Potential of Ultra-High Resolution and Low Voltage Sem for Dynamic Experiments
AbstractA new generation of ultrahigh resolution scanning electron microscope (UHRSEM) is designed to explore the potential for higher resolution imaging and chemical microanalysis from more representative bulk samples. A <0.5nm probe at 30kV and <2.5nm at 1kV have been integrated with high sensitivity energy dispersive x-ray spectrometry (EDX) [1] and a high vacuum (<3×10−8mbar) heating stage (to >1000°C). The sensitivity of surface imaging is generally enhanced at low beam energies. With low voltages and digitally integrated fast scan techniques, conductive coating of an electrically non-conducting sample, such as a ceramic substrate, is no longer a pre-requisite for SEM, and this opens up new possibilities for minimally invasive dynamic in-situ experiments. This paper focuses on metal particle migration and sintering on a ceramic substrate.