High Resolution Electron Microscopy of Sputter-Deposited Zirconia-Alumina Nanolaminates
Keyword(s):
AbstractHigh resolution electron microscopy is employed to study the crystallography and morphology of zirconia nanocrystallites in zirconia-alumina nanolaminates and zirconia films. Unity volume fraction of tetragonal zirconia formed when the zirconia layer thickness was less than 6.2 nm, a theoretically predicted critical size for tetragonal-to-monoclinic zirconia (t -> m-ZrO2) transformation. In thicker layers, monoclinic zirconia formed, accompanied by renucleation and void formation which caused roughness to the zirconia nanolayers. The average position of the voids in the layers was 6.3 nm from the growth interface, coinciding with the critical dimension for t -> m-ZrO2 transformation.
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