Characterization of Defects in N-Type 6H-SiC Single Crystals by Optical Admittance Spectroscopy
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AbstractOptical admittance spectroscopy is a technique for measuring the conductance and capacitance of a junction under illumination as a function of the wavelength of the light and the frequency of the measuring AC signal. For the first time, this technique is applied to characterize deep defect levels in 6H-SiC:N. Nitrogen is a donor atom in 6H-SiC which substitutes for carbon in three inequivalent sites (h, kl, k2). giving rise to n-type conduction. Deep defect levels attributible to transition metal impurities have been identified in 6H-SiC:N by optical admittance spectroscopy.
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1987 ◽
Vol 97-98
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pp. 663-666
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2019 ◽
Vol 99
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pp. 172-177
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2007 ◽
Vol 36
(6)
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pp. 623-628
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