Trap Dominated Hydrogen Transport in Disordered Silicon
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AbstractHydrogen transport in polycrystalline silicon was investigated by deuterium diffusion experiments. D was introduced either from a remote plasma or a solid-state source. The data can be explained by a two-level model used to explain diffusion in amorphous silicon. The energy difference between transport level and deuterium chemical potential was found to be 1.3 eV. A band of shallow levels for hydrogen trapping is located about 0.6 eV below the transport level, while deep levels are about 1.7 eV below.
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1983 ◽
Vol 57
(1)
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pp. 189-193
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2009 ◽
Vol 30
(1)
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pp. 36-38
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Keyword(s):
1989 ◽
Vol 111
(6)
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pp. 2058-2062
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