Theoretical Investigation of Implanted Dopant Diffusion From a Silicide Layer to the Silicon Wafer for Ultra Shallow P-N Junction Formation

1995 ◽  
Vol 389 ◽  
Author(s):  
M. Sinder ◽  
J. Pelleg

ABSTRACTIn this work a theoretical model is presented to analyze the technique recently suggested to form shallow p-n junction. According to this technique a silicide acts as a source of a dopant and it is followed by controlled diffusion anneal to accomplish the dopant penetration into a silicon wafer.In our analysis the dependence of the p-n junction depth on process parameters is discussed. The model considers two cases, namely, with and without dopant evaporation.Experimental data for B diffusion from CoSi2 acting as the source are used to evaluate our theoretical model. The agreement between theoretical and experimental results is satisfactory.

2011 ◽  
Vol 486 ◽  
pp. 262-265
Author(s):  
Amit Kohli ◽  
Mudit Sood ◽  
Anhad Singh Chawla

The objective of the present work is to simulate surface roughness in Computer Numerical Controlled (CNC) machine by Fuzzy Modeling of AISI 1045 Steel. To develop the fuzzy model; cutting depth, feed rate and speed are taken as input process parameters. The predicted results are compared with reliable set of experimental data for the validation of fuzzy model. Based upon reliable set of experimental data by Response Surface Methodology twenty fuzzy controlled rules using triangular membership function are constructed. By intelligent model based design and control of CNC process parameters, we can enhance the product quality, decrease the product cost and maintain the competitive position of steel.


Micromachines ◽  
2021 ◽  
Vol 12 (5) ◽  
pp. 571
Author(s):  
Timur Rizovich Ablyaz ◽  
Evgeny Sergeevich Shlykov ◽  
Karim Ravilevich Muratov ◽  
Sarabjeet Singh Sidhu

This study presents the analysis of wire-cut electro-discharge machining (WIRE-EDM) of polymer composite material (PCM). The conductivity of the workpiece is improved by using 1 mm thick titanium plates (layers) sandwiched on the PCM. Input process parameters selected are variable voltage (50–100 V), pulse duration (5–15 μs), and pause time (10–50 μs), while the cut-width (kerf) is recognized as an output parameter. Experimentation was carried out by following the central composition design (CCD) design matrix. Analysis of variance was applied to investigate the effect of process parameters on the cut-width of the PCM parts and develop the theoretical model. The results demonstrated that voltage and pulse duration significantly affect the cut-width accuracy of PCM. Furthermore, the theoretical model of machining is developed and illustrates the efficacy within the acceptable range. Finally, it is concluded that the model is an excellent way to successfully estimate the correction factors to machine complex-shaped PCM parts.


1969 ◽  
Vol 59 (1) ◽  
pp. 399-407
Author(s):  
Robert B. Herrmann

Abstract The propagation of Rayleigh waves with periods of 0.4 to 2.0 seconds across the Cincinnati arch is investigated. The region of investigation includes southern Indiana and Ohio and northern Kentucky. The experimental data for all paths are fitted by a three-layer model of varying layer thickness but of fixed velocity in each layer. The resulting inferred structural picture is in good agreement with the known basement trends of the region. The velocities of the best fitting theoretical model agree well with velocity-depth data from a well in southern Indiana.


Author(s):  
Claudio Braccesi ◽  
Filippo Cianetti ◽  
Renzo Scaletta

The present paper illustrates an evaluation method developed by the authors to quantify the index of motion sickness incidence (MSI) in railways motion conditions. This index is formerly defined in literature to quantify diseases coming from low frequency motions (kinetosis). The proposed method, suggested as alternative to the only one existing in reference norm, involves PCT index, well known in railways context, and weighting curves for accelerometric signals, which are also specified in railways regulations. The approach of the method, consistent with the theoretical model, developed by the authors themselves in previous works, allows to obtain MSI index versus time and/or track progressive distance. The model is validated through comparison with experimental data available in literature and with measures recorded and obtained on regular trains during tests performed in Slovenia (EU).


1994 ◽  
Vol 19 ◽  
pp. 155-157 ◽  
Author(s):  
Lasse Makkonen

A new theory, in which friction is interpreted as the energy flux required to form surface at contact asperities, is applied to sliding on ice and snow. The results of this theoretical investigation show that in dry friction the relevant contact areas are of almost molecular scale. The properties of the interface layer in ice and snow friction arc poorly known, so that the implications of this new theory are somewhat speculative. However, qualitative agreement with experimental data is good, and the theory provides explanations to the success of some empirically developed methods of improving the frictional properties of skis and sledges.


2011 ◽  
Vol 178-179 ◽  
pp. 483-488
Author(s):  
Pavel S. Shushpannikov ◽  
Robert V. Goldstein ◽  
Konstantin Ustinov

The behavior of the oxygen-containing precipitate in silicon wafer on different stages of the getter formation process is considered from the mechanical point of view. The precipitate is modeled as a spheroidal inclusion undergoing inelastic eigenstrains in an anisotropic silicon matrix. The stress-strain state in the precipitate and matrix is calculated within the framework of the model. An energetic criterion of breaking the spherical shape by the coherent precipitates is obtained and analyzed. Criteria of the formation and onset of motion of the dislocation loops in the vicinity of the precipitate are also proposed. The obtained results are compared with the available experimental data.


1998 ◽  
Vol 532 ◽  
Author(s):  
M. Kase ◽  
Y Kikuchi ◽  
H. Niwa ◽  
T. Kimura

ABSTRACTThis paper describes ultra shallow junction formation using 0.5 keV B+/BF2+ implantation, which has the advantage of a reduced channeling tail and no transient enhanced diffusion. In the case of l × 1014 cm−2, 0.5 keV BF2 implantation a junction depth of 19 nm is achieved after RTA at 950°C.


2021 ◽  
Vol 95 (10) ◽  
pp. 2059-2064
Author(s):  
M. A. Orekhov

Abstract Molecular dynamic models are created for properties of bivalent ions in organic solvents. It is shown that molecules of the considered solvents bound to ions via oxygen atoms. A theoretical model is developed that describes the ion coordination number. The coordination number in this model is determined by the ratio between the sizes of the ion and the atom organic molecule bound to it. It is shown that the coordination number depends weakly on the solvent and strongly on the type of ion. A value of 0.13 nm is obtained for the effective size of an oxygen atom bound to a bivalent ion. The constructed theoretical model agrees with the results from molecular dynamic calculations and the available experimental data.


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