Characterization of Polysilicon films using atomic force microscopy

1996 ◽  
Vol 424 ◽  
Author(s):  
Francis P. Fehlner ◽  
Chad B. Moore ◽  
J. Greg Couillard

AbstractA simplified technique for characterizing crystallites in polysilicon films has been demonstrated based on use of the atomic force microscope (AFM). The crystallization of films deposited by two different techniques was examined.

Author(s):  
Willian Silva Conceição ◽  
Ştefan Ţălu ◽  
Robert Saraiva Matos ◽  
Glenda Quaresma Ramos ◽  
Fidel Guereiro Zayas ◽  
...  

Micron ◽  
2011 ◽  
Vol 42 (3) ◽  
pp. 299-304 ◽  
Author(s):  
Gi-Ja Lee ◽  
Su-Jin Chae ◽  
Jae Hoon Jeong ◽  
So-Ra Lee ◽  
Sang-Jin Ha ◽  
...  

1994 ◽  
Vol 76 (6) ◽  
pp. 3443-3447 ◽  
Author(s):  
J. M. Yáñez‐Limón ◽  
F. Ruiz ◽  
J. González‐Hernández ◽  
C. Vázquez‐López ◽  
E. López‐Cruz

2005 ◽  
Vol 77 (2) ◽  
pp. 424-434 ◽  
Author(s):  
Phillip S. Dobson ◽  
John M. R. Weaver ◽  
Mark N. Holder ◽  
Patrick R. Unwin ◽  
Julie V. Macpherson

Sign in / Sign up

Export Citation Format

Share Document