Hydrogen Diffusion and Solubility in A-Si:H
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ABSTRACTFor plasma-grown a-Si:H films deposited at substrate temperatures between 100 and 580°C the diffusion of hydrogen was studied by SIMS profiling of H/D interdiffusion and by hydrogen evolution. The solubility for deuterium penetration into a-Si:H is found to be limited by the hydrogen concentration. Diffusion prefactors and activation energies evaluated for a constant diffusion length follow a Meyer-Neldel rule. The diffusion free energies obtained by interdiffusion and evolution experiments agree closely up to about 400°C but disagree at higher substrate temperatures.
2005 ◽
Vol 237-240
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pp. 340-345
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