scholarly journals Compositions and Chemical Bonding in Ceramics by Quantitative Electron Energy-Loss Spectrometry

1994 ◽  
Vol 332 ◽  
Author(s):  
J. Bentley ◽  
L.L Horton ◽  
C.J. Mchargue ◽  
S. Mckernan ◽  
C.B. Carter ◽  
...  

ABSTRACTQuantitative electron energy-loss spectrometry was applied to a range of ceramic materials at a spatial resolution of <5 nm. Analysis of Fe L23 white lines indicated a low-spin state with a charge transfer of ∼1.5 electrons/atom onto the Fe atoms implanted into (amorphized) silicon carbide. Gradients of 2 to 5% in the Co:O stoichiometry were measured across 100-nm-thick Co3O4 layers in an oxidized directionally solidified CoO-ZrO2 eutectic, with the highest O levels near the ZrO2. The energy-loss near-edge structures were dramatically different for the two cobalt oxides: those for Co3O4 have been incorrectly ascribed to CoO in the published literature. Kinetically stabilized solid solubility occurred in an AIN-SiC film grown by low-temperature molecular beam epitaxy (MBE) on α(6H)-SiC, and no detectable interdiffusion occurred in couples of MBE-grown AIN on SiC following annealing at up to 1750°C. In diffusion couples of polycrystalline AIN on SiC, interfacial 8H sialon (aluminum oxy-nitride) and pockets of Si3N4-rich β'sialon in the SiC were detected.

1992 ◽  
Vol 259 ◽  
Author(s):  
Selmer S. Wong ◽  
Shouleh Nikzad ◽  
Channing C. Ahn ◽  
Aimee L. Smith ◽  
Harry A. Atwater

ABSTRACTWe have employed reflection electron energy loss spectrometry (REELS), a surface chemical analysis technique, in order to analyze contaminant coverages at the submonolayer level during low-temperature in situ cleaning of hydrogen-terminated Si(100). The chemical composition of the surface was analyzed by measurements of the C K, O K and Si L2,3 core loss intensities at various stages of the cleaning. These results were quantified using SiC(100) and SiO2 as reference standards for C and O coverage. Room temperature REELS core loss intensity analysis after sample insertion reveals carbon at fractional monolayer coverage. We have established the REELS detection limit for carbon coverage to be 5±2% of a monolayer. A study of temperature-dependent hydrocarbon desorption from hydrogen-terminated Si(100) reveals the absence of carbon on the surface at temperatures greater than 200°C. This indicates the feasibility of epitaxial growth following an in situ low-temperature cleaning and also indicates the power of REELS as an in situ technique for assessment of surface cleanliness.


Author(s):  
M Stöger-Pollach ◽  
C Hébert ◽  
E C Karl-Rückert ◽  
P Schattschneider ◽  
B Rau ◽  
...  

1990 ◽  
Vol 359 ◽  
pp. 246 ◽  
Author(s):  
Thomas J. Bernatowicz ◽  
Patrick C. Gibbons ◽  
Roy S. Lewis

2000 ◽  
Vol 77 (2) ◽  
pp. 238-240 ◽  
Author(s):  
A. Hightower ◽  
C. C. Ahn ◽  
B. Fultz ◽  
P. Rez

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