Evolution of Surface Roughness of a Strained Epitaxial Film Due to Interface Misfit Dislocations
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ABSTRACTThe appearance of misfit dislocations at the interface between a strained layer and its substrate induces a nonuniform chemical potential along the surface of the layer. Under the assumption that the resulting chemical potential gradient will drive coherent mass rearrangement by surface diffusion, a model of evolution of surface shape is considered which leads to estimates of the surface roughness induced by this mechanism.
1995 ◽
Vol 20
(4)
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pp. 337-349
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1965 ◽
Vol 208
(2)
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pp. 401-406
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2002 ◽
Vol 628
(9-10)
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pp. 2183-2183
2010 ◽
Vol 667
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pp. 216-259
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1994 ◽
Vol 446
(1926)
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pp. 15-37
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