Compatibility of BaTiO3 and SrTiO3 with Shape Memory Alloy TiNi

1994 ◽  
Vol 360 ◽  
Author(s):  
Peter G. Mercado ◽  
A.Peter Jardine

AbstractThin film layers of shape memory alloys and ferroelectric ceramics can produce a family of ‘smart’ heterostructures capable of performing both sensing and actuating functions. The compatibility of sol-gel processed BaTiO3 (BTO) and SrTiO3 (STO) thin films with shape memory effect TiNi substrates were investigated. Important issues in the synthesis of these active structures are the ability to generate the appropriate crystalline phases of each material while producing defect-free homogeneous high quality films.

1994 ◽  
Vol 360 ◽  
Author(s):  
Peter G. Mercado ◽  
A.Peter Jardine

AbstractThin film layers of shape memory alloys and ferroelectric ceramics can produce a family of ‘smart’ heterostructures capable of performing both sensing and actuating functions. Important issues in the synthesis of these active structures are the ability to generate the appropriate crystalline phases of each material, while producing defect-free homogeneous high quality films. The compatibility of sol-gel processed Pb(Zr,Ti)O3 (PZT) thin films with thin film shape memory effect TiNi substrates were investigated. Thin film TiNi was deposited on quartz substrates by physical sputter deposition utilizing a TiNi target in a ultra-high vacuum chamber, and followed by in-situ vacuum annealing. PZT was deposited on TiNi by sol-gel and spin coating processes. The ferroelectric tetragonal phase of PZT was obtained by a 600 °C anneal for 5m in air. The heterostructures were nominally defect-free, unlike those obtained through deposition onto bulk TiNi substrates.x


Materials ◽  
2020 ◽  
Vol 13 (14) ◽  
pp. 3229
Author(s):  
Joohyeon Bae ◽  
Hyunsuk Lee ◽  
Duckhyeon Seo ◽  
Sangdu Yun ◽  
Jeonghyeon Yang ◽  
...  

TiNi shape-memory-alloy thin films can be used as small high-speed actuators or sensors because they exhibit a rapid response rate. In recent years, the transformation temperature of these films, manufactured via a magnetron sputtering method, was found to be lower than that of the bulk alloys owing to the small size of the grain. In this study, deposition conditions (growth rate, film thickness, and substrate temperature) affecting the grain size of thin films were investigated. The grain size of the thin film alloys was found to be most responsive to the substrate temperature.


MRS Bulletin ◽  
2002 ◽  
Vol 27 (2) ◽  
pp. 111-114 ◽  
Author(s):  
Akira Ishida ◽  
Valery Martynov

AbstractShape-memory alloy (SMA) thin films formed by sputter deposition have attracted considerable attention in the last decade. Current intensive research demonstrates that unique fine microstructures are responsible for the superior shape-memory characteristics observed in thin films as compared with bulk materials. Simultaneously, much effort has been undertaken to develop and fabricate micro devices actuated by SMA thin films. This article reviews the research to date on shape-memory behavior and the mechanical properties of SMA thin films in connection with their peculiar microstructures. Promising applications such as microvalves are demonstrated, along with a focused discussion on process-related problems. All of the results indicate that thin-film shape-memory actuators are ready to contribute to the development of microelectromechanical systems.


1992 ◽  
Vol 276 ◽  
Author(s):  
A. Peter Jardine

ABSTRACTActive and adaptive thin film materials for “smart” materials will likely be a heterostructure of several types of thin films. In this investigation, deposition and processing of thin film Shape Memory Effect TiNi and thin film ferroelectric BaTiO3 and SrTiO3 are discussed. Growth conditions as well as the thermodynamic conditions for thin films are described. It was found that amorphous thin films of TiNi and BaTiO3 can be crystallized simultaneously by air annealing at 600°C.


2011 ◽  
Vol 1295 ◽  
Author(s):  
Vijay Bhatia ◽  
Gordon Thorogood ◽  
Annette Dowd ◽  
Michael B. Cortie

ABSTRACTWe describe the fabrication and structure of nanoscale thin films of β phase shape memory alloys with the nominal atomic stoichiometry Au7Cu5Al4 (corresponding to 5.8 wt% Al). These alloys possess properties that suggest they could be used in nanoscale actuators. The films described here are between 20 and 50 nm thick which is below the thickness at which some other shape memory alloys cease to transform. However, microstructural and X-ray studies confirm that the coatings still exhibit the displacive transformations that are a prerequisite for the shape memory effect.


1999 ◽  
Vol 606 ◽  
Author(s):  
Keishi Nishio ◽  
Jirawat Thongrueng ◽  
Yuichi Watanabe ◽  
Toshio Tsuchiya

AbstructWe succeeded in the preparation of strontium-barium niobate (Sr0.3Ba0.7Nb2O6 : SBN30)that have a tetragonal tungsten bronze type structure thin films on SrTiO3 (100), STO, or La doped SrTiO3 (100), LSTO, single crystal substrates by a spin coating process. LSTO substrate can be used for electrode. A homogeneous coating solution was prepared with Sr and Ba acetates and Nb(OEt)5 as raw materials, and acetic acid and diethylene glycol monomethyl ether as solvents. The coating thin films were sintered at temperature from 700 to 1000°C for 10 min in air. It was confirmed that the thin films on STO substrate sintered above 700°C were in the epitaxial growth because the 16 diffraction spots were observed on the pole figure using (121) reflection. The <130> and <310> direction of the thin film on STO were oriented with the c-axis in parallel to the substrate surface. However, the diffraction spots of thin film on LSTO substrate sintered at 700°C were corresponds to the expected pattern for (110).


2014 ◽  
Vol 54 ◽  
pp. 133-135 ◽  
Author(s):  
P.C. Jiang ◽  
Y.F. Zheng ◽  
Y.X. Tong ◽  
F. Chen ◽  
B. Tian ◽  
...  

PAMM ◽  
2021 ◽  
Vol 20 (1) ◽  
Author(s):  
S. Ahmadi ◽  
K. Jacob ◽  
F. Wendler ◽  
A. Padhy ◽  
M. Kohl

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