Morphological Evolution During Ge/Si(100) Heteroepitaxy

1995 ◽  
Vol 399 ◽  
Author(s):  
Loren I. Espada ◽  
Sergio Chaparro ◽  
Jose Aguilar ◽  
Melissa Dorrance ◽  
Michael McKay ◽  
...  
Keyword(s):  
Driving Forces ◽  
Morphological Evolution ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Native Oxide ◽  
Vacuum System ◽  
Specimen Preparation ◽  
Size Distributions ◽  
Island Size ◽  
Plan View

ABSTRACTWe have investigated the morphological evolution of islanded Ge/Si(100) samples formed by > 3 monolayer (ML) Ge deposition. Ge was deposited onto Si(100) surfaces cleaned by flash desorption of the native oxide at rates near 1/2 ML per minute. Growths were performed in an ultra-high vacuum system with a base pressure of < 10−9 Torr. Substrate temperature during growth was 500 °C. Post-deposition processing ranged from no additional treatment to 1 hour at 560 °C anneals. Samples removed from the growth chamber were processed using standard transmission electron microscopy (TEM) specimen preparation techniques and characterized using plan-view TEM. Micrographs were computer analyzed to generate island size distributions (histograms of island size). These size distributions fall into general classes. First, samples with only coherent Ge islands exhibit relatively narrow size distributions. Secondly samples with both coherent and incoherent islands presented bi-modal size distributions with coherent islands populating the smaller radii. These results will be discussed in the context of a model which includes elastic as well as surface and interface energies as driving forces for ripening.

Low Temperature Silicon Epitaxy Grown by Electron-Beam Evaporation in an Ultra-High Vacuum System

1991 ◽  
Vol 237 ◽  
Author(s):  
Yung-Jen Lin ◽  
Tri-Rung Yew
Keyword(s):  
Electron Beam ◽  
Thermal Desorption ◽  
High Vacuum ◽  
High Energy ◽  
Electron Beam Evaporation ◽  
Ultra High Vacuum ◽  
Native Oxide ◽  
Vacuum System ◽  
Wafer Surface ◽  
Epitaxial Silicon

ABSTRACTThis paper presents the results of silicon epitaxial growth on silicon windows surrounded with oxide walls by electron-beam evaporation in an ultra-high vacuum system with a load-lock chamber. The wafer surface was in-situ cleaned in the growth chamber to remove native oxide by thermal desorption at about 840 °C and a base pressure of better than 2 × 10-9 Torr. The growth temperature was 200°C or higher. The pre-epitaxial silicon surface structure was inspected by reflection high energy electron diffraction (RHEED). The influence of the thermal desorption on the quality of the epi/substrate interface and epitaxial layers was studied. In addtion, the deposition parameters which control the epitaxial quality were investigated. The epitaxial films were characterized by cross-sectional trasmission electron microscopy (XTEM) and secondary ion mass spectroscopy (SIMS).

Direct STEM ADF imaging of gold on silicon (111)

1989 ◽  
Vol 47 ◽  
pp. 472-473
Author(s):  
P. Xu ◽  
E. J. Kirkland ◽  
J. Silcox
Keyword(s):  
Film Growth ◽  
Heavy Atom ◽  
High Vacuum ◽  
Dark Field ◽  
Thin Metal Film ◽  
Base Pressure ◽  
Ultra High Vacuum ◽  
Specimen Preparation ◽  
Dark Field Imaging ◽  
Wide Range

Many studies of thin metal film growth and the formation of metal-semiconductor contacts have been performed using a wide range of experimental methods. STEM annular dark field imaging could be an important complement since it may allow direct imaging of a single heavy atom on a thin silicon substrate. This would enable studies of the local atomic arrangements and defects in the initial stage of metal silicide formation.Preliminary experiments were performed in an ultra-high vacuum VG HB501A STEM with a base pressure of 1 × 10-10 mbar. An antechamber directly attached to the microscope for specimen preparation has a base pressure of 2×l0-10 mbar. A thin single crystal membrane was fabricated by anodic etching and subsequent reactive etching. The specimen was cleaned by the Shiraki method and had a very thin oxide layer left on the surface. 5 Å of gold was deposited on the specimen at room temperature from a tungsten filament coil monitored by a quartz crystal monitor.

The design and study of a compact bakeable ultra-high vacuum system for calibrating absolutely low pressure gauges

Vacuum ◽  
1977 ◽  
Vol 27 (9) ◽  
pp. 511-517 ◽  
Author(s):  
K.J. Close ◽  
R.S. Vaughan-Watkins ◽  
J Yarwood
Keyword(s):  
High Vacuum ◽  
Low Pressure ◽  
Ultra High Vacuum ◽  
Vacuum System

scholarly journals Why Pressure Scales Cause So Much Confusion

1993 ◽  
Vol 1 (8) ◽  
pp. 5-6
Author(s):  
Anthony D. Buonaquisti
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Ambient Pressure ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Scanning Auger Microprobe ◽  
The Mean ◽  
Scanning Electron

Pressure scales can be extremely confusing to new operators. This is not surprising. To my mind, there are three primary areas of confusion.Firstly, the pressure of gas inside an instrument changes over many orders of magnitude during pumpdown. The change is about 9 orders of magnitude for a traditional Scanning Electron Microscope and about 13 orders of magnitude for an ultra-high vacuum instrument such as a Scanning Auger Microprobe.To give an idea about the scale of change involved in vacuum, consider that the change in going from ambient pressure to that inside a typical ultra high vacuum system is like comparing one meter with the mean radius of the planet Pluto's orbit. The fact is that we don't often get to play with things on that scale. As a consequence, many of us have to keep reminding ourselves that 1 X 10-3 is one thousand times the value of 1 X 10-6 - not twice the value.

scholarly journals Optical contamination control in the Advanced LIGO ultra-high vacuum system

2013 ◽  
Author(s):  
Margot H. Phelps ◽  
Kaitlin E. Gushwa ◽  
Calum I. Torrie
Keyword(s):  
High Vacuum ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Contamination Control

Development of an ultra-high vacuum system for space application

Vacuum ◽  
2004 ◽  
Vol 73 (2) ◽  
pp. 243-248 ◽  
Author(s):  
F. Grangeon ◽  
C. Monnin ◽  
M. Mangeard ◽  
D. Paulin
Keyword(s):  
High Vacuum ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Space Application

scholarly journals Enhanced Ionic Conduction at the Film/Substrate Interface in LiI Thin Films Grown on Sapphire(0001)

1993 ◽  
Vol 318 ◽  
Author(s):  
D. Lubben ◽  
F. A. Modine
Keyword(s):  
Thin Films ◽  
Film Thickness ◽  
Ionic Conduction ◽  
High Vacuum ◽  
Dislocation Motion ◽  
Ultra High Vacuum ◽  
Vacuum System ◽  
Substrate Interface ◽  
Interdigital Electrodes ◽  
Film Substrate

ABSTRACTThe ionic conductivity of LiI thin films grown on sapphire(0001) substrates has been studied in situ during deposition as a function of film thickness and deposition conditions. LiI films were produced at room temperature by sublimation in an ultra-high-vacuum system. The conductivity of the Lil parallel to the film/substrate interface was determined from frequency-dependent impedance measurements as a function of film thickness using Au interdigital electrodes deposited on the sapphire surface. The measurements show a conduction of ∼5 times the bulk value at the interface which gradually decreases as the film thickness is increased beyond 100 nm. This interfacial enhancement is not stable but anneals out with a characteristic log of time dependence. Fully annealed films have an activation energy for conduction (σT) of ∼0.47 ± .03 eV, consistent with bulk measurements. The observed annealing behavior can be fit with a model based on dislocation motion which implies that the increase in conduction near the interface is not due to the formation of a space-charge layer as previously reported but to defects generated during the growth process. This explanation is consistent with the behavior exhibited by CaF2 films grown under similar conditions.

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