Thermochemical Data for CVD Modeling from Ab initio Calculations
Keyword(s):
AbstractAb initio electronic-structure calculations are combined with empirical bond-additivity corrections to yield thermochemical properties of gas-phase molecules. A self-consistent set of heats of formation for molecules in the Si-H, Si-H-Cl, Si-H-F, Si-N-H and Si-NH- F systems is presented, along with preliminary values for some Si-O-C-H species.
1992 ◽
Vol 06
(23n24)
◽
pp. 3687-3693
◽
2019 ◽
Vol 21
(41)
◽
pp. 23017-23025
◽
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