GaAsN Alloys and GaN/GaAs Double-Hetero Structures

1995 ◽  
Vol 395 ◽  
Author(s):  
Michio Sato
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Lattice Mismatch ◽  
Chemical Vapor ◽  
Ternary Alloys ◽  
Large Lattice ◽  
Large Lattice Mismatch ◽  
The One ◽  
Metalorganic Chemical

ABSTRACTTernary alloys; GaAsN (N<3%) were grown by plasma-assisted metalorganic chemical vapor deposition using triethylgallium, AsH3, and plasma-cracked NH3 or N2 as the precursors. More N atoms were incorporated into the alloys from N2 than NH3 at constant N/As ratios. Both photoluminescence peaks and optical absorption edges were redshifted from GaAs bandgap with increasing the N content, indicating the GaAsN alloys have narrower bandgaps than GaAs.GaN/GaAs double-hetero structures were grown by exposing GaAs surfaces to N-radical flux to replace surface As atoms by N atoms, and by growing GaAs on the thin GaN layers. When the GaN thickness exceeded one-monolayer, the GaN/GaAs interfaces and the GaAs cap layers deteriorated drastically. The one-monolayer-thick GaN embedded in GaAs attracts electrons and shows intense photoluminescence, whereas the GaN cluster is non-radiative, probably because of the defects caused by the large lattice-mismatch between GaN and GaAs.

Microstructures of GaN Films Grown on a LiGaO2 New Substrate by Metalorganic Chemical Vapor Deposition

1997 ◽  
Vol 468 ◽  
Author(s):  
Jing-Hong Li ◽  
Olga M. Kryliouk ◽  
Paul H. Holloway ◽  
Timothy J. Anderson ◽  
Kevin S. Jones
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Lattice Mismatch ◽  
Chemical Vapor ◽  
Threading Dislocations ◽  
Transmission Electron ◽  
Metalorganic Chemical

ABSTRACTMicrostructures of GaN films grown on the LiGaO2 by metalorganic chemical vapor deposition (MOCVD) have been characterized by transmission electron microscopy (TEM) and high resolution transmission electron microscopy (HRTEM). TEM and HRTEM results show that high quality single-crystal wurtzite GaN films have been deposited on the LiGaO2 and that the GaN film and the LiGaO2 have the following orientation relationship: (2110)(0002)GaN ̂ (002)LiGaO2 ^ 5–8°. A higher density of threading dislocations and stacking faults have been observed near the GáN/LiGaO2 interface, even though the lattice mismatch of GaN to LiGaO2 is only ∼1%. Threading dislocations with burgers vector b=<0001> and b=a/3<1120> are predominant in the GaN films. Also the GaN films contain some columnar inversion domain boundaries (IDBs). Both TEM and HRTEM results reveal that there is an unexpected amorphous or nano-crystalline inter-layer between the GaN and the LiGaO2 with a thickness of 50–100 nm.

Low Deep Impurity InxGa1-xP Grown by Metalorganic Chemical Vapor Deposition

1995 ◽  
Vol 378 ◽  
Author(s):  
Z. C. Huang ◽  
Bing Yang ◽  
H. K. Chen ◽  
J. C. Chen
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Lattice Mismatch ◽  
Deep Level ◽  
Chemical Vapor ◽  
Deep Levels ◽  
Electron Trap ◽  
Deep Impurity ◽  
Metalorganic Chemical

AbstractInxGai-xP (x=0.49) layers lattice-matched to GaAs have been grown by metalorganic chemical vapor deposition (MOCVD). We did not observe any deep levels in the temperature range of 30-380K by deep level transient spectroscopy (DLTS) in undoped In0.49Ga0.51P layers which have a background concentration of 3.1×1015 cm−3. The deep levels, if they exist, have a concentration of less than 5×1011 cm−3, which is the lowest deep level concentration found so far in InxGa1-xP materials. Moreover, lattice-mismatched InxGa1-xP/GaAs heterojunctions were deliberately grown by varying the In-composition ranging from 0.43 to 0.57. No deep levels were created in 1-μm-thick InxGa1-xP layers due to lattice mismatch when 0.469 < x < 0.532. However, we have observed a shallow electron trap at EC - 60 meV in InxGa1-xP layers with x < 469, and a deep electron trap located at Ec - 0.85 eV in the samples with x > 0.532. We suggest that the lattice-mismatch-induced-defects in InxGa1-xP are either electrically inactive or resided outside the bandgap when In content ranging from 0.469 to 0.532.

Metalorganic chemical vapor deposition of GaxIn1−xSb ternary alloys

1995 ◽  
Vol 151 (1-2) ◽  
pp. 21-25 ◽  
Author(s):  
Baolin Zhang ◽  
Tianming Zhou ◽  
Hong Jiang ◽  
Yongqiang Ning ◽  
Yixin Jin ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Ternary Alloys ◽  
Metalorganic Chemical

Tilted domain growth of metalorganic chemical vapor (MOCVD)-grown ZnO(0001) on α-Al2O3(0001)

2008 ◽  
Vol 23 (1) ◽  
pp. 13-17 ◽  
Author(s):  
C.M. Wang ◽  
L.V. Saraf ◽  
T.L. Hubler ◽  
P. Nachimuthu
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Lattice Mismatch ◽  
Chemical Vapor ◽  
Growth Mode ◽  
Domain Growth ◽  
Α Al2o3 ◽  
Metalorganic Chemical

ZnO grown on α-Al2O3(0001) generally possesses an orientation such that α-Al2O3(0001) is parallel to ZnO(0001) and two in-plane domains nucleate, so that α-Al2O3[11¯20] is parallel to ZnO[11¯20] and/or α-Al2O3[11¯20] is parallel to ZnO[10¯10]. In this paper, we report a new growth mode for ZnO grown on α-Al2O3(0001) using metalorganic chemical vapor deposition (MOCVD). We find that α-Al2O3[11¯20] is parallel to ZnO[10¯10], but the (0001) plane of ZnO is tilted relative to the (0001) plane of α-Al2O3 such that ZnO(0001) is almost parallel to the α-Al2O3(¯1104) plane. This orientation reduces the extent of lattice mismatch. The interface between ZnO and α-Al2O3 is abrupt and possesses periodic dislocations.

Growth of InSb/GaAs Layers on YIG-Coated GGG Substrate

1992 ◽  
Vol 281 ◽  
Author(s):  
C. Jelen ◽  
S. Charrière ◽  
M. Razeghi ◽  
V. J. Leppert
Keyword(s):  
Chemical Vapor Deposition ◽  
Laser Ablation ◽  
Liquid Phase ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Lattice Mismatch ◽  
Chemical Vapor ◽  
X Ray Diffraction ◽  
X Ray ◽  
Metalorganic Chemical

ABSTRACTWe report the first growth of InSb and GaAs epilayers upon a garnet (YIG = Y3Fe5O12) epilayer. The YIG was deposited using liquid phase epitaxy on a garnet (GGG = Gd3Ga5O12) substrate oriented in the [111] direction. The growth of the GaAs was carried out using laser ablation and no superlattice was used to buffer the lattice mismatch between YIG and GaAs. The growth of InSb was done by low-pressure metalorganic chemical vapor deposition. From x-ray diffraction analysis it was found that the GaAs and InSb were both (110) monocrystalline epitaxial layers.

Surface and Interface Properties of InSb Epitaxial Thin Films Grown on Gaas by Low Pressure Metalorganic Chemical Vapor Deposition

1997 ◽  
Vol 484 ◽  
Author(s):  
K. Li ◽  
K. L. Tan ◽  
M. Pelczynski ◽  
Z. C. Fenge ◽  
A. T. S. Wee ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Photoelectron Spectroscopy ◽  
Metalorganic Chemical Vapor Deposition ◽  
Lattice Mismatch ◽  
Chemical Vapor ◽  
Interface Properties ◽  
Surface And Interface ◽  
Metalorganic Chemical

AbstractThere is increasing interest in the epitaxial growth of high quality InSb thin films on GaAs substrates for many device applications such as infrared optoelectronics. The large lattice mismatch (14.6%) between InSb and GaAs has meant that both growth techniques and conditions have a large influence on the interface properties and consequently the film quality. A surface science study, by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) together with Nomarski microscopy, on the surface and interface properties of InSb/GaAs by metalorganic chemical vapor deposition is presented. It is found fromthe XPS data that the ambient surface is composed of InSb, In2O3, Sb2O3 and Sb2O5. The interdiffusion phenomena are studied by AES depth profiling; the width of interdiffusion region is determined to be 50±10 nm for all the samples grown at different V/III ratios. This is narrower than the data previously obtained for InSb/GaAs interfaces produced by metalorganic magnetron sputtering. The results also demonstrate that uniform and stoichiometric InSb films have been obtained, and that the reproducibility of the MOCVD technique is excellent.

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