Effect of Thickness and Substrates on the Mechanical Properties of Tantalum and Tantalum Nitride Thin Films

1995 ◽  
Vol 403 ◽  
Author(s):  
Ranjana Saha ◽  
Rama B. Inturi ◽  
John A. Barnard
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Elastic Modulus ◽  
Composite System ◽  
Tantalum Nitride ◽  
X Ray Diffraction ◽  
X Ray ◽  
Film Substrate

AbstractDetermining the intrinsic mechanical properties of films by nanoindentation is complicated by the presence of the substrate. Generally, for very thin films (<100 nm) one unavoidably observes the properties of the film/substrate composite system. In order to determine the extent of the effect of the substrate on the mechanical properties of Ta and Ta-N thin films, we have grown these films in four different thicknesses (50, 250, 400 and 500 nm) and on three different substrates (glass, oxidized Si, and sapphire). The structure of the films was evaluated by x-ray diffraction and the mechanical properties (hardness and elastic modulus) were determined by nanoindentation.

DEPOSITION ON VICINAL SUBSTRATES FOR DOMAIN SELECTION IN YBa2Cu3O7 FILMS

2000 ◽  
Vol 14 (25n27) ◽  
pp. 2646-2651
Author(s):  
F. RICCI ◽  
F. CARILLO ◽  
F. LOMBARDI ◽  
F. MILETTO GRANOZIO ◽  
U. SCOTTI DI UCCIO ◽  
...  
Keyword(s):  
Thin Films ◽  
Buffer Layer ◽  
Space Mapping ◽  
X Ray Diffraction ◽  
Vicinal Surfaces ◽  
Reciprocal Space Mapping ◽  
X Ray ◽  
Growth Properties ◽  
Domain Selection ◽  
Film Substrate

(110) and (103) YBa 2 Cu 3 O 7 films have been grown onto exact and vicinal (110) SrTiO 3 substrates, and on vicinal (110) MgO substrates with a SrTiO 3 buffer layer. The samples are carefully characterised by reciprocal space mapping with x-ray diffraction, in order to investigate the features of the typical double domain of (110) and (103) YBa 2 Cu 3 O 7 structure. It is demonstrated that vicinal cut substrates allow to select one film/substrate epitaxial relation. The growth properties of these thin films deposited on vicinal surfaces are discussed.

Microstructure and Mechanical Properties of Chromium Carbide Coatings Deposited by Magnetron Sputtering Technique

2019 ◽  
Vol 397 ◽  
pp. 118-124
Author(s):  
Linda Aissani ◽  
Khaoula Rahmouni ◽  
Laala Guelani ◽  
Mourad Zaabat ◽  
Akram Alhussein
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Structural Properties ◽  
Annealing Temperature ◽  
Diffusion Mechanism ◽  
X Ray Diffraction ◽  
Chromium Carbides ◽  
X Ray ◽  
Mechanical And Structural Properties

From the hard and anti-corrosions coatings, we found the chromium carbides, these components were discovered by large studies; like thin films since years ago. They were pointed a good quality for the protection of steel, because of their thermal and mechanical properties for this reason, it was used in many fields for protection. Plus: their hardness and their important function in mechanical coatings. The aim of this work joins a study of the effect of the thermal treatment on mechanical and structural properties of the Cr/steel system. Thin films were deposited by cathodic magnetron sputtering on the steel substrates of 100C6, contain 1% wt of carbon. Samples were annealing in vacuum temperature interval between 700 to 1000 °C since 45 min, it forms the chromium carbides. Then pieces are characterising by X-ray diffraction, X-ray microanalysis and scanning electron microscopy. Mechanical properties are analysing by Vickers test. The X-ray diffraction analyse point the formation of the Cr7C3, Cr23C6 carbides at 900°C; they transformed to ternary carbides in a highest temperature, but the Cr3C2 doesn’t appear. The X-ray microanalysis shows the diffusion mechanism between the chromium film and the steel sample; from the variation of: Cr, Fe, C, O elements concentration with the change of annealing temperature. The variation of annealing temperature shows a clean improvement in mechanical and structural properties, like the adhesion and the micro-hardness.

The Use of BaF2 Buffer Layers for the Sputter-Deposition of Ticabacuo Thin-Film Superconductors

1989 ◽  
Vol 169 ◽  
Author(s):  
K.M. Hubbard ◽  
P.N. Arendt ◽  
D.R. Brown ◽  
D.W. Cooke ◽  
N.E. Elliott ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Sputter Deposition ◽  
Buffer Layers ◽  
X Ray Diffraction ◽  
Dc Magnetron Sputtering ◽  
X Ray ◽  
Film Substrate ◽  
Ion Backscattering ◽  
Scanning Electron

AbstractThin films of the Tl‐based superconductors often have relatively poor properties because of film/substrate interdiffusion which occurs during the anneal. We have therefore investigated the use of BaF2 as a diffusion barrier. TICaBaCuO thin films were deposited by dc magnetron sputtering onto MgO <100> substrates, both with and without an evaporation‐deposited BaF2 buffer layer, and post‐annealed in a Tl over‐pressure. Electrical properties of the films were determined by four‐point probe analysis, and compositions were measured by ion‐backscattering spectroscopy. Structural analysis was performed by X‐ray diffraction and scanning electron microscopy. The BaF2 buffer layers were found to significantly improve the properties of the TICaBaCuO thin films.

Epitaxial growth of PbTiO3 thin films on (001) SrTiO3 from solution precursors

1995 ◽  
Vol 10 (3) ◽  
pp. 680-691 ◽  
Author(s):  
Andreas Seifert ◽  
Fred F. Lange ◽  
James S. Speck
Keyword(s):  
Thin Films ◽  
Stable Phase ◽  
X Ray Diffraction ◽  
Amorphous Precursor ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force ◽  
Transmission Electron ◽  
Heat Treated ◽  
Film Substrate

A mixed alkoxide liquid precursor was used to form epitaxial PbTiO3 thin films by spin-coating on cubic (001) SrTiO3 substrates. The films were heat-treated at temperatures between 380 °C/1 h and 800 °C/1 h. X-ray diffraction, atomic force microscopy, scanning and transmission electron microscopy were used to characterize the microstructure of the films and to evaluate the epitaxial phenomena. At ∼400 °C/1 h, a polycrystalline, metastable Pb-Ti fluorite crystallizes from the pyrolyzed amorphous precursor. At slightly higher temperatures (∼420 °C/1 h), the thermodynamically stable phase with the perovskite structure epitaxially nucleates at the film/substrate interface. A small number of epitaxial grains grow through the film toward the surface and consume the nanocrystalline fluorite grains. Coarsening of the perovskite grains leads to a reduction in mosaic spread during further heating. Pores, which concurrently coarsen with grain growth, produce a pitted surface as they disappear from within the film. At 800 °C/1 ha dense epitaxial PbTiO3 film with a smooth surface is observed. Parameters governing the formation of a- and c-domains are discussed as well as the small tilts of the domain axes away from the substrate normal.

scholarly journals Experimental and predicted mechanical properties of Cr1−xAIxN thin films, at high temperatures, incorporating in situ synchrotron radiation X-ray diffraction and computational modelling

RSC Advances ◽  
2017 ◽  
Vol 7 (36) ◽  
pp. 22094-22104 ◽  
Author(s):  
Ehsan Mohammadpour ◽  
Zhong-Tao Jiang ◽  
Mohmmednoor Altarawneh ◽  
Nicholas Mondinos ◽  
M. Mahbubur Rahman ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Synchrotron Radiation ◽  
Computational Modelling ◽  
X Ray Diffraction ◽  
X Ray ◽  
Al Content ◽  
Magnetic Sputtering ◽  
Sputtering System

Cr1−xAlxN coatings, synthesised by an unbalanced magnetic sputtering system, showed improved microstructure and mechanical properties for ∼14–21% Al content.

Hardness and Elastic Modulus of ZnO Thin Films Fabricated by PLD Method

2007 ◽  
Vol 353-358 ◽  
pp. 2966-2969
Author(s):  
Han Ki Yoon ◽  
Yun Sik Yu
Keyword(s):  
Thin Films ◽  
Elastic Modulus ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Thin Films ◽  
Uv Laser ◽  
X Ray Diffraction ◽  
X Ray ◽  
Electroluminescence Device ◽  
Type Semiconductor

ZnO is an n-type semiconductor having a hexagonal wurzite structure. ZnO exhibits good piezoelectric and optical properties, and might be a good candidate for an electroluminescence device like an UV laser diode. Then, these devices are very small, their films are very thin and they are prepared in the limited size and shape, so they are unsuitable for the extensive mechanical testing. In this present work, ZnO thin films are prepared on the glass, GaAs(100), Si(100) and Si(111) substrates at various temperatures by the pulsed laser deposition (PLD) method. ZnO thin films were evaluated by X-ray diffraction (XRD) and mechanical properties such as hardness and elastic modulus were measured through the nano-indenter.

Microstructure and Mechanical Properties of Cr1-xAlxN Coating

2012 ◽  
Vol 531 ◽  
pp. 3-6
Author(s):  
C.L. Zhong ◽  
L.E. Luo
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Lattice Parameter ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
X Ray ◽  
Al Content ◽  
Compound Coating ◽  
Cubic Structure

A series of Cr1-xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure and the hardness of the thin films were characterized respectively with energy dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD) and nanoindentor. The effect of Al content on the microstructure and hardness was studied. It was found that Cr1-xAlxN compound coating exhibits a cubic structure with (1 1 1) preferred orientations and that the lattice parameter of Cr1-xAlxN coatings decrease with the increase of Al content. The hardness of Cr1-xAlxN compound coating is higher than that of CrN and increases with the increase of Al content.

Effect of Sintering Temperature on Microstructure and Mechanical Properties of Ti Mo Alloys

2015 ◽  
Vol 815 ◽  
pp. 297-300 ◽  
Author(s):  
Xing Ping Fan ◽  
Ben Ju Wang ◽  
Xiao Qing Ren ◽  
Fu Chang Peng
Keyword(s):  
Mechanical Properties ◽  
Elastic Modulus ◽  
Bending Strength ◽  
Sintering Temperature ◽  
Test Methods ◽  
X Ray Diffraction ◽  
X Ray ◽  
Β Phase ◽  
Sintering Time ◽  
Α Phase

The medical Ti-20Mo alloys were fabricated by powder metallurgy. The effects of sintering temperature on the phase, the morphology and the mechanical properties of Ti-Mo alloys were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and mechanical properties test methods. The results showed that after sintering at 1200 °C, the microstructure of Ti-Mo alloys mainly consisted of α phase. The increasing sintering time could promote α→β phase transition, thus the flexural strength and the elastic modulus of Ti-Mo alloys could be controlled. When the sintering temperature was 1300 °C, molybdenum content was 20%, the bending strength and the compressive strength of Ti-20Mo alloy were 1369MPa and 2602MPa respectively, and the elastic modulus was 3.4GPa. It may be concluded that the Ti-20Mo alloys is prospective prostheses materials.

Mechanical Properties of Thin Films and Nanometric Multilayers Using Tensile Testing and Synchrotron X-Ray Diffraction

2007 ◽  
Vol 4 (3) ◽  
pp. 311-317 ◽  
Author(s):  
Eric Le Bourhis ◽  
Damien Faurie ◽  
Baptiste Girault ◽  
Philippe Goudeau ◽  
Pierre-Olivier Renault ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Tensile Testing ◽  
X Ray Diffraction ◽  
X Ray
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