Plasma Etching of Copper Films Using IR Light Irradiation

1994 ◽  
Vol 337 ◽  
Author(s):  
N. Hosoi ◽  
Y. Ohshita
Keyword(s):  
Low Temperature ◽  
Flow Rate ◽  
Plasma Etching ◽  
Etch Rate ◽  
Gas Flow ◽  
Light Irradiation ◽  
Copper Films ◽  
Gas Flow Rate ◽  
Line Patterns ◽  
Ir Light

ABSTRACTCopper films are etched at a low temperature of 60 °C using a Cl2 plasma etching method with IR light irradiation. The etch rate is as high as 1 μm/min. The anisotropic Cu line patterns are obtained independent of the Cl2 gas flow rate and the etching pressure conditions. Moreover, there is no corrosion on the etched sample.

Effects of Reaction Conditions on MoS2 Thin Film Formation Synthesized by Chemical Vapor Deposition using Organic Precursor

MRS Advances ◽  
2016 ◽  
Vol 2 (29) ◽  
pp. 1533-1538 ◽  
Author(s):  
S. Ishihara ◽  
Y. Hibino ◽  
N. Sawamoto ◽  
T. Ohashi ◽  
K. Matsuura ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Flow Rate ◽  
Vapor Deposition ◽  
Gas Flow ◽  
Film Formation ◽  
Chemical Vapor ◽  
Gas Flow Rate ◽  
Axis Orientation

ABSTRACTMolybdenum disulfide (MoS2) thin films were fabricated by two-step chemical vapor deposition (CVD) using (t-C4H9)2S2 and the effects of temperature, gas flow rate, and atmosphere on the formation were investigated in order to achieve high-speed low-temperature MoS2 film formation. From the results of X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM) investigations, it was confirmed that c-axis orientation of the pre-deposited Mo film has a significant involvement in the crystal orientation after the reaction low temperature sulfurization annealing and we successfully obtained 3 nm c-axis oriented MoS2 thin film. From the S/Mo ratios in the films, it was revealed that the sulfurization reaction proceeds faster with increase in the sulfurization temperature and the gas flow rate. Moreover, the sulfurization under the H2 atmosphere promotes decomposition reaction of (t-C4H9)2S2, which were confirmed by XPS and density functional theory (DFT) simulation.

scholarly journals Ch2FCF3 Gas Flow Rate Effects of SiO2 Plasma Etching Rate on Quartz Crystal Microbalance

Natural-B ◽  
2016 ◽  
Vol 3 (4) ◽  
pp. 271-276
Author(s):  
Antonius Prisma Jalu Permana ◽  
D. J. Djoko H. Santjojo ◽  
Masruroh Masruroh
Keyword(s):  
Quartz Crystal Microbalance ◽  
Flow Rate ◽  
Plasma Etching ◽  
Gas Flow ◽  
Quartz Crystal ◽  
Etching Rate ◽  
Gas Flow Rate ◽  
Rate Effects

Reduction in Microloading by High-Gas-Flow-Rate Electron Cyclotron Resonance Plasma Etching

1995 ◽  
Vol 34 (Part 1, No. 5A) ◽  
pp. 2489-2494 ◽  
Author(s):  
Naoyuki Kofuji ◽  
Kazunori Tsujimoto ◽  
Takao Kumihashi ◽  
Shin'ichi Tachi
Keyword(s):  
Flow Rate ◽  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Gas Flow ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Gas Flow Rate ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

SCIENTIFIC AND ENGINEERING PRINCIPLES OF EFFICIENT FUEL USE AND ENVIRONMENTALLY FRIENDLY GAS COMBUSTION IN STOVE PLATES. PART 1. MODERN STATE-OF-THE-ART AND DIRECTIONS FOR IMPROVEMENT THE GAS BURNING IN DOMESTIC GAS COOKERS

2017 ◽  
pp. 3-18 ◽  
Author(s):  
B.S. Soroka ◽  
V.V. Horupa
Keyword(s):  
Natural Gas ◽  
Flow Rate ◽  
Gas Flow ◽  
Renewable Energy Sources ◽  
Combustion Process ◽  
Orifice Diameter ◽  
Firing Process ◽  
Gas Flow Rate ◽  
Gas Combustion ◽  
Gas Stoves

Natural gas NG consumption in industry and energy of Ukraine, in recent years falls down as a result of the crisis in the country’s economy, to a certain extent due to the introduction of renewable energy sources along with alternative technologies, while in the utility sector the consumption of fuel gas flow rate enhancing because of an increase the number of consumers. The natural gas is mostly using by domestic purpose for heating of premises and for cooking. These items of the gas utilization in Ukraine are already exceeding the NG consumption in industry. Cooking is proceeding directly in the living quarters, those usually do not meet the requirements of the Ukrainian norms DBN for the ventilation procedures. NG use in household gas stoves is of great importance from the standpoint of controlling the emissions of harmful components of combustion products along with maintenance the satisfactory energy efficiency characteristics of NG using. The main environment pollutants when burning the natural gas in gas stoves are including the nitrogen oxides NOx (to a greater extent — highly toxic NO2 component), carbon oxide CO, formaldehyde CH2O as well as hydrocarbons (unburned UHC and polyaromatic PAH). An overview of environmental documents to control CO and NOx emissions in comparison with the proper norms by USA, EU, Russian Federation, Australia and China, has been completed. The modern designs of the burners for gas stoves are considered along with defining the main characteristics: heat power, the natural gas flow rate, diameter of gas orifice, diameter and spacing the firing openings and other parameters. The modern physical and chemical principles of gas combustion by means of atmospheric ejection burners of gas cookers have been analyzed from the standpoints of combustion process stabilization and of ensuring the stability of flares. Among the factors of the firing process destabilization within the framework of analysis above mentioned, the following forms of unstable combustion/flame unstabilities have been considered: flashback, blow out or flame lifting, and the appearance of flame yellow tips. Bibl. 37, Fig. 11, Tab. 7.

On the Influence of Fluctuating Flow Rate Upon the Performance and Behaviour of Isothermal Reacting Systems

1998 ◽  
Vol 63 (6) ◽  
pp. 881-898
Author(s):  
Otakar Trnka ◽  
Miloslav Hartman
Keyword(s):  
Flow Rate ◽  
Gas Flow ◽  
Fluidized Bed Reactor ◽  
Computational Techniques ◽  
Continuous Stirred Tank Reactor ◽  
Gas Flow Rate ◽  
Solid Reaction ◽  
Continuous Stirred Tank ◽  
And Performance ◽  
Reacting Systems

Three simple computational techniques are proposed and employed to demonstrate the effect of fluctuating flow rate of feed on the behaviour and performance of an isothermal, continuous stirred tank reactor (CSTR). A fluidized bed reactor (FBR), in which a non-catalytic gas-solid reaction occurs, is also considered. The influence of amplitude and frequency of gas flow rate fluctuations on reactant concentrations at the exit of the CSTR is shown in four different situations.

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