Stable Visible Photoluminescence from Annealed Polysiloxene-Based Thin Films
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AbstractPolysiloxene-based films have been prepared by plasma enhanced CVD in a Si2H6+O2 gas mixture at a substrate temperature of −110°C and annealed at temperatures from 700°C to 1000°C. It is found that the film annealed at 1000°C is composed of 1∼5nm Si crystallites embedded in SiO2 and exhibits stable, intense visible-luminescence at room temperature under 488nm excitation. The temperature and excitation power dependences of the steady-state and timeresolved luminescence of the annealed films suggest the radiative recombination through localized states in the Si/SiO2 interface region.
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