Extended Quantum Model for Porous Silicon Formation
Keyword(s):
ABSTRACTThe formation of porous silicon (PS) by electrochemical dissolution of bulk Si is described by a new model involving quantum mechanical calculations of the tunneling probability of holes through small crystallites (< 60 Å) into the electrolyte. This tunneling probability shows oscillations as a function of crystallite size. The presented model calculations are in agreement to the microstructure of p-PS — deduced from Raman measurements — as a function of etching parameters and substrate doping level.
1996 ◽
Vol 51
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pp. 377-380
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2005 ◽
Vol 220
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2003 ◽
Vol 13
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pp. 95-105
2002 ◽
Vol 67
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pp. 479-489
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2001 ◽
Vol 567-568
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pp. 375-384
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2005 ◽
Vol 723
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pp. 223-230
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