽  
Diamond Anvil

In situ high pressure energy dispersive X-ray diffraction measurements on layered perovskite-like manganate Ca 3 Mn 2 O 7 under pressures up to 35 GPa have been performed by using diamond anvil cell with synchrotron radiation. The results show that the structure of layered perovskite-like manganate Ca 3 Mn 2 O 7 is unstable under pressure due to the easy compression of NaCl-type blocks. The structure of Ca 3 Mn 2 O 7 underwent two phase transitions under pressures in the range of 0~35 GPa. One was at about 1.3 GPa with the crystal structure changing from tetragonal to orthorhombic. The other was at about 9.5 GPa with the crystal structure changing from orthorhombic back to another tetragonal.

scholarly journals Insertion of Phosphenium Ions into a Bicyclo[1.1.0]Tetraphosphabutane Iron Complex

Molecules ◽  
2021 ◽  
Vol 26 (13) ◽  
pp. 3920
Author(s):  
Martin Weber ◽  
Gábor Balázs ◽  
Alexander V. Virovets ◽  
Eugenia Peresypkina ◽  
Manfred Scheer
Keyword(s):  
Diffraction Analysis ◽  
Room Temperature ◽  
31P Nmr ◽  
Spectroscopic Studies ◽  
Iron Complex ◽  
The Novel ◽  
X Ray Diffraction ◽  
X Ray ◽  
Phosphenium Ions

By reacting [{Cp‴Fe(CO)2}2(µ,η1:1-P4)] (1) with in situ generated phosphenium ions [Ph2P][A] ([A]− = [OTf]− = [O3SCF3]−, [PF6]−), a mixture of two main products of the composition [{Cp‴Fe(CO)2}2(µ,η1:1-P5(C6H5)2)][PF6] (2a and 3a) could be identified by extensive 31P NMR spectroscopic studies at 193 K. Compound 3a was also characterized by X-ray diffraction analysis, showing the rarely observed bicyclo[2.1.0]pentaphosphapentane unit. At room temperature, the novel compound [{Cp‴Fe}(µ,η4:1-P5Ph2){Cp‴(CO)2Fe}][PF6] (4) is formed by decarbonylation. Reacting 1 with in situ generated diphenyl arsenium ions gives short-lived intermediates at 193 K which disproportionate at room temperature into tetraphenyldiarsine and [{Cp‴Fe(CO)2}4(µ4,η1:1:1:1-P8)][OTf]2 (5) containing a tetracyclo[3.3.0.02,7.03,6]octaphosphaoctane ligand.

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