Measurement of Young's Modulus and Poisson's Ratio of Free-Standing Ag/Cu Multilayered Thin Films

1995 ◽  
Vol 405 ◽  
Author(s):  
Haibo Huang ◽  
Frans Spaepen
Keyword(s):  
Thin Films ◽  
Strain Measurement ◽  
Tensile Testing ◽  
Poisson Ratio ◽  
Young Modulus ◽  
Mean Value ◽  
Laser Diffraction ◽  
Free Standing ◽  
The Mean ◽  
Multilayered Thin Films

AbstractStrain measurement by laser diffraction was used in tensile testing of free-standing Ag/Cu multilayered thin films with repeat lengths between 3 nm and 3 μm. The mean value, for all the films, of the Young modulus was 83.1± 1.2 GPa, and of the Poisson ratio was 0.377±0.015. No variation with bilayer repeat length, and hence no “supermodulus” effect, was observed.

The Elastic Moduli of Silver Thin Films Measured with a New Microtensile Tester

1991 ◽  
Vol 239 ◽  
Author(s):  
J. Ruud ◽  
D. Josell ◽  
A. L. Greer ◽  
F. Spaepen
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Diffraction Grating ◽  
Strain Measurement ◽  
Elastic Moduli ◽  
Two Dimensional ◽  
Bulk Crystals ◽  
Free Standing ◽  
Tensile Direction ◽  
Silver Thin Films

ABSTRACTA new design for a thin film microtensile tester is presented. The strain is measured directly on the free-standing thin film from the displacement of laser spots diffracted from a thin grating applied to its surface by photolithography. The diffraction grating is two-dimensional, allowing strain measurement both along and transverse to the tensile direction. In principle, both Young's modulus and Poisson's ratio of a thin film can be determined. Ag thin films with strong <111> texture were tested. The measured Young moduli agreed with those measured on bulk crystals, but the measured Poisson ratios were low, most likely due to slight transverse folding of the film that developed during the test.

A tensile-testing technique for micrometer-sized free-standing thin films

2005 ◽  
Vol 484 (1-2) ◽  
pp. 426-432 ◽  
Author(s):  
Yi-Wen Cheng ◽  
David T. Read ◽  
J. David McColskey ◽  
Joyce E. Wright
Keyword(s):  
Thin Films ◽  
Tensile Testing ◽  
Free Standing ◽  
Testing Technique

Young modulus and Poisson ratio measurements of TiO2 thin films deposited with Atomic Layer Deposition

2012 ◽  
Vol 206 (8-9) ◽  
pp. 2459-2463 ◽  
Author(s):  
L. Borgese ◽  
M. Gelfi ◽  
E. Bontempi ◽  
P. Goudeau ◽  
G. Geandier ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Poisson Ratio ◽  
Young Modulus ◽  
Atomic Layer ◽  
Tio2 Thin Films ◽  
Layer Deposition

Biomechanical Properties of the Human Soft Palate

2009 ◽  
Vol 46 (3) ◽  
pp. 268-274 ◽  
Author(s):  
M. J. Birch ◽  
P. D. Srodon
Keyword(s):  
Soft Palate ◽  
Ex Vivo ◽  
Poisson Ratio ◽  
Young Modulus ◽  
Physiological Saline ◽  
Free Edge ◽  
Biomechanical Properties ◽  
Lateral Direction ◽  
The Mean ◽  
Viscoelastic Constants

Objective: To measure biomechanical properties of the human soft palate and the variation across anatomic regions. Design: Ex vivo analysis of human tissue. Patients/participants: Ten palates harvested from 10 normal adult human cadavers (age range, 37 to 90 years). Interventions: Computer-controlled uniaxial stress-relaxation mechanical properties tested in physiological saline at 37°C. Main Outcome Measures: Measurement of Young modulus, Poisson ratio, and determination of viscoelastic constants c, τ1, and τ2 by curve-fitting of the reduced relaxation function to the data. Results: One hundred sections were tested from the 10 palates, representative of 10 anatomic zones. The mean Young modulus range was 585 Pa at the posterior free edge to 1409 Pa at regions of attachment. The mean Poisson ratio in the inferior-superior direction was 0.45 (SD 0.26) and in the lateral direction, was 0.30 (SD 0.21). The mean viscoelastic constants for 1-mm extensions were C  =  −0.1056 (±0.1303), τ1  =  11.0369 (±9.1865) seconds, and τ2  =  0.2128 (±0.0792) seconds, and for 2-mm extensions were C  =  −0.1111 (±0.1466), τ1  =  14.3725 (±5.2701) seconds, and τ2  =  0.2094 (±0.0544) seconds. Conclusions: The results show agreement with values of the Young modulus estimated by authors (Ettema and Kuehn, 1994; Berry et al., 1999) undertaking finite element modeling of the palate. However, other modulus measurements based on closing pressure are considerably different. The spatial distribution of viscoelastic parameters across the palate shows good consistency.

Optical Effects in IR Spectroscopy: Thickness-Dependent Positions of Absorbance Lines in Spectra of Thin Films

1992 ◽  
Vol 46 (2) ◽  
pp. 365-372 ◽  
Author(s):  
Marta Klanjšek Gunde
Keyword(s):  
Thin Films ◽  
Silicon Oxide ◽  
Normal Incidence ◽  
Mean Value ◽  
Effective Dielectric Constant ◽  
Interference Fringes ◽  
Optical Effects ◽  
The Mean ◽  
Maximum Increment ◽  
Line Positions

Optical effects give rise to thickness-dependent positions of absorbance lines ( v0) in the normal-incidence transmission spectra of thin films. Two reasons can be distinguished. Simple Fresnel refraction on the boundaries of the film shifts the line toward higher wavenumbers, with the maximum increment at small film thicknesses ( d). The second effect is due to multiple reflectance. The interference fringes cause the oscillations of the absorbance line around the mean value, which is defined by the effect of the boundaries. Both effects are more pronounced for broad lines. Whereas for the strong bands the first effect dominates, for the weaker ones both can be seen. The effective dielectric constant of the medium increases the first effect and diminishes the second one. Theoretically predicted vo ( d) curves compare well with absorption line positions in silicon nitride and silicon oxide films deposited on silicon wafers.

A Study of Mechanical Behavior of Au Films by Visual Image Tracing System

2007 ◽  
Vol 26-28 ◽  
pp. 1117-1120 ◽  
Author(s):  
Sang Joo Lee ◽  
Seung Min Hyun ◽  
Seung Woo Han ◽  
Hak Joo Lee ◽  
Jang Hyun Kim ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Mechanical Behavior ◽  
Strain Measurement ◽  
Tensile Testing ◽  
Visual Image ◽  
Free Standing ◽  
Ccd Cameras ◽  
Grain Sizes ◽  
Strain Monitoring ◽  
Industry Applications

Mechanical behavior of small size materials has been explored due to many industry applications such as MEMs and semiconductors. The accurate measurements for mechanical properties of thin films are very challenge due to several technical difficulties. The proposed solution is the Visual Image Tracing (VIT) strain measurement system coupled with a micro tensile testing unit, which consists of a piezoelectric actuator, load cell, microscope and CCD cameras. This system has shown advantages of real time strain monitoring during the test and ability to measure the Young’s modulus, yiled strength and Poisson’s ratio of the material. Free standing Au films 0.5, 1 and 2 μm thick with average grain sizes of 104, 148 and 219 nm prepared by sputtering were studied using VIT system. The yield stresses of the films are dependent on film thickness and grain size.

Size Effect on Tensile Strength of Surface-Micromachined Al-3%Ti Thin Films

2006 ◽  
Vol 326-328 ◽  
pp. 313-316 ◽  
Author(s):  
Jun Hyub Park ◽  
Man Sik Myung ◽  
Yun Jae Kim ◽  
Chang Seung Lee ◽  
Sung Hoon Choa ◽  
...  
Keyword(s):  
Thin Films ◽  
Tensile Strength ◽  
Tensile Testing ◽  
Mechanical Characteristics ◽  
Microelectromechanical Systems ◽  
Measuring System ◽  
Mems Switch ◽  
Tensile Tester ◽  
The Mean ◽  
Contact Position

A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.

434 Strain Measurement by Laser Speckle Technique during Tensile Testing of Thin Films

2008 ◽  
Vol 2008.8 (0) ◽  
pp. 167-168
Author(s):  
Masaaki OTSU ◽  
Takashi ICHINOMIYA ◽  
Kazuki TAKASHIMA
Keyword(s):  
Thin Films ◽  
Strain Measurement ◽  
Tensile Testing ◽  
Laser Speckle

Stress and elastic-constant analysis by X-ray diffraction in thin films

2003 ◽  
Vol 36 (3) ◽  
pp. 869-879 ◽  
Author(s):  
F. Badawi ◽  
P. Villain
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Residual Stresses ◽  
Elastic Constants ◽  
Thermal Stresses ◽  
Bulk Material ◽  
Poisson Ratio ◽  
Young Modulus ◽  
X Ray Diffraction ◽  
X Ray

Residual stresses influence most physical properties of thin films and are closely related to their microstructure. Among the most widely used methods, X-ray diffraction is the only one allowing the determination of both the mechanical and microstructural state of each diffracting phase. Diffracting planes are used as a strain gauge to measure elastic strains in one or several directions of the diffraction vector. Important information on the thin-film microstructure may also be extracted from the width of the diffraction peaks: in particular, the deconvolution of these peaks allows values of coherently diffracting domain size and microdistortions to be obtained. The genesis of residual stresses in thin films results from multiple mechanisms. Stresses may be divided into three major types: epitaxic stresses, thermal stresses and intrinsic stresses. Diffraction methods require the knowledge of the thin-film elastic constants, which may differ from the bulk-material values as a result of the particular microstructure. Combining an X-ray diffractometer with a tensile tester, it is possible to determine X-ray elastic constants of each diffracting phase in a thin-film/substrate system, in particular the Poisson ratio and the Young modulus. It is important to notice that numerous difficulties relative to the application of diffraction methods may arise in the case of thin films.

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