CVD of Refractory Amorphous Metal Alloys

In this work, a novel process is described for the fabrication of multi-metallic amorphous metal alloy coatings using a chemical vapor deposition (CVD) technique. Of special interest in this work are amorphous metal alloys containing Mo and/or Cr which have high crystallization temperatures and readily available low decomposition temperature metal-bearing precursors. The conditions for amorphous alloy formation via CVD are described as well as the chemical properties of these materials. High temperature, aqueous corrosion tests have shown these materials (especially those containing Cr) are among the most corrosion resistant metal alloys known.