Application of Laser Microetching in Formation of Air-Bearing Surface for Magnetic Head Sliders

1995 ◽  
Vol 397 ◽  
Author(s):  
Y.F. LU ◽  
K.D. YE
Keyword(s):  
Laser Power ◽  
Etching Rate ◽  
Scanning Speed ◽  
Air Bearing ◽  
Magnetic Head ◽  
Bearing Surface ◽  
Ion Laser ◽  
Side Walls ◽  
Etching Parameters ◽  
Laser Induced Etching

ABSTRACTLaser-induced etching of polycrystalline Al2O3TiC material by a tightly-focused CW Ar ion laser has been investigated in a KOH solution with different concentrations. It is found that the KOH concentration can strongly affect the etching quality where low KOH concentration can result in rough and irregular patterns. The etching effect is also related to laser power and scanning speed. Laser-induced etching of polycrystalline AI2O3TiC in a KOH solution is found to be a photothermal reaction in which a threshold laser power exists. With an appropriate set of etching parameters, well defined grooves can be obtained with clean side walls and with an etching rate up to several hundred micrometers per second. It is also found that the grains in the polycrystalline Al2O3TiC material play an important role in the etching dynamics and etching quality. This etching process is believed to be applicable to the formation of a slider surface of magnetic heads in the future.

A damage quantification method for air-bearing-surface overcoats on magnetic head sliders

1996 ◽  
Vol 32 (5) ◽  
pp. 3780-3782
Author(s):  
S. Momose ◽  
A. Sato ◽  
N. Oshima ◽  
H. Kawahara ◽  
K. Baba ◽  
...  
Keyword(s):  
Air Bearing ◽  
Magnetic Head ◽  
Bearing Surface ◽  
Quantification Method ◽  
Damage Quantification

Magnetic head field over the air-bearing surface as visualized by the projection of a patterned electron beam

2000 ◽  
Vol 36 (5) ◽  
pp. 3614-3617 ◽  
Author(s):  
H. Suzuki ◽  
T. Shimakura ◽  
K. Itoh ◽  
K. Nakamura
Keyword(s):  
Electron Beam ◽  
Air Bearing ◽  
Magnetic Head ◽  
Bearing Surface

scholarly journals S1140301 Reduction of contact vibration by nano-textures on air bearing surface of magnetic head slider

2014 ◽  
Vol 2014 (0) ◽  
pp. _S1140301--_S1140301-
Author(s):  
Masato YASUI ◽  
Hiroshi TANI ◽  
Shinji KOGANESAWA ◽  
Norio TAGAWA
Keyword(s):  
Air Bearing ◽  
Magnetic Head ◽  
Bearing Surface ◽  
Head Slider

Thermal Analysis for the Protrusion of Magnetic Head

2003 ◽  
Author(s):  
Junguo Xu ◽  
Masayuki Kurita ◽  
Shozo Saegusa
Keyword(s):  
High Frequency ◽  
Maximum Temperature ◽  
Air Bearing ◽  
Magnetic Head ◽  
Bearing Surface ◽  
Applied Current ◽  
High Resolution Measurement ◽  
Resolution Measurement ◽  
Thermal Protrusion ◽  
Head Coil

The thermal protrusion of a magnetic head was investigated through, first a high-resolution measurement of temperature distribution over the air bearing surface (ABS) and head coil and, second, a numerical calculation of the head protrusion. It was found that the temperature on the ABS results in a “butterfly”-shaped distribution. It was also found that an eddy current induced by high frequency write-current significantly increases the temperature of read/write elements. Moreover, the point of maximum temperature changed from the head core to the write gap when the applied current was switched from DC to AC. It was also found that a write-current induced head protrusion caused more deformation of the alumina over coat in the horizontal direction and that an ambient-temperature-induced head protrusion caused more deformation around the read-write elements. Furthermore, it is clarified that film materials with higher elastic modulus, lower expansion rate, and higher thermal conductivity reduce the head thermal protrusion. Finally, to reduce write-current-induced head protrusion, a novel thermally improved head structure is proposed.

Laser Dry Cleaning of Zro2 Particles from Air Bearing Surface of Magnetic Head Sliders

1995 ◽  
Vol 397 ◽  
Author(s):  
Y.F. Lu ◽  
W.D. Song ◽  
M.H. Hong ◽  
T.C. Chong ◽  
T.S. Low
Keyword(s):  
Laser Fluence ◽  
Repetition Rate ◽  
Pulse Number ◽  
Air Bearing ◽  
Magnetic Head ◽  
Bearing Surface ◽  
Cleaning Efficiency ◽  
Dry Cleaning ◽  
Average Acceleration ◽  
Number Of Particles

ABSTRACTLaser dry cleaning of ZrO2 particles from air bearing surface (ABS) of magnetic head sliders has been investigated. The experimental results show that the cleaning threshold of removing ZrO2 particles from ABS is about 100 mJ/cm2. For laser fluence larger than this threshold, cleaning efficiency increases with increasing laser fluence and pulse number, but does not depend on repetition rate up to 30 Hz. The mechanisms of this laser dry cleaning are laser-induced ABS vibration, particle thermal expansion and particle vibration, which produce forces strong enough to detach ZrO2 particles from ABS. With increasing laser fluence and pulse number, the average acceleration and vibration number of particles induced by laser increase respectively, so that it is easier to remove particles which corresponds to higher cleaning efficiency. For fixed laser fluence and pulse number, changing the repetition rate does not change the average acceleration or the vibration number of particles, therefore laser cleaning efficiency is almost the same for different repetition rates.

Design a System of Ar-Ion Laser Enhanced Anisotropic Etching

2007 ◽  
Author(s):  
Dianzhong Wen
Keyword(s):  
Laser Power ◽  
Etching Rate ◽  
Silicon Crystal ◽  
Anisotropic Etching ◽  
Structure Design ◽  
System Structure ◽  
Argon Ion Laser ◽  
Ion Laser ◽  
Argon Ion ◽  
Considerable Complexity

This paper a System of argon-ion laser enhanced anisotropic etching is designed. A basic description of the structure and principle of the system will first be presented. This system can be described as enhanced etching rate of silicon. It also has the important advantage of not requiring the silicon is covered with a thick of oxide or other masked for any plane of silicon crystal that adds considerable complexity to the manufacture. When experiment temperature is 90 °C and KOH density is 34mol, an averaged instantaneous etching rate as high 25μm/min has been observed in silicon for a 4.6W input laser power, this etching rate register a 500% increase model on conventional anisotropic etching of silicon. Discussing the anisotropic etching rate of silicon dependence on the laser power and on the temperature are further. The experiment results show that the system structure design is reasonable and it can meet the requirement of every planes of silicon crystal etching, it can be used widely in variety of application aspects.

Parameter Effects on Thermal Protrusions of Magnetic Head Sliders

2005 ◽  
Author(s):  
M. Kurita ◽  
J. Xu
Keyword(s):  
Heat Transfer ◽  
Hard Disk Drives ◽  
Flying Height ◽  
Parameter Study ◽  
Air Bearing ◽  
Disk Drives ◽  
Magnetic Head ◽  
Bearing Surface ◽  
Simulated Temperature ◽  
Height Change

The heat transfer in the magnetic head sliders in hard disk drives, the thermal protrusion (TPR) of the head elements, and the flying height change of such sliders were numerically simulated. A simulated temperature distribution of the air-bearing surface correlated well with our experimental results. A parameter study showed that decreasing the thickness of the alumina base coat or increasing the size of the pole and shields of the head elements can reduce the magnitude of write-current-induced protrusion (W-TPR). However, a longer pole and shields increase ambient-temperature-induced protrusion (T-TPR). For W-TPR, the reduced flying height of the slider is partly compensated for by increased air pressure on the air-bearing surface. However, almost the entire magnitude of T-PTR translates into a reduction in flying height.

Laser-Controlled Etching of (Al,Ga)As Epitaxial Layers

1995 ◽  
Vol 397 ◽  
Author(s):  
T.C. Chong ◽  
Y.F. Lu ◽  
A. Lee
Keyword(s):  
Laser Power ◽  
Etch Rate ◽  
Scanning Speed ◽  
Laser Source ◽  
Epitaxial Layers ◽  
Exponential Rate ◽  
Cycle Number ◽  
Ion Laser ◽  
Etch Rates ◽  
Argon Ion

ABSTRACTWe report a systematic study of laser-controlled etching behaviors of AlxGa1−xAs epitaxial layers (x from 0 to 0.5) by varying parameters such as laser power, beam scanning speed, beam duty cycle, number of scans and different doping types and concentrations. The laser source was an argon ion laser emitting at 514.5 n-type layers were found to be significantly higher than those for p-type layers. Generally, higher etch rates were observed for layers with higher aluminium mole fraction. The etch rate was found to increase at an exponential rate with the laser power for CW beam, but this increase became linear when a chopped laser beam was used. The dependence of etch rates on different conditions can be largely accounted for by the differences in the built-in electric field at the surface as well as differences in the laser-induced local temperature rise in the layers.

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