Effects of Magnetic Field Configuration on Rf Sputtering for CdS/CdTe Solar Cells

We report studies of solar cells prepared by rf planar magnetron sputtering in which the films were deposited using magnetic field structures ranging from approximately balanced to strongly unbalanced in the “type II” configuration. For films grown with the unbalanced configurations, we find much stronger photoluminescence and much better cell performance than for the balanced configuration. The CdTe films show differences in electrical performance depending on magnetic field as well. These effects are interpreted as arising from the enhanced electron and ion bombardment of the film growth interface for the unbalanced magnetrons. Using two unbalanced magnetrons we have fabricated an all-rf-sputtered cell with NREL-verified efficiency of 11.66% at air mass 1.5 illumination.