Microstructure, Damage and Resistance during Electromigration Life-Testing of Al-Cu Interconnects

1993 ◽  
Vol 309 ◽  
Author(s):  
W.C. Shih ◽  
A.L. Greer ◽  
Y.Z. Xu ◽  
B.K. Jones
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Microstructure Evolution ◽  
Accelerated Life Testing ◽  
Life Testing ◽  
Damage Development ◽  
Cu Metallization ◽  
Accelerated Life ◽  
Line Resistance ◽  
Scanning Electron

AbstractUnpassivated 1.4 mm long lines of Al-4wt.%Cu metallization have been successively imaged (by scanning electron microscopy) and electromigration stressed until failure. The resistance of lines, evolution of line microstructure and the development of electromigration damage are thus discontinuously recorded through the accelerated life-testing (260°C, 2 × 1010 A m-2). Correlations are made among microstructure evolution, electromigration damage development and line resistance. The probable mechanisms of damage development are discussed.

Delamination Behavior of Cu-Low-k Stack Under Different Slurries

2003 ◽  
Vol 767 ◽  
Author(s):  
A. K. Sikder ◽  
S. Thagella ◽  
P. B. Zantye ◽  
Ashok Kumar
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Chemical Mechanical Polishing ◽  
Wear Behavior ◽  
Polished Surface ◽  
Cu Metallization ◽  
Wide Range ◽  
Low K ◽  
Delamination Behavior ◽  
Scanning Electron

AbstractLower mechanical strength, reduced cohesive strength and lack of compatibility with other interconnect materials, are the major challenges involved in chemical mechanical polishing (CMP) of Cu metallization with ultra low-k materials as interlayer dielectrics. In this study we have investigated the polishing behavior of patterned Cu samples with underneath different low-k materials using two different slurries and a wide range of machine parameters. CMP micro tribometer was used to polish the samples with different rotations of platen (50 to 250 RPM) and down forces (1-6 PSI). Friction co-efficient and wear behavior were also investigated at different conditions. Optical and scanning electron microscopy was used to investigate the polished surface. It was observed that the two different Cu slurries used for polishing have marked effects on the polishing of Cu-low-k stack with respect to wear and delamination.

scholarly journals Microstructure Evolution and Coarsening of θ′-Al2Cu Precipitates in a Creep Aged Al-Cu-Mn Alloy

2021 ◽  
Vol 2101 (1) ◽  
pp. 012071
Author(s):  
Soban Muddassir Dar ◽  
Yutao Zhao ◽  
Hengcheng Liao ◽  
Xizhou Kai
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Growth Rate ◽  
Microstructure Evolution ◽  
Average Length ◽  
Transmission Electron ◽  
Creep Exposure ◽  
Creep Temperature ◽  
Scanning Electron

Abstract This paper describes the microstructure evolution in a creep aged Al-Cu-Mn alloy using optical microscopy (OM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Results show the sub-grains formation and accelerated coarsening of θ′ precipitates in creep aged samples. It is observed that at an applied stress of 50MPa, as the creep temperature increases the average length of θ′ precipitates increases and their aspect ratio first increases then decreases. It is also found that after 100h of creep exposure at 200°C/50MPa, θ′ precipitates have grown to an average length of 279nm; at 225°C/50MPa to an average length of 425nm and at 250°C/50MPa they have grown to an average length of 844nm. Coarsening/growth rate of the precipitates is described by Lifshitz-Slyozov-Wagner (LSW) model.

Microstructure Evolution of Laser Direct Deposited Ti-5Al-2Sn-2Zr-4Mo-4Cr Titanium Alloy

2014 ◽  
Vol 789 ◽  
pp. 436-442
Author(s):  
Yu Dai Wang ◽  
Shuai Jiang ◽  
Fan Sun ◽  
Huai Xue Li ◽  
Mei Sun
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Titanium Alloy ◽  
Microstructure Evolution ◽  
Deposition Process ◽  
Laser Deposition ◽  
Laser Direct Deposition ◽  
Bottom To Top ◽  
Scanning Electron ◽  
Deposition Technology

In the present study, Ti-5Al-2Sn-2Zr-4Mo-4Cr titanium alloy was fabricated by laser direct deposition technology. Microstructure of the laser deposited Ti-5Al-2Sn-2Zr-4Mo-4Cr titanium alloy was characterized by optical microscopy (OM) and scanning electron microscopy (SEM). The laser deposited alloy has two types of periodic banded feature induced by the different stages of the thermal cycles during the laser deposition process. Moreover, microstructure evolves from the bottom to top of the laser deposited sample, and the mechanism of which is demonstrated.

scholarly journals Failure Mechanism of Solid Tantalum Capacitors

1976 ◽  
Vol 3 (3) ◽  
pp. 171-179 ◽  
Author(s):  
B. Goudswaard ◽  
F. J. J. Driesens
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Alternative Hypothesis ◽  
Tantalum Oxide ◽  
Operating Conditions ◽  
Thermal Migration ◽  
Accelerated Life Tests ◽  
Accelerated Life ◽  
Life Tests ◽  
Scanning Electron

It has been suggested that failure of solid tantalum capacitors is due to thermal migration of impurities from the tantalum anode to flaws in the oxide layer. This implies, however, that leakage current gradually increases under normal operating conditions, an effect which has not been observed. An alternative hypothesis advanced here is that failure is due to crystallization of tantalum oxide under the influence of the electric field. Scanning electron microscopy of specially cleaned anodized tantalum sheet on which thin gold electrodes have been deposited clearly shows the occurrence of crystallization after 17 hours at an applied voltage of 75 V and a temperature of 65℃. Results of accelerated life tests on solid tantalum capacitors at temperatures of 85℃ and 125℃, and at up to 2,5 times rated voltage also accord better with a field crystallization hypothesis than with a thermal migration failure hypothesis.

Pathogenesis of Human Hair Defects

1974 ◽  
Vol 32 ◽  
pp. 12-13
Author(s):  
P.S. Porter ◽  
T. Aoyagi ◽  
R. Matta
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Human Hair ◽  
Standard Techniques ◽  
Scanning Electron

Using standard techniques of scanning electron microscopy (SEM), over 1000 human hair defects have been studied. In several of the defects, the pathogenesis of the abnormality has been clarified using these techniques. It is the purpose of this paper to present several distinct morphologic abnormalities of hair and to discuss their pathogenesis as elucidated through techniques of scanning electron microscopy.

Ultrastructural Analysis of the Salivary Glands of Gromphadorhina Portentosa (Schaum)

1977 ◽  
Vol 35 ◽  
pp. 638-639
Author(s):  
P.J. Dailey
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Salivary Glands ◽  
Secretory Vesicles ◽  
The Past ◽  
Transmission Electron ◽  
Means Of Transmission ◽  
Gromphadorhina Portentosa ◽  
Scanning Electron ◽  
Topographical Relief

The structure of insect salivary glands has been extensively investigated during the past decade; however, none have attempted scanning electron microscopy (SEM) in ultrastructural examinations of these secretory organs. This study correlates fine structure by means of SEM cryofractography with that of thin-sectioned epoxy embedded material observed by means of transmission electron microscopy (TEM).Salivary glands of Gromphadorhina portentosa were excised and immediately submerged in cold (4°C) paraformaldehyde-glutaraldehyde fixative1 for 2 hr, washed and post-fixed in 1 per cent 0s04 in phosphosphate buffer (4°C for 2 hr). After ethanolic dehydration half of the samples were embedded in Epon 812 for TEM and half cryofractured and subsequently critical point dried for SEM. Dried specimens were mounted on aluminum stubs and coated with approximately 150 Å of gold in a cold sputtering apparatus.Figure 1 shows a cryofractured plane through a salivary acinus revealing topographical relief of secretory vesicles.

Two- or three-way observations of the identical cell elements within the same sections by LM, TEM and/or SEM

1978 ◽  
Vol 36 (2) ◽  
pp. 82-83 ◽  
Author(s):  
Nakazo Watari ◽  
Yasuaki Hotta ◽  
Yoshio Mabuchi
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Fine Structure ◽  
Light Microscopy ◽  
Thin Sections ◽  
Transmission Electron ◽  
Identical Cell ◽  
Electron Microscopes ◽  
Scanning Electron

It is very useful if we can observe the identical cell elements within the same sections by light microscopy (LM), transmission electron microscopy (TEM) and/or scanning electron microscopy (SEM) sequentially, because, the cell fine structure can not be indicated by LM, while the color is; on the other hand, the cell fine structure can be very easily observed by EM, although its color properties may not. However, there is one problem in that LM requires thick sections of over 1 μm, while EM needs very thin sections of under 100 nm. Recently, we have developed a new method to observe the same cell elements within the same plastic sections using both light and transmission (conventional or high-voltage) electron microscopes.In this paper, we have developed two new observation methods for the identical cell elements within the same sections, both plastic-embedded and paraffin-embedded, using light microscopy, transmission electron microscopy and/or scanning electron microscopy (Fig. 1).

Spontaneous Cataract in Nude Athymic Mice

1977 ◽  
Vol 35 ◽  
pp. 512-513
Author(s):  
Ronald H. Bradley ◽  
R. S. Berk ◽  
L. D. Hazlett
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Nude Mouse ◽  
Cellular Immunity ◽  
Phosphate Buffer ◽  
Osmium Tetroxide ◽  
Athymic Mice ◽  
Transmission Microscopy ◽  
Mouse Lens ◽  
Scanning Electron

The nude mouse is a hairless mutant (homozygous for the mutation nude, nu/nu), which is born lacking a thymus and possesses a severe defect in cellular immunity. Spontaneous unilateral cataractous lesions were noted (during ocular examination using a stereomicroscope at 40X) in 14 of a series of 60 animals (20%). This transmission and scanning microscopic study characterizes the morphology of this cataract and contrasts these data with normal nude mouse lens.All animals were sacrificed by an ether overdose. Eyes were enucleated and immersed in a mixed fixative (1% osmium tetroxide and 6% glutaraldehyde in Sorenson's phosphate buffer pH 7.4 at 0-4°C) for 3 hours, dehydrated in graded ethanols and embedded in Epon-Araldite for transmission microscopy. Specimens for scanning electron microscopy were fixed similarly, dehydrated in graded ethanols, then to graded changes of Freon 113 and ethanol to 100% Freon 113 and critically point dried in a Bomar critical point dryer using Freon 13 as the transition fluid.

Scanning and Transmission Microscopy of Nematocyst Batteries in Epitheliomuscular Cells of Hydra

1971 ◽  
Vol 29 ◽  
pp. 410-411 ◽  
Author(s):  
Jane A. Westfall ◽  
S. Yamataka ◽  
Paul D. Enos
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Osmium Tetroxide ◽  
External Surface ◽  
Three Dimensional ◽  
Surface Structures ◽  
Transmission Microscopy ◽  
Transmission Electron ◽  
Freeze Dried ◽  
Scanning Electron

Scanning electron microscopy (SEM) provides three dimensional details of external surface structures and supplements ultrastructural information provided by transmission electron microscopy (TEM). Animals composed of watery jellylike tissues such as hydras and other coelenterates have not been considered suitable for SEM studies because of the difficulty in preserving such organisms in a normal state. This study demonstrates 1) the successful use of SEM on such tissue, and 2) the unique arrangement of batteries of nematocysts within large epitheliomuscular cells on tentacles of Hydra littoralis.Whole specimens of Hydra were prepared for SEM (Figs. 1 and 2) by the fix, freeze-dry, coat technique of Small and Màrszalek. The specimens were fixed in osmium tetroxide and mercuric chloride, freeze-dried in vacuo on a prechilled 1 Kg brass block, and coated with gold-palladium. Tissues for TEM (Figs. 3 and 4) were fixed in glutaraldehyde followed by osmium tetroxide. Scanning micrographs were taken on a Cambridge Stereoscan Mark II A microscope at 10 KV and transmission micrographs were taken on an RCA EMU 3G microscope (Fig. 3) or on a Hitachi HU 11B microscope (Fig. 4).

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