Monte Carlo Simulation of Radiative Heat Transfer in Rapid Thermal Processing (RTP) Systems

1994 ◽  
Vol 342 ◽  
Author(s):  
J. Vernon Cole ◽  
Karson L. Knutson ◽  
Klavs F. Jensen
Keyword(s):  
Heat Transfer ◽  
Monte Carlo ◽  
Thermal Processing ◽  
Measurement Techniques ◽  
Radiation Heat Transfer ◽  
Rapid Thermal Processing ◽  
Three Dimensional ◽  
General Purpose ◽  
Radiation Heat ◽  
Participating Media

ABSTRACTWe present a general purpose Monte Carlo method for the simulation of radiation heat transfer in rapid thermal processing (RTP) chambers. Three-dimensional mesh generation software is used to discretize the surfaces within the system, allowing the simulation of realistic chamber and reflector designs. An adaptive subdivision of the chamber geometry reduces the number of raysurface intersections which must be computed. The method models internal reflection, absorption, and transmission within participating media, and includes wavelength, temperature, and material dependent optical properties. Radiation heat transfer simulations are used to examine a reflector assembly, and to test the assumptions of optical wafer temperature measurement techniques.

Simulation of Radiation Heat Transfer of Three Dimensional Participating Media by Radiative Exchange Method

2008 ◽  
Author(s):  
Mohammad Hadi Bordbar ◽  
Timo Hyppa¨nen
Keyword(s):  
Heat Transfer ◽  
Balance Equation ◽  
Radiation Heat Transfer ◽  
Three Dimensional ◽  
Radiation Balance ◽  
Scattering Media ◽  
Radiation Heat ◽  
Exchange Method ◽  
Participating Media ◽  
Radiative Exchange

This paper describes the theoretical bases of the Radiative Exchange Method, a new numerical method for simulating radiation heat transfer. By considering radiative interaction between all points of the geometry and solving the radiation balance equation in a mesh structure coarser than the structure used in computational fluid flow calculation, this method is able to simulate radiative heat transfer in arbitrary 3D space with absorbing, emitting and scattering media surrounded by emitting, absorbing and reflecting surfaces. A new concept is introduced, that of the exchange factors between the different elements that are necessary for completing the radiative balance equation set. Using this method leads to a set of algebraic equations for the radiative outgoing power from each coarse cell being produced and the result of this set of equations was then used to calculate the volumetric radiative source term in the fine cell structure. The formulation of the exchange factor for a three-dimensional state and also a mesh size analysis that was conducted to optimize the accuracy and runtime are presented. The results of this model to simulate typical 3D furnace shape geometry, is verified by comparison with those of other numerical methods.

Analysis of Gas Convection and Temperature Distribution in a Rotating Wafer in a Cylindrical Lamp Heating Apparatus

2002 ◽  
Author(s):  
Shigeki Hirasawa ◽  
Shigenao Maruyama
Keyword(s):  
Heat Transfer ◽  
Temperature Distribution ◽  
Thermal Processing ◽  
Radiation Heat Transfer ◽  
Three Dimensional ◽  
Convection Heat Transfer ◽  
Heat Transfer Analysis ◽  
Gas Velocity ◽  
Radiation Heat ◽  
Heating Rates

A three-dimensional radiation-heat-transfer analysis and a convection-heat-transfer analysis are combined in order to determine the temperature distribution in a rotating wafer in a cylindrical lamp heating apparatus for rapid thermal processing. The calculated results show that the temperature variation in the wafer increases 1.4 K by the effect of natural convection, when inlet gas velocity is 0.1 m/s during 1273 K steady-state heating of the non-rotating wafer. The effect of gas convection on the temperature variations in the wafer can be minimized when the wafer is rotating in an axisymmetric apparatus and the heating rates of the lamps are optimally controlled.

scholarly journals APPLICATION OF THE MONTE CARLO METHOD IN THE SOLUTION OF RADIATION HEAT TRANSFER IN PARTICIPATING MEDIA

2007 ◽  
Vol 6 (1) ◽  
pp. 03
Author(s):  
A. Maurente ◽  
P. O. Bayer ◽  
F. H. R. França
Keyword(s):  
Heat Transfer ◽  
Monte Carlo ◽  
Monte Carlo Method ◽  
Radiation Heat Transfer ◽  
Radiation Heat ◽  
Participating Media ◽  
Direct Exchange ◽  
The Monte Carlo Method ◽  
Combustion Processes ◽  
Total Exchange

The temperatures of the gases produced in combustion processes are very high so thermal radiation constitutes an important heat transfer mechanism in industrial furnaces. Most furnaces can be modeled as gray enclosures containing non-gray gases. The radiation heat transfer can be obtained with the aid of the weighted-sum-of-gray-gases model, determining the zonal exchange areas for each of the gray gases considered in the sum. For some enclosures with simple geometries, there are correlations to obtain the direct exchange-areas which can be used to determine the total exchange areas. However, for enclosures with complex geometries, determining the direct exchange areas can become a difficult task. In this case, the use of the Monte Carlo method is advantageous, for it allows one to approach geometric complexities without additional complications. Therefore, the method was applied to compute total exchange areas in enclosures containing participating media. Two cases were considered: cylindrical enclosures and enclosures that have generic geometries formed from cube combinations. The results presented a good agreement with solutions available in the literature.

Sign in / Sign up

Export Citation Format

Share Document