Film Synthesis on Powders by Cathodic ARC Plasma Deposition
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AbstractCathodic arc plasma deposition was used to coat Al2O3 powder (mesh size 60) with platinum. the power particles were moved during deposition using a mechanical system operating at a resonance frequency of 20 Hz. Scanning electron microscopy and auger electron microscopy show that all particles are completely coated with a platinum film having a thickness of about 100 nm. the actual deposition time was only 20 s, thus the deposition rate was very high (5 nm/s).
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2011 ◽
Vol 206
(6)
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pp. 1507-1510
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1996 ◽
Vol 46
(1)
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pp. 77-83
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2005 ◽
Vol 200
(5-6)
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pp. 1391-1394
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2015 ◽
Vol 719-720
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pp. 127-131
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2008 ◽
Vol 202
(22-23)
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pp. 5395-5399
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