Line-Source Processing of SOI Structures with Laser and Electron Beam

1984 ◽  
Vol 33 ◽  
Author(s):  
Leslie J. Palkuti ◽  
Chan-Sui pang
Keyword(s):  
Electron Beam ◽  
Single Crystal ◽  
Three Dimensional ◽  
Process Window ◽  
Beam Power ◽  
Temperature Cycle ◽  
Halogen Lamp ◽  
Substrate Heating ◽  
Aspect Ratios ◽  
Laser Systems

ABSTRACTLine-shaped laser and electron beams in combination with halogen-lamp substrate heating were used to fabricate single-crystal SOI films. Electron-beam and laser systems were developed to achieve a minimum beam cross section of 10–100 microns and aspect ratios up to 70. Unseeded SOI films were fabricated with a (100) textured single-crystal structure. Seeded films were recrystallized with 20 × 80-micron single crystal islands with no low-angle grain boundaries. A process window of 1 to 10 percent in electron-beam power was measured. Single-crystal films were obtained at a line-scan velocity up to 2 cm/s suggesting a potential throughput of about 100 wafers per hour. The high scan velocity allows for minimizing the high-temperature cycle to under 30 seconds that the wafer is exposed to during recrystallization. This short temperture cycle is compatible with the fabrication of three dimensional devices, since unwanted diffusion and substrate damage are minimized.

scholarly journals On the correctness of mathematical models of time-of-flight cathodoluminescence of direct-gap semiconductors

2019 ◽  
Vol 30 ◽  
pp. 07014
Author(s):  
Mikhail A. Stepovich ◽  
Dmitry V. Turtin ◽  
Elena V. Seregina ◽  
Veronika V. Kalmanovich
Keyword(s):  
Electron Beam ◽  
Gallium Nitride ◽  
Initial Data ◽  
Mathematical Models ◽  
Single Crystal ◽  
Three Dimensional ◽  
Time Of Flight ◽  
Semiconductor Material ◽  
Two Dimensional ◽  
Cathodoluminescence Intensity

Two-dimensional and three-dimensional mathematical models of diffusion and cathodoluminescence of excitons in single-crystal gallium nitride excited by a pulsating sharply focused electron beam in a homogeneous semiconductor material are compared. The correctness of these models has been carried out, estimates have been obtained to evaluate the effect of errors in the initial data on the distribution of the diffusing excitons and the cathodoluminescence intensity.

scholarly journals Validation experiments for LBM simulations of electron beam melting

2014 ◽  
Vol 25 (12) ◽  
pp. 1441009 ◽  
Author(s):  
Regina Ammer ◽  
Ulrich Rüde ◽  
Matthias Markl ◽  
Vera Jüchter ◽  
Carolin Körner
Keyword(s):  
Electron Beam ◽  
Electron Beam Melting ◽  
Three Dimensional ◽  
Numerical Data ◽  
Process Window ◽  
Line Energy ◽  
Good Surface ◽  
Experimental Process ◽  
Numerical Process ◽  
Best Parameter

This paper validates three-dimensional (3D) simulation results of electron beam melting (EBM) processes by comparing experimental and numerical data. The physical setup is presented which is discretized by a 3D thermal lattice Boltzmann method (LBM). An experimental process window is used for the validation depending on the line energy injected into the metal powder bed and the scan velocity of the electron beam. In the process window, the EBM products are classified into the categories, porous, good and swelling, depending on the quality of the surface. The same parameter sets are used to generate a numerical process window. A comparison of numerical and experimental process windows shows a good agreement. This validates the EBM model and justifies simulations for future improvements of the EBM processes. In particular, numerical simulations can be used to explain future process window scenarios and find the best parameter set for a good surface quality and dense products.

Molten Region around the Cavity Generated by a Moving Electron Beam

2011 ◽  
Vol 421 ◽  
pp. 169-172
Author(s):  
Yu Hsiang Tsai ◽  
Ching Yen Ho
Keyword(s):  
Electron Beam ◽  
Three Dimensional ◽  
Source Model ◽  
Beam Power ◽  
Image Method ◽  
Adiabatic Condition ◽  
Paraboloid Of Revolution ◽  
Line Source Model ◽  
Infinite Temperature ◽  
Molten Region

In this paper analytical predictions of the molten region around the cavity produced by a moving electron beam are provided. A three-dimensional analytical model is used to predict the molten and heat-affected regions surrounding a paraboloid of revolution-shaped cavity. This work avoids the defect of the infinite temperature at the cavity base for the line-source model. Introducing a new image method, an analytical solution is provided by satisfying exactly the adiabatic condition at the top surface. The molten region is governed by dimensionless parameters related to beam power per unit penetration and the depth and shape of the cavity in this work. A three-dimensional molten region is computed and presented in this paper. The effect of beam power per unit penetration on the molten region is also discussed.

Three-Dimensional Electron-Beam Deflection and Missed Joint in Welding Dissimilar Metals

1997 ◽  
Vol 119 (4) ◽  
pp. 832-839 ◽  
Author(s):  
P. S. Wei ◽  
F. K. Chung
Keyword(s):  
Electron Beam ◽  
Electrical Contact ◽  
Three Dimensional ◽  
Electron Gun ◽  
Beam Deflection ◽  
Beam Power ◽  
Dissimilar Metals ◽  
Electrical Contact Resistance ◽  
Paraboloid Of Revolution

Three-dimensional deflection of the electron beam resulting in a missed joint due to thermoelectric magnetism generated while welding dissimilar metals is systematically investigated. The incident energy rate distribution is assumed to be Gaussian and the deep and narrow welding cavity induced is idealized as a paraboloid of revolution. With a three-dimensional analytical solution for the temperature and by solving Maxwell’s electromagnetic equations, thermoelectric currents, magnetic flux densities, and deflections of the beam are found. The predictions agree with available experimental data. The results find that missed joints can be reduced by increasing the dimensionless accelerating voltage-to-Seebeck e.m.f. parameter, Peclet number, and effective electrical contact resistance parameter, and decreasing dimensionless beam power, magnetic permeabilities, and electrical conductivity ratio between metals 1 and 2. Tilting workpieces and shifting the electron gun from the joint line are also feasible. A three-dimensional analysis is required for a successful determination of beam deflection.

Shape of Fusion Zone for the Welding Keyhole Induced by an Electron Beam

2013 ◽  
Vol 773-774 ◽  
pp. 812-817
Author(s):  
Ching Yen Ho ◽  
Yu Hsiang Tsai
Keyword(s):  
Electron Beam ◽  
Fusion Zone ◽  
Three Dimensional ◽  
Source Model ◽  
Beam Power ◽  
Image Method ◽  
Adiabatic Condition ◽  
Paraboloid Of Revolution ◽  
Dimensional Shape ◽  
Three Dimensional Shape

In this paper analytical predictions of the fusion zone shapes around the welding cavity produced by a moving electron beam are provided. A three-dimensional analytical model in the molten and heat-affected regions surrounding a paraboloid of revolution-shaped cavity is used to predict the shapes of the fusion zones. This work avoids the defect of the infinite temperature at the cavity base for the line-source model. Introducing a new image method, a new analytical solution is provided by satisfying exactly the adiabatic condition at the top surface. The shape of a fusion zone is governed by dimensionless parameters related to beam power per unit penetration, and the depth and shape of the cavity in this work. A three-dimensional shape of fusion zone is computed and presented in this paper. The effect of beam power per unit penetration on the shape of fusion is also discussed.

Voids in Quenched Nickel

1968 ◽  
Vol 26 ◽  
pp. 266-267
Author(s):  
J. J. Laidler
Keyword(s):  
Electron Beam ◽  
Ambient Temperature ◽  
Cooling Rate ◽  
Three Dimensional ◽  
Cooling Curve ◽  
Polycrystalline Nickel ◽  
Quenching Temperature ◽  
Long Tail ◽  
Diffusion Pump

The presence of three-dimensional voids in quenched metals has long been suspected, and voids have indeed been observed directly in a number of metals. These include aluminum, platinum, and copper, silver and gold. Attempts at the production of observable quenched-in defects in nickel have been generally unsuccessful, so the present work was initiated in order to establish the conditions under which such defects may be formed.Electron beam zone-melted polycrystalline nickel foils, 99.997% pure, were quenched from 1420°C in an evacuated chamber into a bath containing a silicone diffusion pump fluid . The pressure in the chamber at the quenching temperature was less than 10-5 Torr . With an oil quench such as this, the cooling rate is approximately 5,000°C/second above 400°C; below 400°C, the cooling curve has a long tail. Therefore, the quenched specimens are aged in place for several seconds at a temperature which continuously approaches the ambient temperature of the system.

Point-Cathode Electron Gun Using Electron-Beam Bombardment for Cathode Tip Heating

1990 ◽  
Vol 48 (1) ◽  
pp. 198-199
Author(s):  
Ryo Iiyoshi ◽  
Susumu Maruse ◽  
Hideo Takematsu
Keyword(s):  
Electron Beam ◽  
Tungsten Wire ◽  
Local Heating ◽  
Electron Gun ◽  
Original Position ◽  
Beam Power ◽  
Radius Of Curvature ◽  
High Brightness ◽  
Beam Focusing ◽  
Time Operation

Point cathode electron gun with high brightness and long cathode life has been developed. In this gun, a straightened tungsten wire is used as the point cathode, and the tip is locally heated to higher temperatures by electron beam bombardment. The high brightness operation and some findings on the local heating are presented.Gun construction is shown in Fig.l. Small heater assembly (annular electron gun: 5 keV, 1 mA) is set inside the Wehnelt electrode. The heater provides a disk-shaped bombarding electron beam focusing onto the cathode tip. The cathode is the tungsten wire of 0.1 mm in diameter. The tip temperature is raised to the melting point (3,650 K) at the beam power of 5 W, without any serious problem of secondary electrons for the gun operation. Figure 2 shows the cathode after a long time operation at high temperatures, or high brightnesses. Evaporation occurs at the tip, and the tip part retains a conical shape. The cathode can be used for a long period of time. The tip apex keeps the radius of curvature of 0.4 μm at 3,000 K and 0.3 μm at 3,200 K. The gun provides the stable beam up to the brightness of 6.4×106 A/cm2sr (3,150 K) at the accelerating voltage of 50 kV. At 3.4×l06 A/cm2sr (3,040 K), the tip recedes at a slow rate (26 μm/h), so that the effect can be offset by adjusting the Wehnelt bias voltage. The tip temperature is decreased as the tip moves out from the original position, but it can be kept at constant by increasing the bombarding beam power. This way of operation is possible for 10 h. A stepwise movement of the cathode is enough for the subsequent operation. Higher brightness operations with the rapid receding rates of the tip may be improved by a continuous movement of the wire cathode during the operations. Figure 3 shows the relation between the beam brightness, the tip receding rate by evaporation (αis the half-angle of the tip cone), and the cathode life per unit length, as a function of the cathode temperature. The working life of the point cathode is greatly improved by the local heating.

Nanoscale Self-Assembly Using Ion and Electron Beam Techniques: A Rapid Review

MRS Advances ◽  
2020 ◽  
Vol 5 (64) ◽  
pp. 3507-3520
Author(s):  
Chunhui Dai ◽  
Kriti Agarwal ◽  
Jeong-Hyun Cho
Keyword(s):  
Electron Beam ◽  
Self Assembly ◽  
Ion Beam ◽  
Three Dimensional ◽  
The Self ◽  
Stress Generation ◽  
Rapid Review ◽  
High Yield ◽  
3D Nanostructures ◽  
Self Assembled

AbstractNanoscale self-assembly, as a technique to transform two-dimensional (2D) planar patterns into three-dimensional (3D) nanoscale architectures, has achieved tremendous success in the past decade. However, an assembly process at nanoscale is easily affected by small unavoidable variations in sample conditions and reaction environment, resulting in a low yield. Recently, in-situ monitored self-assembly based on ion and electron irradiation has stood out as a promising candidate to overcome this limitation. The usage of ion and electron beam allows stress generation and real-time observation simultaneously, which significantly enhances the controllability of self-assembly. This enables the realization of various complex 3D nanostructures with a high yield. The additional dimension of the self-assembled 3D nanostructures opens the possibility to explore novel properties that cannot be demonstrated in 2D planar patterns. Here, we present a rapid review on the recent achievements and challenges in nanoscale self-assembly using electron and ion beam techniques, followed by a discussion of the novel optical properties achieved in the self-assembled 3D nanostructures.

Structure and Thermoelectric Properties of New Quaternary Tin and Lead Bismuth Selenides, K1+xM4-2xBi7+xSe15 (M = Sn, Pb) and K1+xSn5-xBi11+xSe22

2000 ◽  
Vol 626 ◽  
Author(s):  
Antje Mrotzek ◽  
Kyoung-Shin Choi ◽  
Duck-Young Chung ◽  
Melissa A. Lane ◽  
John R. Ireland ◽  
...  
Keyword(s):  
Thermal Conductivity ◽  
Single Crystal ◽  
Thermoelectric Properties ◽  
Three Dimensional ◽  
Structure Type ◽  
Narrow Gap ◽  
Low Thermal Conductivity ◽  
Seebeck Coefficients ◽  
Metal Atoms ◽  
Anionic Framework

ABSTRACTWe present the structure and thermoelectric properties of the new quaternary selenides K1+xM4–2xBi7+xSe15 (M = Sn, Pb) and K1-xSn5-xBi11+xSe22. The compounds K1+xM4-2xBi7+xSe15 (M= Sn, Pb) crystallize isostructural to A1+xPb4-2xSb7+xSe15 with A = K, Rb, while K1-xSn5-xBi11+xSe22 reveals a new structure type. In both structure types fragments of the Bi2Te3-type and the NaCl-type are connected to a three-dimensional anionic framework with K+ ions filled tunnels. The two structures vary by the size of the NaCl-type rods and are closely related to β-K2Bi8Se13 and K2.5Bi8.5Se14. The thermoelectric properties of K1+xM4-2xBi7+xSe15 (M = Sn, Pb) and K1-xSn5-xBi11+xSe22 were explored on single crystal and ingot samples. These compounds are narrow gap semiconductors and show n-type behavior with moderate Seebeck coefficients. They have very low thermal conductivity due to an extensive disorder of the metal atoms and possible “rattling” K+ ions.

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