Evaluation of a vertical tube concept for RTP

1993 ◽  
Vol 303 ◽  
Author(s):  
Byung-Jin Cho ◽  
Peter Vandenabeele ◽  
Karen Maex
Keyword(s):  
Dynamic Control ◽  
Oxide Thickness ◽  
Vertical Tube ◽  
Temperature Uniformity ◽  
Optimal Conditions ◽  
Optimal Power ◽  
System Concept ◽  
Hexagonal Shape ◽  
New System

ABSTRACTA new RTP system concept is proposed and demonstrated. The system uses a vertical cylindrical quartz tube, while the wafer is placed horizontally. Linear halogen lamps are arranged in an hexagonal shape. Optimal power control results in a temperature difference within ±1.5 °C over a 6 inch wafer in steady state. Oxidation under optimal conditions results in a 1.37% standard deviation for an average oxide thickness of 110.4 Å. The temperature nonuniformity during the transient has been greatly improved by using dynamic control. The main advantages of this new system concept are its excellent temperature uniformity and the good accessibility of the wafer for technological treatments and in situ measurements.

Temperature Uniformity Optimization Using Three-Zone Lamp and Dynamic Control in Rapid Thermal Multiprocessor

1991 ◽  
Vol 224 ◽  
Author(s):  
Pushkar P. Apte ◽  
Samuel Wood ◽  
Len Booth ◽  
Krishna C. Saraswat ◽  
Mehrdad M. Moslehi
Keyword(s):  
Thermal Processing ◽  
Dynamic Control ◽  
Rapid Thermal Processing ◽  
Chemical Vapor ◽  
Processing Conditions ◽  
Temperature Uniformity ◽  
Throughput Rate ◽  
Precise Control ◽  
Lamp System

AbstractRapid thermal processing (RTP) can play an important role in in situ single-wafer thermal multiprocessing, since it allows for a rapid wafer throughput rate. Conventional dedicated RTP equipment, where temperature uniformity is achieved by optimized reflector and chamber geometries for a specific process, typically cannot provide uniformity for different processes, or for a range of processing conditions. In this work we present a new flexible lamp system, in which tungsten-halogen lamps are configured in three concentric rings that are independently and dynamically controlled. The resultant circularly symmetric flux, which can be varied and controlled both temporally and spatially, offers significantly improved temperature uniformity. This is demonstrated using thermocouples as well as actual processes such as implant annealing, thermal oxidation and chemical vapor deposition of silicon. Through added flexibility and more precise control, this approach offers a powerful tool for multiprocessing and rapid process prototyping.

Zinc Oxide/Polyaniline Transparent Conductive Film Prepared by In Situ Polymerization Deposition

2014 ◽  
Vol 997 ◽  
pp. 368-370
Author(s):  
Ping Zhong ◽  
Lin Xiu Cheng ◽  
Xing Lu
Keyword(s):  
Zinc Oxide ◽  
Oxidative Polymerization ◽  
Optimal Conditions ◽  
Chemical Oxidative Polymerization ◽  
Reaction Conditions ◽  
Transparent Conductive Film ◽  
Conductive Film

In this paper，ZnO/PANI transparent conductive film has been prepared by in situ chemical oxidative polymerization, APS as an oxidant. The conductivity and transmittance of ZnO/PANI was measured. It has been investigated of the effects of reaction conditions and the doping component on conductivity, transmissivity and adhesion. With the increase of doping ZnO, the conductivity of ZnO/PANI transparent conductive film, transmittance and adhesion reduced. The optimal conditions is that the concentration of An, APS and PVA are 0.75 mol / L, 0.8 mol / L and 0.5wt%, respectively.

Adaptive equivalent consumption minimisation strategy and dynamic control allocation-based optimal power management strategy for four-wheel drive hybrid electric vehicles

2018 ◽  
Vol 233 (12) ◽  
pp. 3125-3146 ◽  
Author(s):  
Hui Liu ◽  
Xunming Li ◽  
Weida Wang ◽  
Lijin Han ◽  
Huibin Xin ◽  
...  
Keyword(s):  
Power Management ◽  
Management Strategy ◽  
Dynamic Control ◽  
Control Allocation ◽  
Energy Management Strategy ◽  
Torque Distribution ◽  
Power Management Strategy ◽  
Optimal Power ◽  
Wheel Drive ◽  
Four Wheel Drive

An adaptive equivalent consumption minimisation strategy and dynamic control allocation-based optimal power management strategy for a four-wheel drive plug-in hybrid electric vehicle is proposed in this paper. The equivalent factors of adaptive equivalent consumption minimisation strategy are optimised offline based on ISIGHT software over several typical driving cycles, which is integrated with AVL CRUISE and MATLAB/Simulink. To update the equivalent factor adaptively according to the predictive velocity, a neural network-based optimal equivalent factor prediction model is built, which can be used online. The torque distribution strategy considering axle load based on energy management strategy optimisation results and the vehicle dynamics control distribution is proposed: this includes two-wheel drive torque distribution, four-wheel drive torque distribution and brake torque distribution. The proposed energy management strategy is verified in New European Driving Cycle and Worldwide harmonised Light Vehicle Test Cycle driving patterns, and the simulation results show that the fuel economy of adaptive equivalent consumption minimisation strategy and dynamic control allocation-based optimal power management strategy is improved by 8.84% and 7.52% in New European Driving Cycle and Worldwide harmonised Light Vehicle Test Cycle, respectively, compared with the benchmark algorithm-based strategy.

Optimization of Process Parameter and Temperature Uniformity On Wafers For Rapid Thermal Processing

1995 ◽  
Vol 387 ◽  
Author(s):  
Andreas Tillmann
Keyword(s):  
Standard Deviation ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Oxide Thickness ◽  
Simulation Software ◽  
Process Parameter ◽  
Parameter Distribution ◽  
Temperature Uniformity ◽  
New Strategy ◽  
The Impact

AbstractA new strategy based algorithm to optimize process parameter uniformity (e.g.sheet resistance, oxide thickness) and temperature uniformity on wafers in a commercially available Rapid Thermal Processing (RTP) system with independent lamp control is described. The computational algorithm uses an effective strategy to minimize the standard deviation of the considered parameter distribution. It is based on simulation software which is able to calculate the temperature and resulting parameter distribution on the wafer for a given lamp correction table. A cyclical variation of the correction values of all lamps is done while minimizing the standard deviation of the considered process parameter. After the input of experimentally obtained wafer maps the optimization can be done within a few minutes. This technique is an effective tool for the process engineer to use to quickly optimize the homogeneity of the RTP tool for particular process requirements. The methodology will be shown on the basis of three typical RTP applications (Rapid Thermal Oxidation, Titanium Silicidation and Implant Annealing). The impact of variations of correction values for single lamps on the resulting process uniformity for different applications will be discussed.

The Secret Diary of an Information Manager Aged 29 and 3/4

2004 ◽  
Vol 4 (1) ◽  
pp. 60-62
Author(s):  
Vicky Fordham
Keyword(s):  
Current System ◽  
Management Systems ◽  
Library Management ◽  
Short Space ◽  
Information Manager ◽  
New System

In five years at Pinsents I have seen three different library management systems. Our current system, OLIB7, has been in situ since September 2002 and for the most part is working well. But why have we had three in such a short space of time? Why did we choose OLIB7? And is implementing a new system really all that bad?

In Situ Spectroscopic Ellipsometry Study of SiC Oxidation at Low Oxygen-Partial-Pressures

2010 ◽  
Vol 645-648 ◽  
pp. 813-816 ◽  
Author(s):  
Keiko Kouda ◽  
Yasuto Hijikata ◽  
Hiroyuki Yaguchi ◽  
Sadafumi Yoshida
Keyword(s):  
Growth Rate ◽  
Spectroscopic Ellipsometry ◽  
Reaction Rate ◽  
Oxidation Process ◽  
Early Stage ◽  
Oxide Thickness ◽  
Oxide Growth ◽  
Low Oxygen ◽  
Partial Pressures

We have investigated the oxidation process of SiC (000-1) C-face at low oxygen partial pressures using an in-situ spectroscopic ellipsometry. The oxide growth rate decreased steeply at the early stage of oxidation and then slowly decreased with increasing oxide thickness. The initial oxide growth rate was almost proportional to the oxygen　partial　pressure for both the polar directions. This result suggests that the initial interfacial reaction rate is constant regardless of the concentration of oxidants reaching the interface.

Real Time Observation of SiC Oxidation Using an In Situ Ellipsometer

2006 ◽  
Vol 527-529 ◽  
pp. 1031-1034 ◽  
Author(s):  
K. Kakubari ◽  
R. Kuboki ◽  
Yasuto Hijikata ◽  
Hiroyuki Yaguchi ◽  
Sadafumi Yoshida
Keyword(s):  
Real Time ◽  
Rate Constants ◽  
Oxidation Rate ◽  
Oxide Thickness ◽  
High Accuracy ◽  
Oxidation Time ◽  
The Real ◽  
Time Observation ◽  
Real Time Observation

Real time observation of SiC oxidation was performed using an in-situ ellipsometer over the temperature range from 900°C to 1150°C. The relations between oxide thickness and oxidation time were obtained precisely by virtue of the real time measurements. We analyzed the relations between oxide thickness and oxidation time by applying the Deal and Grove model to obtain the linear and parabolic rate constants. Taking advantage of in-situ measurements, we successfully obtained the oxidation rate constants with high accuracy.

A new system for the in-situ recalibration of force platforms

2006 ◽  
Vol 39 ◽  
pp. S113
Author(s):  
A. Cedraro ◽  
L. Chiari ◽  
A. Cappello
Keyword(s):  
New System

A Study on the Knocking and Misfire Detection System Using Breakdown Voltage Characteristics

2002 ◽  
Vol 124 (3) ◽  
pp. 650-659 ◽  
Author(s):  
J. K. Park ◽  
J. O. Chae
Keyword(s):  
Breakdown Voltage ◽  
Detection System ◽  
Exhaust Emissions ◽  
System Concept ◽  
Spark Plug ◽  
Negative Effect ◽  
Misfire Detection ◽  
Three Way Catalyst ◽  
New System ◽  
Engine Power

Engine knocking and misfire cause a negative effect on the engine power and the exhaust emissions such as HC, CO and NOx. They also cause permanent damages to the three way catalyst (TWC) system. And a heavy knock can cause severe damages to the engine itself, which gives more reason why it must be detected and corrected. This study introduces a new system concept for detecting combustion misfire and knocking using breakdown voltage (BDV) characteristics between spark plug electrodes. This system detects and evaluates the degree of combustion by measuring the breakdown voltage which predicts that the breakdown voltage depends on the pressure and the temperature.

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