Integrated Pyroelectric Infrared Sensor Using Pvdf thin Film Deposited by Electro-Spray Method

1993 ◽  
Vol 310 ◽  
Author(s):  
Ryouji Asahi ◽  
Jiro Sakata ◽  
Osamu Tabata ◽  
Midori Mochizuki ◽  
Susumu Sugiyama ◽  
...  
Keyword(s):  
Thin Film ◽  
Silicon Substrate ◽  
Thermal Conduction ◽  
Vinylidene Fluoride ◽  
Sacrificial Layer ◽  
Pyroelectric Coefficient ◽  
Infrared Sensor ◽  
Etching Technique ◽  
Spray Method ◽  
Poly Vinylidene Fluoride

AbstractA pyroelectric infrared sensor using a poly(vinylidene fluoride) (PVDF) thin film has been integrated with a read-out circuit on a silicon substrate. The PVDF thin film with a thickness of 1-2 µm was deposited on the sensing area by an electro-spray (ESP) method. A form I crystal and a large pyroelectric coefficient of 4 nCcm−2K−1 were observed just after the deposition without any poling treatments. The fabrication process of the sensor was based on a standard MOS LSI process and a polysilicon sacrificial layer etching technique. In order to reduce the heat capacitance and the thermal conduction, the PVDF thin film was supported on a thin Si3N4 membrane structure formed by etching a part of the silicon substrate under the sensing area. The sensor with a sensing area of 400x400 µm2 had a responsivity of 98 V/W, a detectivity of l.4× 107 cmHz1/2W−1, an NEP of 2.9× 10−99 Hz1/2W at a frequency of 100 Hz and a time constant of 1.3 msec.

Preparation and electrical properties of γ form poly(vinylidene fluoride) thin film by vapour deposition in the presence of an electric field

1991 ◽  
Vol 202 (2) ◽  
pp. 213-220 ◽  
Author(s):  
Akiyoshi Takeno ◽  
Norimasa Okui ◽  
Tetsuji Kitoh ◽  
Michiharu Muraoka ◽  
Susumu Umemoto ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Electric Field ◽  
Vapour Deposition ◽  
Vinylidene Fluoride ◽  
Poly Vinylidene Fluoride

scholarly journals PVDF-TrFE-Based Stretchable Contact and Non-Contact Temperature Sensor for E-Skin Application

Sensors ◽  
2020 ◽  
Vol 20 (3) ◽  
pp. 623 ◽  
Author(s):  
Bastien Marchiori ◽  
Simon Regal ◽  
Yanid Arango ◽  
Roger Delattre ◽  
Sylvain Blayac ◽  
...  
Keyword(s):  
Vinylidene Fluoride ◽  
Electrical Contact ◽  
Pressure Sensors ◽  
Stretchable Electronics ◽  
Infrared Sensor ◽  
Minimal Level ◽  
Electronic Skin ◽  
Poly Vinylidene Fluoride ◽  
Thermal Sensing ◽  
Pyroelectric Material

Development of stretchable electronics has been driven by key applications such as electronics skin for robotic or prosthetic. Mimicking skin functionalities imposes at a minimal level: stretchability, pressure, and temperature sensing capabilities. While the research on pressure sensors for artificial skin is extensive, stretchable temperature sensors remain less explored. In this work, a stretchable temperature and infrared sensor has been developed on a polydimethylsiloxane substrate. The sensor is based on poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) as a pyroelectric material. This material is sandwiched between two electrodes. The first one consists of aluminium serpentines, covered by gold in order to get electrical contact and maximum stretchability. The second one is based on poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) that has shown good electrical compatibility with PVDF-TrFE and provides the stretchability of the top electrode. Without poling the PVDF-TrFE, sensor has shown a sensitivity of around 7 pF.°C−1 up to 35% strain without any change in its behaviour. Then, taking advantage on infrared absorption of PEDOT:PSS, a poled device has shown a pyroelectric peak of 13 mV to an infrared illumination of 5 mW at 830 nm. This stretchable device valuably allows an electronic skin (e-skin) use for contact and more importantly non-contact thermal sensing.

Morphology control of poly(vinylidene fluoride) thin film made with electrospray

2006 ◽  
Vol 298 (2) ◽  
pp. 639-651 ◽  
Author(s):  
Ivo B. Rietveld ◽  
K. Kobayashi ◽  
H. Yamada ◽  
K. Matsushige
Keyword(s):  
Thin Film ◽  
Vinylidene Fluoride ◽  
Morphology Control ◽  
Poly Vinylidene Fluoride

scholarly journals Polarization Properties and Polarization Depth Profiles of (Cd:Zn)S/P(VDF-TrFE) Composite Films in Dependence of Optical Excitation

Polymers ◽  
2018 ◽  
Vol 10 (11) ◽  
pp. 1205
Author(s):  
Sebastian Engel ◽  
David Smykalla ◽  
Bernd Ploss ◽  
Stephan Gräf ◽  
Frank Müller
Keyword(s):  
Depth Profile ◽  
Vinylidene Fluoride ◽  
Composite Films ◽  
Optical Excitation ◽  
Pyroelectric Coefficient ◽  
Excitation Intensity ◽  
Peak Voltage ◽  
Small Peak ◽  
Temporal Decay ◽  
Poly Vinylidene Fluoride

The influence of optical excitation intensity on the electrical, ferroelectric and pyroelectric properties of ferroelectric-semiconductor-composites was investigated. For this purpose, composite thin films consisting of poly(vinylidene fluoride-co-trifluoroethylene) and 10 vol % (Cd:Zn)S particles with a thickness of 34 µm were fabricated. The samples were used to measure the absolute pyrocoefficient and to determine the relative pyroelectric depth profile using Laser Intensity Modulated Method. It was shown that a polarization of the samples without an optical excitation at the utilized relatively small peak-to-peak voltages could not be verified by the Sawyer–Tower circuit and the measurement setup of the pyroelectric coefficient, respectively. Both remanent polarization and pyroelectric coefficients increased with increasing optical excitation intensity during poling as well as increasing peak-to-peak voltage. The pyrocoefficient shows a temporal decay in the first hours after poling. The specific heat and thermal conductivity or the thermal diffusivity are required for the calibration of the pyroelectric depth profile. Rule of mixture and photo-acoustic investigations proved that the thermal properties of the utilized composites do not differ significantly from those of the pristine polymer. Based on the pyroelectric depth profile which is proportional to the polarization profile, the existing “three phase model” has been extended to generate a replacement circuit diagram, explaining the local polarization due to the optical excitation dependency for both local resistivity and local field strength.

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