A study of Cleaning Performance and Mechanisms in Dilute SC-1 Processing
ABSTRACTA statistical design of experiments (DOE) approach has been employed to evaluate the effects of megasonic input power, solution chemistry, bath temperature, and immersion time on particle removal in SC-1 chemistries. Megasonic input power was the dominant factor in the response surface model. Substantially diluted chemistries, performed with high megasonic input power and moderate-to-elevated temperatures. were shown to be very effective for small particle removal. Follow-on studies to the original DOE have led to an investigation of ultradilute SC-1 chemistries with megasonic power. These chemistries ranged from 0 to 1000 ppm of NH4OH and H2O2. Post processing light point defect (LPD) counts differ substantially between bare n and p-type Si<100>, and ambient lighting conditions are shown to influence LPD counts on p-type Si<100>. Solution properties such as pH and oxidation potential have been studied, and an investigation of post processing silicon surface properties is underway.