Energy Release Due to Domain Formation in the Strained Epitaxy of Multivariant Films

1993 ◽  
Vol 310 ◽  
Author(s):  
W. Pompe ◽  
X. Gong ◽  
Z. Suo ◽  
J.S. Speck

AbstractTwin related domain formation is examined as a strain relaxation mechanism for a heteroepitaxial tetragonal film on a cubic substrate. Elastic relaxations are calculated for a single twin band in which the c-axis of the tetragonal domains is either related by a 90* rotation about an axis in the plane of the film or by a 90* rotation about the surface normal. In all cases, the strain energy change is evaluated for both the film and the substrate. A domain pattern map is developed that predicts single domain and multiple domain fields depending on the relative misfit strains and domain wall energy. The concept of a critical thickness, hc, for domain formation is developed. For cases in which the c-axis is rotated 90* about an axis in the plane of the film, the critical thickness depends only on the relative coherency strain between the substrate and film and the ratio of the domain wall energy to the stored elastic energy. For the case of a pattern consisting of energetically equivalent domains with the c-axis in plane, the equilibrium distance of multiple domains is derived. For such multiple domains, a minimum wall separation distance exists which depends non-linearly on the film thickness.

1992 ◽  
Vol 263 ◽  
Author(s):  
Hyo-Hoon Park ◽  
Jung Kee Lee ◽  
El-Hang Lee ◽  
Jeong Yong Lee ◽  
Soon-Ku Hong

ABSTRACTThe strain relaxation mechanism via the homogeneous nucleation of misfit dislocations from interface during interdiffusion in lattice-matched semiconductor heterostructures has been investigated. Transmission electron microscopy studies in intermixed GaInAsP/InP heterostructures revealed that the critical interdiffusion depth for the nucleation of 90° 1/6<112> partial dislocations from a tensile interface is much shallower than that of 60° 1/2<110> perfect dislocations from a compressive interface. A critical thickness model for the interface nucleation of these dislocations is developed as a modification of the classical surface nucleation'model.


2000 ◽  
Vol 76 (24) ◽  
pp. 3552-3554 ◽  
Author(s):  
H. Trinkaus ◽  
B. Holländer ◽  
St. Rongen ◽  
S. Mantl ◽  
H.-J. Herzog ◽  
...  

2002 ◽  
Vol 742 ◽  
Author(s):  
XianRong Huang ◽  
Michael Dudley ◽  
Philip G. Neudeck ◽  
J. Anthony Powell

ABSTRACTHigh-resolution X-ray diffraction (HRXRD) combined with other diffraction techniques is applied to characterize 3C SiC epilayers hoteroepitaxially grown on atomically flat mesas on 4H and 6H SiC substrates. Small-beam rocking curve scan and reciprocal mapping show extremely high crystalline perfection and homogeneity of the ideally grown 3C-SiC epilayers. Accurate lattice measurements based on X-ray multiple-order reflections reveal that: 1) no misorientation between the (0001) lattice planes across the 4H/3C or 6H/3C interface is detected, confirming the 2D nucleation mechanism of the 3C epilayer from a flat coherent interface; 2) in-plane substrate/epilayer lattice mismatch always exists, but the 3C epilayers do not correspond to a completely relaxed cubic structure, indicating that the epilayers are partially strained; 3) lattice mismatch varies for different regions, implying a complicated strain relaxation mechanism of 3C epilayers on various mesas.


1985 ◽  
Vol 46 (C6) ◽  
pp. C6-309-C6-312
Author(s):  
R. Szymczak ◽  
E. Burzo ◽  
W. E. Wallace

1977 ◽  
Vol 48 (4) ◽  
pp. 1727-1729 ◽  
Author(s):  
Ian L. Sanders ◽  
Alan J. Collins

2006 ◽  
Vol 100 (4) ◽  
pp. 044323 ◽  
Author(s):  
D. I. Garcia-Gutierrez ◽  
M. José-Yacamán ◽  
Shifeng Lu ◽  
D. Q. Kelly ◽  
S. K. Banerjee

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