Fluorinated, Low Thermal Expansion Coefficient Polyimides For Interlayer Dielectric Application: Thermal Stability, Refractive Index And High Temperature Modulus Measurements
Keyword(s):
AbstractThe mechanical, thermal, electrical and moisture absorption properties of rod-like, fluorinated polyimides and copolyimides developed in our laboratory are briefly reviewed. Further characterization work on the most promising candidates for interlayer dielectric applications is reported. This includes in- and out-of-plane refractive index measurements to estimate the isotropy of the dielectric constant, isothermal TGA measurements to assess thermal stability at processing temperatures and dynamic-mechanical analysis to ascertain the glass transition temperature and the mechanical modulus at temperatures in excess of the glass transition
2014 ◽
Vol 576
◽
pp. 75-79
◽
2011 ◽
Vol 406
(3)
◽
pp. 482-487
◽
2020 ◽
Vol 32
(7)
◽
pp. 801-822
◽
2014 ◽
Vol 21
(1)
◽
pp. 7-11
◽
1995 ◽
Vol 179-181
◽
pp. 761-768
◽