A-Si:H Films Deposited by Dc-Masd Technique at High Substrate Temperature
Keyword(s):
AbstractDc-magnetron assisted silane decomposition technique has been tested for deposition of undoped a-Si:H at substrate temperature Ts=300–400°C. In the optimized conditions device-quality a-Si: H films were deposited independently of Ts. A low hydrogen content CH (up to 2 at.°) and microstructure variations are characteristic of the MASD films.
1994 ◽
Vol 2
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pp. 211-219
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2011 ◽
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pp. 022018
2017 ◽
Vol 163
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pp. 91-97
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2019 ◽
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1987 ◽
Vol 97-98
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pp. 1391-1394
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