A Non-Reactive Excimer-Based Surface Preparation and Cleaning Tool for Broad-Based Industrial Applications
Keyword(s):
ABSTRACTA surface-cleaning and preparation method that uses high-energy photons and a laminar flowing inert gas has been demonstrated as a feasible technology for broad-based industrial applications such as semiconductors, electronics, optics, coated optical and magnetic media, automotive, aerospace and art restoration. This technology is flexible in tool embodiment and is environmentally friendly because no water and chemicals are not used.
2003 ◽
Vol 89
(5)
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pp. 1230-1241
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2009 ◽
Vol 02
(01)
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pp. 133-156
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2015 ◽
Vol 656-657
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pp. 335-340
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2002 ◽
Vol 4
(9)
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pp. 1555-1563
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2000 ◽
Vol 20
(1Supplement)
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pp. 361-364